Yüksek Sıcaklıkta Gaz Algılaması ve IR Kaynakları İçin Dayanıklı Microhotplate Dizaynı

Abstract

Microhotplate’ler (MHP) yüksek sıcaklıklarda gaz algılanması, ve IR kaynağı yapımı gibi çok önemli uygulama alanlarına sahip olmasına rağmen, göreceli yüksek sıcaklıklarda çalıştırıldıklarında oluşan yüksek termal stres’lerden dolayı kısa süreli dayanaklığa sahiptirler. Bu çalışmada yüksek sıcaklıklarda düşük termal stres’e sahip bir dizaynı, spring tipi dizaynın ve termal genleşme sabitleri yakın olan malzeme seçimininin avantajlarını birleştirerek elde ettik. FEM sonuçları düşük termal stres elde edebilmesini sağlayan ana etkenin termal genleşme sabitleri yakın malzemeler seçmek olduğunu göstermiştir. SiN/Polysilicon/SiN katmanlarına ship spring tipi dizayn sayesinde 2119 K sıcaklığında 180 MPa gibi düşük termal stres FEM kullanılarak elde edilmiştir. Sıcaklığın 2076 K değerine ulaşması için gereken tepkime süresi ve güç tüketimi 200 ms ve 3.47 mW olarak hesaplanmıştır.

Keywords

• Microhotplate,MEMS (mikroelektromekanik sistemler ve sensörler),düşük termal stres,yüksek sıcaklık,IR (infrared) kaynağı,gaz algılaması

Reliable Mircohotplate Design for High temperature Gas Sensing and IR Source

Abstract

While Microhotplates (MHPs) keeps very important place in many critical applications such as high temperature gas sensing and building IR source, they still suffer from short term reliability due to high thermal stress at relatively high temperatures. Here we demonstrate low thermal stress design at high temperatures by combining the advantages of spring type structure and compatible materials in terms of thermal expansion constant. FEM results demonstrated that, the main mechanism behind achieving low thermal stress is using compatible materials. A low thermal stress of 180 MPa at 2119 K was achieved by using SiN/Polysilicon/SiN stack with a spring type design via FEM tool. The response time required to reach 2076 K was calculated as 200 ms with 3.47mW power consumption.

Keywords

• Microhotplate,MEMS (microelectromechanical systems and sensors),low thermal stress,ultra-high temperature,IR source,gas sensing

References

1. Ahn JY, Kim SB, Kim JH, Jang NS, Kim DH, Lee HW, Kim JM, and Kim SH, 2016. A micro-chip initiator with controlled combustion reactivity realized by integrating Al/CuO nanothermite composites on a microhotplate platform. IOP Journal of Micromechanics and Microengineering, 26(1):1-10
2. Barritault P, Brun M, Gidon S, Nicoletti S, 2011. Mid-IR source based on a free-standing microhotplate for autonomous CO2 sensing in indoor applications. Elsevier Sensors and Actuators A: Pyhsical, 172: 379-385
3. Cardinale GF, Tustison RW, 1992. Fracture strength and biaxial modulus measurement of plasma silicon nitride films. Elsevier Thin Solid Films, 207: 126-130
4. Chauhan VM, Hopper RH, Ali SZ, King EM, Udrea F, Oxley CH, Aylott JW, 2014. Thermo-optical characterization of fluorescent rhodamine B basedtemperature-sensitive nanosensors using a CMOS MEMSmicro-hotplate. Elsevier Sensors and Actuators B: Chemical, 192: 126-133
5. Chowdhury AKMS, Akbar SA, Kapileshwar S, Schorr JR, 2001. A rugged oxygen gas sensor with solid reference for high temperature applications. Journal of the electrochemical society, 148: G91-G94
6. Graf M, Barrettino D, Kirstein KU, Hierlemann A, 2006. CMOS microhotplate sensor system for operating temperatures up to 500. Elsevier Sensors and Actuators B: Chemical, 117: 346-352
7. Govindhan M, Sidhureddy B, Chen A, 2018. High Temperature Hydrogen Gas Sensor Based on Three-Dimensional Hierarchical Nanostructured Nickel-Cobalt Oxide. ACS Applied Nano Materials, 1: 6005-6014
8. He A, Yu J, Wei G, Chen Y, Wu H, Tang Z, 2016. Short-Time Fourier Transform and Decision Tree-Based Pattern Recognition for Gas Identification Using Temperature Modulated Microhotplate Gas Sensors. Journal of Sensors, 2016: 1-12.

9. Huang WC, Chen CN, Shen SH, Chen CC, 2009. Study of the annealing effect of low-temperature oxide on the etch rate in TMAH solutions for microheater applications. 2009 IEEE 3rd International Conference on Nano/Molecular Medicine and Engineering, 18-21 October 2009, Tainan, Taiwan
10. Liu Y, Parisi J, Sun X, Lei Y, 2014. Solid-Sate Gas Sensors for High Temperature Application – A review. RCS Journal of Material Chemistry A, 2: 9919-9943
11. Mitzner KD, Sternhagen J, Galipeau DW, 2003. Development of a micromachined hazardous gas sensor array. Elsevier Sensors and Actuators B: Chemical, 93: 92-99
12. Mele L, Santagata F, Iervolino E, Mihailovic M, Rossi T, Tran AT, Schellevis H, Creemer JF, Sarro PM, 2012. A molybdenum MEMS microhotplate for high-temperature operation. Elsevier Sensors and Actuators A: Pyhsical, 188: 173-180
13. Mo Y, Okawa Y, Inoue K, Natukawa K, 2002. Low voltage and low-power optimization of micro-heater and its on-chip drive circuitry for gas array. Sensors and Actuators A: Physical, 100: 94-101
14. Morozov O, Postnikov A, 2014. Mechanical strength study of SiO2 isolation blocks merged in silicon substrate. IOP Journal of Micromechanics and Microengineering, 25: 1-11
15. Müller L, Kapplinger I, Biermann S, Brode W, Hoffmann M, 2014. Infrared emitting nanostructures for highly efficient microhotplates” IOP Journal of Micromechanics and Microengineering. 24: 1-9
16. Noda N, Hetnarski RB, Tanigawa Y, 2003. Thermal Stresses, Second Edition, New York, USA, 493 p.
17. Peris M, Escuder-Gilabert L, 2009. A 21st century technique for food control: Electronic noses. Analytica Chimica Acta, 638: 1-15
18. Richter D, Fritze H, 2013. High temperature Gas Sensor. Springer Series on Chemical Sensors and Biosensors, 1-46p.
19. Roy S, Sarkar CK, Bhattacharyya P, 2012. A highly sensitive methane sensor with nickel alloy microheater on micromachined Si substrate. Elsevier Solid-State Electronics, 76: 84-90
20. Sama J, Seifner MS, Domenech-Gil G, Santander J, Calaza C, Moreno M, Gracia I, Barth S, Romano-Rodriguez A, 2017. Low temperature humidity sensor based on Ge nanowires selectivelygrown on suspended microhotplates. Elsevier Sensors and Actuators B: Chemical, 243: 669-677
21. Schwebel T, Fleischer M, Meixner H, 2000. A selective, temperature compensated O2 sensor based on Ga2O3 thin films. Elsevier Sensors and Actuators B: Chemical, 65: 176-180
22. Sharpe WN, Yuan JB, Vaidyanathan R, 1997. Measurements of Young’s modulus poisson’s ratio, and tensile strength of polysilicon. Proceedings IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots, 26-30 January 1997, Nagoya, Japan
23. Silvestri C, Riccio M, Poelma RH, Morana B, Vollebregt S, Santagata F, Irace A, Zhang GQ and Sarro PM, 2016. Thermal characterization of carbon nanotube foam using MEMS microhotplates and thermographic analysis. RCS Nanoscale, 15:1-10
24. Steinhauer S, Chapelle A, Menini P, Sowwan M , 2016. Local CuO Nanowire Growth on Microhotplates: In Situ Electrical Measurements and Gas Sensing Application. ACS Sensors, 1: 503-507.
25. Yamazoe N, 2005. Toward innovations of gas sensor technology. Elsevier Sensors and Actuators B: Chemical, 108: 2-14
26. Yu S, Gulari E, Kanicki J, 1996. Selective deposition of polycrystalline silicon thing films at low temperature by hot wire chemical vapor deposition. Applied Physics Letters, 68: 2681-2683.