Arduino-Tabanlı Elektrometre Tasarımı ve Metal Oksit Yarıiletken Uygulamaları
Year 2023,
Volume: 14 Issue: 1, 163 - 170, 22.06.2023
Tayyar Güngör
,
Ayşegül Kılıçaslan
Ebru Güngör
Abstract
Bu çalışmada, yarıiletken aygıt karakterizasyonu için ortam sıcaklığı gibi farklı fiziksel ortam koşullara bağlı olarak 0.1 nA-10 mA aralığında düşük akım değerlerini ölçmek amacıyla düşük maliyetli ve uygulama kolaylığı olan bir elektrometre tasarımı gerçekleştirilmiştir. Kullanılan logaritmik yükselteç ve mikrokontrolcü ile bu tasarım, örnek sıcaklığı ve düşük akımların aynı anda ölçülmesine izin vermektedir. Yeni elektrometre sisteminin testleri, ultrasonik kimyasal püskürtme tekniği ile hazırlanan ZnO yarıiletken filmin 300-450 K sıcaklık aralığında karanlık akım ölçümleri yapılarak gerçekleştirilmiştir. Çalışmada yapısal, optik ve yüzeysel özellikleri de incelenen ZnO filmin yüzeyine Al buharlaştırılarak elektriksel ölçümler için gereken iletken kontaklar (elektrot) oluşturulmuştur. Al buharlaştırma işleminde kullanılan maskenin boyutlarına bağlı olarak belirlenen geometrik faktör ve ölçülen akım değerlerinden filmin elektriksel iletkenliğinin sıcaklığa bağlı değişimi elde edilmiştir. Karşılaştırmalı olarak gerçekleştirilen deneysel sonuçlar, tasarlanan yeni elektrometrenin ticari elektrometreye göre daha ucuz ve daha esnek bir kullanıma sahip olduğunu göstermektedir. Yeni sistem lisans ve lisansüstü öğrencileri ile birlikte araştırmacıların eş-zamanlı olarak ışık şiddeti ve hatta neme bağlı elektriksel iletkenlik ölçümlerinde oldukça kullanışlıdır.
Supporting Institution
Burdur Mehmet Akif Ersoy Üniversitesi Bilimsel Araştırma Projeleri Koordinatörlüğü
Project Number
0799-YL-21, 0804-YL-21 ve 0324-NAP-16
Thanks
Bu çalışma, 0799-YL-21, 0804-YL-21 ve 0324-NAP-16 numaralı projeler ile Burdur Mehmet Akif Ersoy Üniversitesi Bilimsel Araştırma Projeleri Koordinatörlüğü tarafından desteklenmiştir.
References
- Abu EL-Fadl, A., Galal, A.M., Abd El-Moiz, A.B., Rashad, M. (2005). Optical constants of Zn1−xLixO films prepared by chemical bath deposition technique. Physica B Condensed Matter, 366(1-4): 44-54.
- Acharya, Y.B. , Vyavahare, P.D. (2000). A low current logarithmic LED electrometer. IEEE Transactions on Instrumentation and Measurement, 49: 5-9.
- Acharya, Y.B. (2006). Logarithmic current electrometer using commercially available current conveyor AD844. International Journal of Electronics, 4(93): 223-229.
- Atay, F. (2001). Cd1-xNixS filmlerinin elektriksel, optiksel, yapısal ve yüzeysel özelliklerinin incelenmesi. Doktora Tezi, Eskişehir Osmangazi Üniversitesi, Eskişehir.
- Bilgin, V. (2003). ZnO filmlerinin bazı elektrik, optik, yapısal ve yüzeysel özellikleri üzerine kalay katkısının etkisi. Doktora Tezi, Eskişehir Osmangazi Üniversitesi, Eskişehir.
- Birgin, E.G., Chambouleyron, I., Martinez, J.M. (1999). Estimation of optical constants of thin films using unconstrain optimization. Journal of Computational Physics, 151: 862-888.
- Bougrine, A., El Hichou, A., Addou, M., Ebothé, J., Kacho-uane, A., Troyon, M. (2003). Structural, optical and cathodoluminescence characteristics of undoped and tindoped ZnO thin films prepared by spray pyrolysis. Materials Chemistry and Physics, 80(2): 438-445.
- Chopra, K.L., Major, S., Pandya, K. (1983). Transparent conductors: A status review. Thin Solid Films, 102(1), 1-46.
- Chui, C.O., Ito, F., Saraswat, K.C. (2006). Nanoscale germanium MOS dielectrics: Part I. Germanium oxynitrides. IEEE Transactions. Electron. Devices, 53(7); 1501–1508.
- Du, Y., Zhang, M.S., Hong, J., Shen, Y., Chen, Q., Yin, Z. (2003). Structural and optical properties of nanophase zinc oxide. Applied Physics A, 76: 171-176.
- Evangelou, E.K., Mavrou, G., Dimoulas, A., Konofaos, N. (2007). Rare earth oxides as high-k dielectrics for Ge based MOS devices: An electrical study of Pt/Gd2O3/Ge capacitors. Solid-State Electronics, 51(1): 164-169.
- Fay, S., Kroll, U., Bucher, C., Vallat-Sauvain, E., Shah, A. (2005). Low pressure chemical vapour deposition of ZnO layers for thin-film solar cells: Temperature-induced morphological changes. Solar Energy Materials and Solar Cells, 86(3): 385-387.
- Khairurrijal, M.A., Suhendi, A., Munir, M.M., Surachman, A. (2007). A simple microcontroller-based current elect-rometer made from LOG112 and C8051F006 for measuring current in metal-oxide-semiconductor devices. Measurement Science and Technology, 18: 3019-3024.
- Khairurrijal, W.M., Miyazaki, S., Hirose, M. (2000a). Analy-tic model of direct tunnel current through ultrathin gate oxides. Journal of Applied Physics, 87(6): 3000-3005.
- Khairurrijal, W.M., Miyazaki, S., Hirose, M. (2000b). Unified analytic model of direct and Fowler-Nordheim tunnel currents through ultrathin gate oxides. Applied Physics Letters, 77(23): 3580-3582.
- Rajput, S.S., Jamuar, S.S. (2002). Low voltage, low power, highperformance type II current conveyor-based linear current electrometer. Review of Scientific Instruments, 73(10): 3644–3651.
- Rajput, S.S. (2003). An improved multigain range linear current electrometer. Review of Scientific Instruments, 74(6): 3120-3126.
- URL-1 (2023) https://www.ti.com/lit/ds/symlink/log2112.pdf (Erişim Tarihi: 22.02.2023)
- URL-2 (2023) https://www.ti.com/product/LOG114 (Erişim Tarihi: 22.02.2023)
- Vigil, O., Vaillant, L., Cruz, F., Santana, G., Morales-Acevedo, A., Contreras-Puente, G. (2000). Spray pyrolysis deposition of cadmium–zinc oxide thin films. Thin Solid Films, 361: 53-55.
- Wang, C., Zhao, J.C., Wang, X.M., Mai, B.X., Sheng, G.Y., Peng, P.A., Fu. J.M. (2002). Preparation, characterization and photocatalytic activity of nano-sized ZnO/SnO2 coupled photocatalysts. Applied Catalysis B: Environmental, 39(3): 269-279.
- Yıldırım, T., Gür, Emre., Tüzemen, S., Bilgin, V., Köse, S., Atay, F., Akyüz, I. (2005). Wide-bandgap modification of polycrystalline ZnO using Sn component on the basis of developing quantum-well hetero-structure. Physica E: Low-dimensional Systems and Nanostructures, 27(1): 290-295.
- Yıldırımlar, A. (2014). Zn tabanlı heteroeklemlerin kapasi-tans-voltaj karakterizasyonu. Yüksek Lisans Tezi, Burdur Mehmet Akif Ersoy Üniversitesi, Fen Bilimleri Enstitüsü, Fizik Anabilim Dalı, Burdur.
- Zahedi, F., Dariani, R.S., Rozati, S.M. (2014). Structural, optical and electrical properties of ZnO thin films prepared by Spray Pyrolysis: Effect of precursor concentration. Bulletin of Materials Science, 37: 433–439.
Arduino-Based Electrometer Design and Metal Oxide Semiconductor Applications
Year 2023,
Volume: 14 Issue: 1, 163 - 170, 22.06.2023
Tayyar Güngör
,
Ayşegül Kılıçaslan
Ebru Güngör
Abstract
In this study, a low-cost and easy-to-apply electrometer design was carried out to measure low current values in the range of 0.1 nA-10 mA depending on different physical environmental conditions such as ambient temperature for semiconductor device characterization. With the logarithmic amplifier and microcontroller used, this design allows simultaneous measurement of sample temperature and low currents. The tests of the new electrometer system were carried out by making dark current measurements in the 300-450 K temperature range of the ZnO semiconductor film prepared by ultrasonic chemical spraying technique. In the study, the conductive contacts (electrode) required for electrical measurements were formed by evaporating Al on the surface of the ZnO film, whose structural, optical and surface properties were also examined. The variation of the electrical conductivity of the film depending on the temperature was obtained from the geometric factor and the measured current values determined depending on the dimensions of the mask used in the Al evaporation process. Comparative experimental results show that the designed new electrometer is cheaper and more flexible to use than the commercial electrometer. The new system is very useful for undergraduate and graduate students and researchers to simultaneously measure light intensity and even moisture-induced electrical conductivity.
Project Number
0799-YL-21, 0804-YL-21 ve 0324-NAP-16
References
- Abu EL-Fadl, A., Galal, A.M., Abd El-Moiz, A.B., Rashad, M. (2005). Optical constants of Zn1−xLixO films prepared by chemical bath deposition technique. Physica B Condensed Matter, 366(1-4): 44-54.
- Acharya, Y.B. , Vyavahare, P.D. (2000). A low current logarithmic LED electrometer. IEEE Transactions on Instrumentation and Measurement, 49: 5-9.
- Acharya, Y.B. (2006). Logarithmic current electrometer using commercially available current conveyor AD844. International Journal of Electronics, 4(93): 223-229.
- Atay, F. (2001). Cd1-xNixS filmlerinin elektriksel, optiksel, yapısal ve yüzeysel özelliklerinin incelenmesi. Doktora Tezi, Eskişehir Osmangazi Üniversitesi, Eskişehir.
- Bilgin, V. (2003). ZnO filmlerinin bazı elektrik, optik, yapısal ve yüzeysel özellikleri üzerine kalay katkısının etkisi. Doktora Tezi, Eskişehir Osmangazi Üniversitesi, Eskişehir.
- Birgin, E.G., Chambouleyron, I., Martinez, J.M. (1999). Estimation of optical constants of thin films using unconstrain optimization. Journal of Computational Physics, 151: 862-888.
- Bougrine, A., El Hichou, A., Addou, M., Ebothé, J., Kacho-uane, A., Troyon, M. (2003). Structural, optical and cathodoluminescence characteristics of undoped and tindoped ZnO thin films prepared by spray pyrolysis. Materials Chemistry and Physics, 80(2): 438-445.
- Chopra, K.L., Major, S., Pandya, K. (1983). Transparent conductors: A status review. Thin Solid Films, 102(1), 1-46.
- Chui, C.O., Ito, F., Saraswat, K.C. (2006). Nanoscale germanium MOS dielectrics: Part I. Germanium oxynitrides. IEEE Transactions. Electron. Devices, 53(7); 1501–1508.
- Du, Y., Zhang, M.S., Hong, J., Shen, Y., Chen, Q., Yin, Z. (2003). Structural and optical properties of nanophase zinc oxide. Applied Physics A, 76: 171-176.
- Evangelou, E.K., Mavrou, G., Dimoulas, A., Konofaos, N. (2007). Rare earth oxides as high-k dielectrics for Ge based MOS devices: An electrical study of Pt/Gd2O3/Ge capacitors. Solid-State Electronics, 51(1): 164-169.
- Fay, S., Kroll, U., Bucher, C., Vallat-Sauvain, E., Shah, A. (2005). Low pressure chemical vapour deposition of ZnO layers for thin-film solar cells: Temperature-induced morphological changes. Solar Energy Materials and Solar Cells, 86(3): 385-387.
- Khairurrijal, M.A., Suhendi, A., Munir, M.M., Surachman, A. (2007). A simple microcontroller-based current elect-rometer made from LOG112 and C8051F006 for measuring current in metal-oxide-semiconductor devices. Measurement Science and Technology, 18: 3019-3024.
- Khairurrijal, W.M., Miyazaki, S., Hirose, M. (2000a). Analy-tic model of direct tunnel current through ultrathin gate oxides. Journal of Applied Physics, 87(6): 3000-3005.
- Khairurrijal, W.M., Miyazaki, S., Hirose, M. (2000b). Unified analytic model of direct and Fowler-Nordheim tunnel currents through ultrathin gate oxides. Applied Physics Letters, 77(23): 3580-3582.
- Rajput, S.S., Jamuar, S.S. (2002). Low voltage, low power, highperformance type II current conveyor-based linear current electrometer. Review of Scientific Instruments, 73(10): 3644–3651.
- Rajput, S.S. (2003). An improved multigain range linear current electrometer. Review of Scientific Instruments, 74(6): 3120-3126.
- URL-1 (2023) https://www.ti.com/lit/ds/symlink/log2112.pdf (Erişim Tarihi: 22.02.2023)
- URL-2 (2023) https://www.ti.com/product/LOG114 (Erişim Tarihi: 22.02.2023)
- Vigil, O., Vaillant, L., Cruz, F., Santana, G., Morales-Acevedo, A., Contreras-Puente, G. (2000). Spray pyrolysis deposition of cadmium–zinc oxide thin films. Thin Solid Films, 361: 53-55.
- Wang, C., Zhao, J.C., Wang, X.M., Mai, B.X., Sheng, G.Y., Peng, P.A., Fu. J.M. (2002). Preparation, characterization and photocatalytic activity of nano-sized ZnO/SnO2 coupled photocatalysts. Applied Catalysis B: Environmental, 39(3): 269-279.
- Yıldırım, T., Gür, Emre., Tüzemen, S., Bilgin, V., Köse, S., Atay, F., Akyüz, I. (2005). Wide-bandgap modification of polycrystalline ZnO using Sn component on the basis of developing quantum-well hetero-structure. Physica E: Low-dimensional Systems and Nanostructures, 27(1): 290-295.
- Yıldırımlar, A. (2014). Zn tabanlı heteroeklemlerin kapasi-tans-voltaj karakterizasyonu. Yüksek Lisans Tezi, Burdur Mehmet Akif Ersoy Üniversitesi, Fen Bilimleri Enstitüsü, Fizik Anabilim Dalı, Burdur.
- Zahedi, F., Dariani, R.S., Rozati, S.M. (2014). Structural, optical and electrical properties of ZnO thin films prepared by Spray Pyrolysis: Effect of precursor concentration. Bulletin of Materials Science, 37: 433–439.