Abstract
Optical micro-ring resonator (MRR) sensors are an emerging technology that attracts attention not only because it’s small footprint but also because of its high-quality features. In this work, a Silicon on Insulator (SOI)-based MRR sensor is studied for a practical label-free sensor. After the analysis of this study, it is found that a smaller (compare to previous studies) label-free optical sensor with a sensitivity of 206nm/RIU and a q-factor of 17900 can be obtained when the optimal designed parameters are used. Thus, it is believed that, this work would shed a light on optical sensor technology for more compact-efficient, low-cost and complementary metal-oxide-semiconductor (CMOS)-compatible sensors for daily life usage.
Keywords
References
- Zang K, Zhang D, Huo Y, Chen X, Lu CY, Fei ET, Kamins T.I, Feng X, Huang Y, Harris J.S, 2015. Microring bio-chemical sensor with integrated low dark current Ge photodetector. Appl. Phys. Lett. 106:101111-4.
- Washburn AL, Luchansky M.S, Bowman AL, Bailey RC, 2010. Quantitative, Label-Free Detection of Five Protein Biomarkers Using Multiplexed Arrays of Silicon Photonic Microring Resonators. Anal. Chem. 82:69–72.
- Yanming L, Jihwan K and Escuti M. J, 2012. Broadband orbital angular momentum manipulation using liquid crystal thin films, Complex Light and Optical Forces VI, 8274: 827415-8.
- Yao AM, and Padgett MJ, 2011. Orbital angular momentum: origins, behavior and applications, Advances in Optics and Photonics, 3:161–204.
- Fan X, White M, Shopova S, Zhu H, Suter JD, Sun Y, 2008. Sensitive optical biosensors for unlabeled target. Analytica Chimica Acta, 620(1-2): 8-26
- Cai D, Lu J, Chen CL, Lee CC, Lin C, Yen T, 2015. High Q-factor microring resonator wrapped by the curved waveguide. Scientific reports, 5:10078.
- Cicek K, 2018. Hybrid Micro-Ring Resonator Hydrogen Sensor Based on Intensity Detection, Electrica, 18 (2):167-171.
- Cicek K, Eryürek M, Kiraz A, 2017. Single-slot hybrid microring resonator hydrogen sensor, JOSA B, 34 (7):1465-1470
- Yuan GH, Gao L, Chen YR, Liu XL, Wang J, Wang Z.R, 2014. Improvement of optical sensing performances of a double-slot-waveguide-based ring resonator sensor on silicon-on-insulator platform. Optik, 125:850–854.
- De VK, Bartolozzi I, Schacht E, Bienstman P, Baets R, 2017. Silicon-on-Insulator microring resonator for sensitive and label-free biosensing. Opt. Express, 15:7610–7615.
- Gu H, Gong H, Wang C, Sun X, Wang X, Yi Y, Chen C, Wang F, and Zhang D, 2019. Compact Inner-Wall Grating Slot Microring Resonator for Label-Free Sensing, Sensors, 19:5038-12.
- Steglich P, Hülsemann M, Dietzel B, Mai A, 2019. Optical Biosensors Based on Silicon-On-Insulator Ring Resonators, Molecules, 24(3):519-14.
- Melman P, 1984. Optical waveguide theory [Book Review by Paul Melman of text by Allan W. Snyder and John D. Love], IEEE Journal of Quantum Electronics, 20(10): 1217-1217.
Abstract
Optical micro-ring resonator (MRR) sensors are an emerging technology that attracts attention not only because it’s small footprint but also because of its high-quality features. In this work, a Silicon on Insulator (SOI)-based MRR sensor is studied for a practical label-free sensor. After the analysis of this study, it is found that a smaller (compare to previous studies) label-free optical sensor with a sensitivity of 206nm/RIU and a q-factor of 17900 can be obtained when the optimal designed parameters are used. Thus, it is believed that, this work would shed a light on optical sensor technology for more compact-efficient, low-cost and complementary metal-oxide-semiconductor (CMOS)-compatible sensors for daily life usage.
Keywords
References
- Zang K, Zhang D, Huo Y, Chen X, Lu CY, Fei ET, Kamins T.I, Feng X, Huang Y, Harris J.S, 2015. Microring bio-chemical sensor with integrated low dark current Ge photodetector. Appl. Phys. Lett. 106:101111-4.
- Washburn AL, Luchansky M.S, Bowman AL, Bailey RC, 2010. Quantitative, Label-Free Detection of Five Protein Biomarkers Using Multiplexed Arrays of Silicon Photonic Microring Resonators. Anal. Chem. 82:69–72.
- Yanming L, Jihwan K and Escuti M. J, 2012. Broadband orbital angular momentum manipulation using liquid crystal thin films, Complex Light and Optical Forces VI, 8274: 827415-8.
- Yao AM, and Padgett MJ, 2011. Orbital angular momentum: origins, behavior and applications, Advances in Optics and Photonics, 3:161–204.
- Fan X, White M, Shopova S, Zhu H, Suter JD, Sun Y, 2008. Sensitive optical biosensors for unlabeled target. Analytica Chimica Acta, 620(1-2): 8-26
- Cai D, Lu J, Chen CL, Lee CC, Lin C, Yen T, 2015. High Q-factor microring resonator wrapped by the curved waveguide. Scientific reports, 5:10078.
- Cicek K, 2018. Hybrid Micro-Ring Resonator Hydrogen Sensor Based on Intensity Detection, Electrica, 18 (2):167-171.
- Cicek K, Eryürek M, Kiraz A, 2017. Single-slot hybrid microring resonator hydrogen sensor, JOSA B, 34 (7):1465-1470
- Yuan GH, Gao L, Chen YR, Liu XL, Wang J, Wang Z.R, 2014. Improvement of optical sensing performances of a double-slot-waveguide-based ring resonator sensor on silicon-on-insulator platform. Optik, 125:850–854.
- De VK, Bartolozzi I, Schacht E, Bienstman P, Baets R, 2017. Silicon-on-Insulator microring resonator for sensitive and label-free biosensing. Opt. Express, 15:7610–7615.
- Gu H, Gong H, Wang C, Sun X, Wang X, Yi Y, Chen C, Wang F, and Zhang D, 2019. Compact Inner-Wall Grating Slot Microring Resonator for Label-Free Sensing, Sensors, 19:5038-12.
- Steglich P, Hülsemann M, Dietzel B, Mai A, 2019. Optical Biosensors Based on Silicon-On-Insulator Ring Resonators, Molecules, 24(3):519-14.
- Melman P, 1984. Optical waveguide theory [Book Review by Paul Melman of text by Allan W. Snyder and John D. Love], IEEE Journal of Quantum Electronics, 20(10): 1217-1217.
Details
| Primary Language | English |
|---|---|
| Subjects | Electrical Engineering |
| Journal Section | Elektrik Elektronik Mühendisliği / Electrical Electronic Engineering |
| Authors | |
| Publication Date | March 1, 2020 |
| Submission Date | January 11, 2020 |
| Acceptance Date | January 24, 2020 |
| Published in Issue | Year 2020 |