Year 2018, Volume 7, Issue 2, Pages 1013 - 1022 2018-07-20

INVESTIGATION OF THE EFFECT OF N2 GAS FLOW RATE ON THE OPTICAL, STRUCTURAL AND MORPHOLOGICAL PROPERTIES OF INDIUM-GALLIUM-NITRIDE TRIPLE THIN FILMS OBTAINED BY SPUTTER TECHNIQUE
N2 GAZ AKIŞ HIZININ, SPUTTER TEKNİĞİNDEN ELDE EDİLEN İNDİYUM-GALYUM-NİTRÜR ÜÇLÜ İNCE FİLMİNİN OPTİK, YAPISAL VE MORFOLOJİK ÖZELLİKLERİNE ETKİSİNİN İNCELENMESİ

Erman ERDOĞAN [1] , Mutlu KUNDAKÇI [2]

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In this research work, InGaN (Indium Gallium Nitride) triple compound was grown under different N2 gas flow rates by using sputtering technique. The structural, optical and morphological characteristics of the InGaN compound have been studied in detail. In the XRD analysis, films exhibited hexagonal crystal structure. The films appear at lower wavelengths in visible region and absorption values begin to increase sharply from about 550-560 nm and reach the highest absorption value in the Near-UV region. When gas flow rates increased, the optical band gaps of the film increased. In SEM, the film exhibits dense coverage of the material on the surface of the substrate without the presence of voids, pinholes or cracks. In the results of the AFM, there are locally peaks and valleys, and partially homogeneous and circular-like clusters are arranged. Films are suitable structures for use in device applications.

Bu araştırma çalışmasında, InGaN (İndiyum Galyum Nitrür) üçlü bileşiği, saçtırma tekniği kullanılarak farklı N2 gaz akış oranları altında büyütülmüştür. InGaN bileşiğinin yapısal, optik ve morfolojik özellikleri detaylı olarak incelenmiştir. XRD analizinde, filmler hegzagonal kristal yapı sergilemiştir. Filmler, görünür bölgede daha düşük dalga boylarında ortaya çıkmıştır ve soğurma değerleri, yaklaşık 550-560 nm'den itibaren keskin bir şekilde artmaya başlar ve Near-UV bölgesinde en yüksek soğurma değerine ulaşmıştır. Gaz akış hızı arttığında, filmin optik bant aralıkları artmıştır. SEM'de film, altlığın yüzeyi üzerindeki malzemenin boşluklar, iğne delikleri veya çatlaklar olmadan yoğun bir şekilde kaplanmasını göstermiştir. AFM sonuçlarında, yerel tepeler ve vadiler vardır ve kısmen homojen ve dairesel benzeri kümeler düzenlenmiştir. Filmler, cihaz uygulamalarında kullanım için uygun yapılardır.

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Primary Language en
Subjects Materials Science, Multidisciplinary
Journal Section Materials and Metallurgical Engineering
Authors

Orcid: 0000-0003-2566-3284
Author: Erman ERDOĞAN (Primary Author)
Institution: MUŞ ALPARSLAN ÜNİVERSİTESİ
Country: Turkey


Orcid: 0000-0002-1764-2566
Author: Mutlu KUNDAKÇI
Institution: ATATÜRK ÜNİVERSİTESİ
Country: Turkey


Dates

Publication Date: July 20, 2018

Bibtex @research article { ngumuh445524, journal = {Ömer Halisdemir Üniversitesi Mühendislik Bilimleri Dergisi}, issn = {}, eissn = {2564-6605}, address = {Ömer Halisdemir Üniversitesi}, year = {2018}, volume = {7}, pages = {1013 - 1022}, doi = {10.28948/ngumuh.445524}, title = {INVESTIGATION OF THE EFFECT OF N2 GAS FLOW RATE ON THE OPTICAL, STRUCTURAL AND MORPHOLOGICAL PROPERTIES OF INDIUM-GALLIUM-NITRIDE TRIPLE THIN FILMS OBTAINED BY SPUTTER TECHNIQUE}, key = {cite}, author = {ERDOĞAN, Erman and KUNDAKÇI, Mutlu} }
APA ERDOĞAN, E , KUNDAKÇI, M . (2018). INVESTIGATION OF THE EFFECT OF N2 GAS FLOW RATE ON THE OPTICAL, STRUCTURAL AND MORPHOLOGICAL PROPERTIES OF INDIUM-GALLIUM-NITRIDE TRIPLE THIN FILMS OBTAINED BY SPUTTER TECHNIQUE. Ömer Halisdemir Üniversitesi Mühendislik Bilimleri Dergisi, 7 (2), 1013-1022. DOI: 10.28948/ngumuh.445524
MLA ERDOĞAN, E , KUNDAKÇI, M . "INVESTIGATION OF THE EFFECT OF N2 GAS FLOW RATE ON THE OPTICAL, STRUCTURAL AND MORPHOLOGICAL PROPERTIES OF INDIUM-GALLIUM-NITRIDE TRIPLE THIN FILMS OBTAINED BY SPUTTER TECHNIQUE". Ömer Halisdemir Üniversitesi Mühendislik Bilimleri Dergisi 7 (2018): 1013-1022 <http://dergipark.org.tr/ngumuh/issue/38579/445524>
Chicago ERDOĞAN, E , KUNDAKÇI, M . "INVESTIGATION OF THE EFFECT OF N2 GAS FLOW RATE ON THE OPTICAL, STRUCTURAL AND MORPHOLOGICAL PROPERTIES OF INDIUM-GALLIUM-NITRIDE TRIPLE THIN FILMS OBTAINED BY SPUTTER TECHNIQUE". Ömer Halisdemir Üniversitesi Mühendislik Bilimleri Dergisi 7 (2018): 1013-1022
RIS TY - JOUR T1 - INVESTIGATION OF THE EFFECT OF N2 GAS FLOW RATE ON THE OPTICAL, STRUCTURAL AND MORPHOLOGICAL PROPERTIES OF INDIUM-GALLIUM-NITRIDE TRIPLE THIN FILMS OBTAINED BY SPUTTER TECHNIQUE AU - Erman ERDOĞAN , Mutlu KUNDAKÇI Y1 - 2018 PY - 2018 N1 - doi: 10.28948/ngumuh.445524 DO - 10.28948/ngumuh.445524 T2 - Ömer Halisdemir Üniversitesi Mühendislik Bilimleri Dergisi JF - Journal JO - JOR SP - 1013 EP - 1022 VL - 7 IS - 2 SN - -2564-6605 M3 - doi: 10.28948/ngumuh.445524 UR - https://doi.org/10.28948/ngumuh.445524 Y2 - 2018 ER -
EndNote %0 Omer Halisdemir University Journal of Engineering Sciences INVESTIGATION OF THE EFFECT OF N2 GAS FLOW RATE ON THE OPTICAL, STRUCTURAL AND MORPHOLOGICAL PROPERTIES OF INDIUM-GALLIUM-NITRIDE TRIPLE THIN FILMS OBTAINED BY SPUTTER TECHNIQUE %A Erman ERDOĞAN , Mutlu KUNDAKÇI %T INVESTIGATION OF THE EFFECT OF N2 GAS FLOW RATE ON THE OPTICAL, STRUCTURAL AND MORPHOLOGICAL PROPERTIES OF INDIUM-GALLIUM-NITRIDE TRIPLE THIN FILMS OBTAINED BY SPUTTER TECHNIQUE %D 2018 %J Ömer Halisdemir Üniversitesi Mühendislik Bilimleri Dergisi %P -2564-6605 %V 7 %N 2 %R doi: 10.28948/ngumuh.445524 %U 10.28948/ngumuh.445524
ISNAD ERDOĞAN, Erman , KUNDAKÇI, Mutlu . "INVESTIGATION OF THE EFFECT OF N2 GAS FLOW RATE ON THE OPTICAL, STRUCTURAL AND MORPHOLOGICAL PROPERTIES OF INDIUM-GALLIUM-NITRIDE TRIPLE THIN FILMS OBTAINED BY SPUTTER TECHNIQUE". Ömer Halisdemir Üniversitesi Mühendislik Bilimleri Dergisi 7 / 2 (July 2018): 1013-1022. https://doi.org/10.28948/ngumuh.445524
AMA ERDOĞAN E , KUNDAKÇI M . INVESTIGATION OF THE EFFECT OF N2 GAS FLOW RATE ON THE OPTICAL, STRUCTURAL AND MORPHOLOGICAL PROPERTIES OF INDIUM-GALLIUM-NITRIDE TRIPLE THIN FILMS OBTAINED BY SPUTTER TECHNIQUE. OHU J. Eng. Sci.. 2018; 7(2): 1013-1022.
Vancouver ERDOĞAN E , KUNDAKÇI M . INVESTIGATION OF THE EFFECT OF N2 GAS FLOW RATE ON THE OPTICAL, STRUCTURAL AND MORPHOLOGICAL PROPERTIES OF INDIUM-GALLIUM-NITRIDE TRIPLE THIN FILMS OBTAINED BY SPUTTER TECHNIQUE. Ömer Halisdemir Üniversitesi Mühendislik Bilimleri Dergisi. 2018; 7(2): 1022-1013.