Optical, Structural and Morphological Properties of Ni Doped α-Fe2O3 Thin Film Grown by RF and DC Magnetron Co-Sputtering Technique

Year 2025, Volume: 8 Issue: 2, 580 - 597, 12.03.2025

Maryam Abdolahpour Salari , Günay Merhan Muğlu , Volkan Şenay , Sevda Sarıtaş

https://doi.org/10.47495/okufbed.1527590

Abstract

In this research, Ni-doped hematite (α-Fe2O3) thin film was synthesized on glass substrate using direct current (DC) and radio frequency (RF) magnetron co-sputtering technique and some physical properties were investigated. Optical, structural and morphological analysis of the obtained Ni-doped α-Fe2O3 thin film was determined using UV-VIS spectroscopy, EDX, X-ray diffraction, scanning electron microscopy (SEM) and atomic force microscopy (AFM). Based on the absorption measurement, the band gap energy value of the thin film was estimated and the result was determined as 2.12 eV. X-ray diffraction analysis showed a nanocrystalline structure in the thin film under investigation. According to SEM image, thin film exhibits a smooth surface morphology along the substrate. Additionally, AFM images revealed a low RMS roughness value, indicating a smooth surface for the Ni-doped Fe2O3 thin layer.

Keywords

RF and DC magnetron co-sputtering, α-Fe2O3, XRD, SEM, AFM

RF ve DC Magnetron Püskürtme Tekniği ile Büyütülmüş Ni Katkılı α-Fe2O3 İnce Filmin Optik, Yapısal ve Morfolojik Özellikleri

Abstract

Bu araştırmada, doğru akım (DC) ve radyo frekansı (RF) magnetron püskürtme tekniği kullanılarak cam alttaş üzerinde Ni katkılı hematit (α-Fe2O3) ince film sentezlenmiştir ve bazı fiziksel özellikler araştırılmıştır. Elde edilen Ni katkılı α-Fe2O3 ince filmin optik, yapısal ve morfolojik analizi, UV-VIS spektroskopisi, EDX, X-ışını kırınımı, taramalı elektron mikroskobu (SEM) ve atomik kuvvet mikroskobu kullanılarak belirlenmiştir. Absorbsiyon ölçümüne dayanarak ince filmin bant aralığı enerji değeri hesap edilmiştir ve sonuç 2,12 eV olarak belirlenmiştir. X-ışını kırınım analizi, incelenen ince filmin nanokristal bir yapıya sahip olduğunu göstermiştir. SEM görüntüsüne göre ince film alttaş boyunca düzgün bir yüzey morfolojisi sergilemiştir. Ayrıca AFM görüntüleri, Ni:Fe2O3 ince filminin pürüzsüz bir yüzeye sahip olduğunu gösteren düşük bir RMS pürüzlülük değeri ortaya koymuştur.

Keywords

RF ve DC Magnetron Püskürtme, α-Fe2O3, XRD, SEM, AFM

Ethical Statement

Bu çalışmanın, özgün bir çalışma olduğunu; çalışmanın hazırlık, veri toplama, analiz ve bilgilerin sunumu olmak üzere tüm aşamalarından bilimsel etik ilke ve kurallarına uygun davrandığımızı; bu çalışma kapsamında elde edilmeyen tüm veri ve bilgiler için kaynak gösterdiğimizi ve bu kaynaklara kaynakçada yer verdiğimizi; kullanılan verilerde herhangi bir değişiklik yapmadığımızı beyan ederim. Herhangi bir zamanda, çalışmayla ilgili yaptığımız bu beyana aykırı bir durumun saptanması durumunda, ortaya çıkacak tüm ahlaki ve hukuki sonuçlara razı olduğumuzu bildiririm. Saygılarımla Sorumlu Yazar Doç. Dr. Volkan ŞENAY

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