Determination of Optical Properties Of Thin Films by Ellipsometry Technique

Volume: 1 Number: 19 December 1, 2002
  • Gültekin Çelik
  • Haluk Şafak
Selcuk University Journal of Science Faculty Cover
Selcuk University Journal of Science Faculty
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İnce Filmlerin Optik Özelliklerinin Elipsometrik Yöntemle Belirlenmesi

Abstract

Bu çalışmada ince fimlerirı optikseI karakterizasyonunda sıkça kullanılan polarimetrik bir yöntem olan Elipsometri tekniği incelenmiştir. Yapılan çalışmada bir elektromagnetik dalganın elipsometre düzeneği içersindeki davranışı ayrıntılı olarak ele alınmıştır. Daha sonra elipsometrik parametreler ve denklemler tanımlanmış ve her hangi bir ince film için kırılma indisi ve soğurma katsayısının elipsometrik yöntemle nasıl hesaplandığı açıklanmıştır.

Keywords

Details

Primary Language

English

Subjects

-

Journal Section

-

Authors

Gültekin Çelik This is me

Haluk Şafak This is me

Publication Date

December 1, 2002

Submission Date

December 1, 2002

Acceptance Date

-

Published in Issue

Year 2002 Volume: 1 Number: 19

IZ

https://izlik.org/JA89TJ35XZ

Cite

RIS / Bibtex
APA
Çelik, G., & Şafak, H. (2002). Determination of Optical Properties Of Thin Films by Ellipsometry Technique. Selcuk University Journal of Science Faculty, 1(19), 31-39. https://izlik.org/JA89TJ35XZ
AMA
1.Çelik G, Şafak H. Determination of Optical Properties Of Thin Films by Ellipsometry Technique. Selcuk University Journal of Science Faculty. 2002;1(19):31-39. https://izlik.org/JA89TJ35XZ
Chicago
Çelik, Gültekin, and Haluk Şafak. 2002. “Determination of Optical Properties Of Thin Films by Ellipsometry Technique”. Selcuk University Journal of Science Faculty 1 (19): 31-39. https://izlik.org/JA89TJ35XZ.
EndNote
Çelik G, Şafak H (December 1, 2002) Determination of Optical Properties Of Thin Films by Ellipsometry Technique. Selcuk University Journal of Science Faculty 1 19 31–39.
IEEE
[1]G. Çelik and H. Şafak, “Determination of Optical Properties Of Thin Films by Ellipsometry Technique”, Selcuk University Journal of Science Faculty, vol. 1, no. 19, pp. 31–39, Dec. 2002, [Online]. Available: https://izlik.org/JA89TJ35XZ
ISNAD
Çelik, Gültekin - Şafak, Haluk. “Determination of Optical Properties Of Thin Films by Ellipsometry Technique”. Selcuk University Journal of Science Faculty 1/19 (December 1, 2002): 31-39. https://izlik.org/JA89TJ35XZ.
JAMA
1.Çelik G, Şafak H. Determination of Optical Properties Of Thin Films by Ellipsometry Technique. Selcuk University Journal of Science Faculty. 2002;1:31–39.
MLA
Çelik, Gültekin, and Haluk Şafak. “Determination of Optical Properties Of Thin Films by Ellipsometry Technique”. Selcuk University Journal of Science Faculty, vol. 1, no. 19, Dec. 2002, pp. 31-39, https://izlik.org/JA89TJ35XZ.
Vancouver
1.Gültekin Çelik, Haluk Şafak. Determination of Optical Properties Of Thin Films by Ellipsometry Technique. Selcuk University Journal of Science Faculty [Internet]. 2002 Dec. 1;1(19):31-9. Available from: https://izlik.org/JA89TJ35XZ

Journal Owner: On behalf of Selçuk University Faculty of Science, Rector Prof. Dr. Hüseyin YILMAZ
Selcuk University Journal of Science Faculty accepts articles in Turkish and English with original results in basic sciences and other applied sciences. The journal may also include compilations containing current innovations.

It was first published in 1981 as "S.Ü. Fen-Edebiyat Fakültesi Dergisi" and was published under this name until 1984 (Number 1-4).
In 1984, its name was changed to "S.Ü. Fen-Edeb. Fak. Fen Dergisi" and it was published under this name as of the 5th issue.
When the Faculty of Letters and Sciences was separated into the Faculty of Science and the Faculty of Letters with the decision of the Council of Ministers numbered 2008/4344 published in the Official Gazette dated 3 December 2008 and numbered 27073, it has been published as "Selcuk University Journal of Science Faculty" between 2009-2025. 
It has been scanned in DergiPark since 2016.

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