Research Article
BibTex RIS Cite
Year 2022, Volume: 2 Issue: 1, 43 - 50, 30.06.2022

Abstract

Supporting Institution

Ataturk University

Thanks

The authors thank the solid-state physics laboratory, Ataturk University, nano fabrication laboratory, university of Manitoba, physics laboratory, Erzincan University for supporting this research.

References

  • [1] Ying-Ting Wang, Wha-Tzong Whang, and Chun-Hua Chen Hollow V2O5 Nanoassemblies for High-Performance Room-Temperature Hydrogen Sensors DOI: 10.1021/am509182s ACS Appl. Mater. Interfaces 2015, 7, 8480−8487
  • [2] Gary W. Hunter, Philip G. Neudeck, G.D. Jefferson, and G.C. Madzsar the development of hydrogen sensor technology at nasa lewis research center Fourth An_nual Space System Health Management Technology Conference sponsored by the American Institute of Aeronautics an dA=stronautic Cincinnati, Ohio, November 17-18, 1992
  • [3] Kenji Obata, Shizuko Kumazawa, Shigenori Matsushima, Kengo Shimano, Noboru Yamazo NASICON-based potentiometric CO2 sensor combined with new materials operative at room temperature, Sensors and Actuators B 108 (2005) 352–358
  • [4] H.S. Uhm, B.H. Hong, P.Y. Oh, E.H. Choi, Properties of excited xenon atoms in a plasma display panel, Thin Solid Films 517 (2009) 4023–4026.
  • [5] S. Gunes, N.S. Sariciftci, Hybrid solar cells, Inorg. Chim. Acta 361 (2008) 581–588.
  • [6] Y.J. Lee, J.H. Kim, J.N. Jang, I.H. Yang, S.N. Kwon, M.P. Hong, D.C. Kim, K.S. Oh, S.J. Yoo, B.J. Lee, W.G. Jang, Development of inverted OLED with top ITO anode by plasma damage-free sputtering, Thin Solid Films 517 (2009) 4019– 4022.
  • [7] Z. Jiao, M.H. Wu, J.Z. Gu, X.L. Sun, The gas sensing characteristics of ITO thin film prepared by sol–gel method, Sens. Actuators B 94 (2003) 216–221.
  • [8] T. Wagner, T. Sauerwald, C.-D. Kohl, T. Waitz, C. Weidmann, M. Tiemann, Gas sensor based on ordered mesoporous In2O3, Thin Solid Films 517 (2009)6170–6175.
  • [9] H.S. Al-Salman, M.J. Abdullah Hydrogen gas sensing based on ZnO nanostructure prepared by RF-sputtering on quartz and PET substrates Sensors and Actuators B 181 (2013) 259– 266
  • [10] Three electrodes gas sensor based on ITO thin film Sang-Mun Leea, Yun-Su Leea, Chang-Hyun Shima, Nak-Jin Choia, Byung-Su Jooa,Kap-Duk Songa, Jeung-Soo Huhb, Duk-Dong Leea,* Sensors and Actuators B 93 (2003) 31–35
  • [11] The gas sensing characteristics of ITO thin film prepared by sol–gel method Zheng Jiao∗, Minghong Wu, Jianzhong Gu, Xilian Sun Sensors and Actuators B 94 (2003) 216–221
  • [12] Low temperature high sensor response nano gas sensor using ITO nanofibers Shiyou Xu, Yong Shi∗ Sensors and Actuators B 143 (2009) 71–75
  • [13] Electrical, optical and structural characteristics of indium-tin-oxide thin films deposited on glass and polymer substrates A.K. Kulkarnia,*, K.H. Schulzb, T.-S. Lima, M. Khanb Thin Solid Films 308–309 (1997) 1–7
  • [14] Flower-like Palladium Nanoclusters Decorated Graphene Electrodes for Ultrasensitive and Flexible Hydrogen Gas Sensing Dong Hoon Shin, Jun Seop Lee, Jaemoon Jun, Ji Hyun An, Sung Gun Kim, Kyung

ITO gas sensors for CO2 and H2 detection

Year 2022, Volume: 2 Issue: 1, 43 - 50, 30.06.2022

Abstract

Thin films with extensive characteristics and surface morphology are very important in designing high performance and reliable gas sensors. Therefore comprehensive study carried out on ITO transparent conductive oxide resistive based H2 and CO2 gas sensors. As a result bottom up prototype gas sensor device fabricated and tested in order to understand those properties and behaviours that effects on sensitivity. All the thin film deposited employing RF magnetron sputtering technique investigated by SEM, XRD, EDAX and Absorption methods. Different oxygen partial pressure introduced as a variable to optimize the surface thin film. Those synthesized material properties showed reasonable correlation with the sensitivities and response of ITO devices for reducing H2 and CO2 gases.

References

  • [1] Ying-Ting Wang, Wha-Tzong Whang, and Chun-Hua Chen Hollow V2O5 Nanoassemblies for High-Performance Room-Temperature Hydrogen Sensors DOI: 10.1021/am509182s ACS Appl. Mater. Interfaces 2015, 7, 8480−8487
  • [2] Gary W. Hunter, Philip G. Neudeck, G.D. Jefferson, and G.C. Madzsar the development of hydrogen sensor technology at nasa lewis research center Fourth An_nual Space System Health Management Technology Conference sponsored by the American Institute of Aeronautics an dA=stronautic Cincinnati, Ohio, November 17-18, 1992
  • [3] Kenji Obata, Shizuko Kumazawa, Shigenori Matsushima, Kengo Shimano, Noboru Yamazo NASICON-based potentiometric CO2 sensor combined with new materials operative at room temperature, Sensors and Actuators B 108 (2005) 352–358
  • [4] H.S. Uhm, B.H. Hong, P.Y. Oh, E.H. Choi, Properties of excited xenon atoms in a plasma display panel, Thin Solid Films 517 (2009) 4023–4026.
  • [5] S. Gunes, N.S. Sariciftci, Hybrid solar cells, Inorg. Chim. Acta 361 (2008) 581–588.
  • [6] Y.J. Lee, J.H. Kim, J.N. Jang, I.H. Yang, S.N. Kwon, M.P. Hong, D.C. Kim, K.S. Oh, S.J. Yoo, B.J. Lee, W.G. Jang, Development of inverted OLED with top ITO anode by plasma damage-free sputtering, Thin Solid Films 517 (2009) 4019– 4022.
  • [7] Z. Jiao, M.H. Wu, J.Z. Gu, X.L. Sun, The gas sensing characteristics of ITO thin film prepared by sol–gel method, Sens. Actuators B 94 (2003) 216–221.
  • [8] T. Wagner, T. Sauerwald, C.-D. Kohl, T. Waitz, C. Weidmann, M. Tiemann, Gas sensor based on ordered mesoporous In2O3, Thin Solid Films 517 (2009)6170–6175.
  • [9] H.S. Al-Salman, M.J. Abdullah Hydrogen gas sensing based on ZnO nanostructure prepared by RF-sputtering on quartz and PET substrates Sensors and Actuators B 181 (2013) 259– 266
  • [10] Three electrodes gas sensor based on ITO thin film Sang-Mun Leea, Yun-Su Leea, Chang-Hyun Shima, Nak-Jin Choia, Byung-Su Jooa,Kap-Duk Songa, Jeung-Soo Huhb, Duk-Dong Leea,* Sensors and Actuators B 93 (2003) 31–35
  • [11] The gas sensing characteristics of ITO thin film prepared by sol–gel method Zheng Jiao∗, Minghong Wu, Jianzhong Gu, Xilian Sun Sensors and Actuators B 94 (2003) 216–221
  • [12] Low temperature high sensor response nano gas sensor using ITO nanofibers Shiyou Xu, Yong Shi∗ Sensors and Actuators B 143 (2009) 71–75
  • [13] Electrical, optical and structural characteristics of indium-tin-oxide thin films deposited on glass and polymer substrates A.K. Kulkarnia,*, K.H. Schulzb, T.-S. Lima, M. Khanb Thin Solid Films 308–309 (1997) 1–7
  • [14] Flower-like Palladium Nanoclusters Decorated Graphene Electrodes for Ultrasensitive and Flexible Hydrogen Gas Sensing Dong Hoon Shin, Jun Seop Lee, Jaemoon Jun, Ji Hyun An, Sung Gun Kim, Kyung

Details

Primary Language Turkish
Subjects Condensed Matter Physics
Journal Section Research Articles
Authors

Sadna IŞIK This is me

Ömer ÇOBAN This is me

Cyrus SHAFAİ This is me

Emre GÜR

Project Number 2015/93
Publication Date June 30, 2022
Published in Issue Year 2022 Volume: 2 Issue: 1

Cite

Vancouver IŞIK S, ÇOBAN Ö, SHAFAİ C, GÜR E. ITO gas sensors for CO2 and H2 detection. JAPA. 2022;2(1):43-50.