Alttaş sıcaklığının expanding thermal plazma yöntemi ile elde edilen a-Si:H filmlerin optik ve elektriksel özellikleri üzerine etkisi

Yıl 2011, Cilt: 2 Sayı: 1, 40 - 49, 01.06.2011

Tayyar Güngör Guy J. Adrıaenssens

Öz

Optical properties and dark current activation energy of hydrogenated amorphous silicon (a,Si:H) produced by the expanding thermal plasma chemical vapour deposition (ETPCVD) technique are investigated as a function of substrate temperature in the 150,500°C temperature range. The optical transmission spectra were used to obtain the thickness, refractive index, and optical band gap of the a, Si:H films. It is observed that while the refractive index is increasing with substrate temperature, the optical band gap and deposition rate, as well as the dark conductivity activation energy, are decreasing.

Anahtar Kelimeler

Hydrogenated amorphous silicon, solar cell, optical parameters, optical transmittance.

Effects of substrate temperature on optical and electrical properties of a-Si:H films produced by expanding thermal plasma thecnique

Öz

Optical properties and dark current activation energy of hydrogenated amorphous silicon (a,Si:H) produced by the expanding thermal plasma chemical vapour deposition (ETPCVD) technique are investigated as a function of substrate temperature in the 150,500°C temperature range. The optical transmission spectra were used to obtain the thickness, refractive index, and optical band gap of the a, Si:H films. It is observed that while the refractive index is increasing with substrate temperature, the optical band gap and deposition rate, as well as the dark conductivity activation energy, are decreasing.

Anahtar Kelimeler

Hydrogenated amorphous silicon, solar cell, optical parameters, optical transmittance.

Kaynakça

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