Research Article

Si/Sige HETEROJUNCTION BIPOLAR TRANSISTORS (A REVIEW)

Volume: 13 Number: 1 June 30, 2000
EN TR

Si/Sige HETEROJUNCTION BIPOLAR TRANSISTORS (A REVIEW)

Abstract

The research on Sı/SiGe heterojunction bipolar transisfors has led the

ultra-high-speed transıstors tha! are compatible wilh the state-of-the-art silicon

inlegraled technology. The SiGe base regions ofthese transistors are grımn selectivety

on silicon substrates. Self-aligned slructures are used to reduce the external base

resisıance aııd base colleclor parasitic capacitance. The germanium profile in Ihe base

is graded to obtain a drift ejfect to reduce the base-transil tiıne. Si/SiGe integrated

circuils for applications in optical-flber link systems and Si/SiGe microwave pover

Iransistors have been produced wilh remarkable speeds. The SiGe semıconduaor

material system, HBT slructures and fabricalion, and device performance issues are

reviewed in thispaper.

Keywords

SiGe alloys,heterojuncîion bıpolar transislors.

References

  1. [l] W. Shockiey, U. S. Patent no; 2 569 347, Sep. 1951.
  2. [2] H. Kroemer, "Thcory ofawıde-gap emitter for traasistors, " Proc. İRE, vol. 45, no. 11, pp. 1535-1537, Nov. 1957.
  3. [3| S. Brojdo, T. J. Riley, and G. T. Wright, "The heterojunction transistor aııd the space charge-limited triode, " Bril. Appl. I'hys., vol. 16, no. 2, p, 133, Feb. 1965.
  4. [4] D. J. Pagc, "A CdS-Si heterojunction transistor, " IEEE Trans. Electron Devices, vol. ED-12, no. 9, pp. 509-510, Sep. 1955.
  5. [5] D. K. Jadus, "The realization of a wide band gap emitter transistor, '' Ph.D, Thesis, Carnegie-Mellon University, Pittsburgh, Pennsylvania, 1957, also, D. K. Jadus and D. L. Feucht, "The realization of a wide baııd gap cmitter transistor," IEEE Trans. Electron Devices, vol. ED-15, no. l, p. 102, Jan. 1959.
  6. [6] H. J. Hovel and A. G. Milnes, "ZnSe-Ge heterojunction trmsistors, " 1EEE Trans. Eleclron Devices, vol. ED-15, no. 9, p. 755, Sep. 1969.
  7. [7] K. Sleger, A. G. Milnes, and D. L. Feucht. "ZnSe-GaAs and ZnSe-Ge heterojunction transistors, Proc. im. Conf. Phys. Chem. Semıcond. Heterojunclions Luyer Slructures (Budapest), vol. l, p. 73, 1970, also, K. Sleger, "ZnSe-GaAs Heterojunction Transistors, " Ph.D. Thesis, Camegie-Mellon University, Pittsburgh, Pennsylvania, 1971.
  8. [8] W. P. Dumke, J.M. Woodall, and V. L. Rideout, "GaAs-GaAIAs heterojunction transistor for high frequency operation, " Solid-State Eiectromcs, vol. 15, no. 10, pp. 1339-1343, Oct. 1972.
  9. [9| H. Krocmer, "Heterojunction bipolar transistors and integrated circuits, " Proc. IEEE. vol. 70, no. l, pp. 13-25, Jan. 1982.
  10. [10] L. M. Su, N. Grote, R, K.aumanns, W. Katzschner, and H. G. Bach. "An InGaAsP/InP double-heterojunction bipolar transistor for monolithic integration with a 1.5-(im laser diode, " IEEE Electron Device Letl., vol. EDL-6, no." l, pp. 14-17, Jan. 1985
APA
Erkaya, H. H. (2000). Si/Sige HETEROJUNCTION BIPOLAR TRANSISTORS (A REVIEW). Eskişehir Osmangazi Üniversitesi Mühendislik Ve Mimarlık Fakültesi Dergisi, 13(1), 46-65. https://izlik.org/JA26NA78CP
AMA
1.Erkaya HH. Si/Sige HETEROJUNCTION BIPOLAR TRANSISTORS (A REVIEW). Eskişehir Osmangazi Üniversitesi Mühendislik ve Mimarlık Fakültesi Dergisi. 2000;13(1):46-65. https://izlik.org/JA26NA78CP
Chicago
Erkaya, Hasan Hüseyin. 2000. “Si/Sige/HETEROJUNCTION/BIPOLAR/TRANSISTORS/(A/REVIEW)”. Eskişehir Osmangazi Üniversitesi Mühendislik Ve Mimarlık Fakültesi Dergisi 13 (1): 46-65. https://izlik.org/JA26NA78CP.
EndNote
Erkaya HH (June 1, 2000) Si/Sige HETEROJUNCTION BIPOLAR TRANSISTORS (A REVIEW). Eskişehir Osmangazi Üniversitesi Mühendislik ve Mimarlık Fakültesi Dergisi 13 1 46–65.
IEEE
[1]H. H. Erkaya, “Si/Sige HETEROJUNCTION BIPOLAR TRANSISTORS (A REVIEW)”, Eskişehir Osmangazi Üniversitesi Mühendislik ve Mimarlık Fakültesi Dergisi, vol. 13, no. 1, pp. 46–65, June 2000, [Online]. Available: https://izlik.org/JA26NA78CP
ISNAD
Erkaya, Hasan Hüseyin. “Si/Sige/HETEROJUNCTION/BIPOLAR/TRANSISTORS/(A/REVIEW)”. Eskişehir Osmangazi Üniversitesi Mühendislik ve Mimarlık Fakültesi Dergisi 13/1 (June 1, 2000): 46-65. https://izlik.org/JA26NA78CP.
JAMA
1.Erkaya HH. Si/Sige HETEROJUNCTION BIPOLAR TRANSISTORS (A REVIEW). Eskişehir Osmangazi Üniversitesi Mühendislik ve Mimarlık Fakültesi Dergisi. 2000;13:46–65.
MLA
Erkaya, Hasan Hüseyin. “Si/Sige/HETEROJUNCTION/BIPOLAR/TRANSISTORS/(A/REVIEW)”. Eskişehir Osmangazi Üniversitesi Mühendislik Ve Mimarlık Fakültesi Dergisi, vol. 13, no. 1, June 2000, pp. 46-65, https://izlik.org/JA26NA78CP.
Vancouver
1.Hasan Hüseyin Erkaya. Si/Sige HETEROJUNCTION BIPOLAR TRANSISTORS (A REVIEW). Eskişehir Osmangazi Üniversitesi Mühendislik ve Mimarlık Fakültesi Dergisi [Internet]. 2000 Jun. 1;13(1):46-65. Available from: https://izlik.org/JA26NA78CP