SOL-JEL SPİN KAPLAMA YÖNTEMİYLE HAZIRLANMIŞ ZnO İNCE FİLMLERİN OPTİK ÖZELLİKLERİNİN İNCELENMESİ

Öz

Sol-jel spin kaplama yöntemi kullanılarak ZnO ve ZnO:N ince filmler kuartz altlık üzerine hazırlandı. ZnO ince filmlere hava ortamında 400 ^oC’de ZnO:N ince filmlere ise N ortamında 700 ^oC sıcaklıkta 2 saat tavlama işlemi yapıldı. Hazırlanan ZnO ve ZnO:N ince filmlerin başlangıç çözeltisindeki N oranına göre yapısal, yüzeysel ve optik özellikleri x-ışını kırınımı (XRD), taramalı elektron mikroskobu (SEM) ve optik soğurma ölçümleriyle incelendi. N oranı arttıkça örneklerin yapısal, yüzeysel ve optik özelliklerinde değişimler olduğu ve bant aralığı değerinin oda sıcaklığında 30 meV azaldığı görüldü.

Anahtar Kelimeler

• ZnO ve ZnO:N ince filmler,Döndürerek kaplama,XRD,SEM,Optik özellikler

AN INVESTIGATION OF OPTICAL PROPERTIES OF ZnO THIN FILMS PREPARED USING SOL GEL SPIN COATING METHOD

Öz

ZnO and ZnO:N thin films were prepared on quartz glass using the sol gel spin coating methods. ZnO thin films at 400 ^oC in air atmospher and ZnO:N thin films in Nitrogen Atmosphere at temperature of 700 ^oC were annealed for 2 h. The effect of nitrogen rate in precursor on structural, morphological and optical properties of the ZnO thin films was investigated by X-ray diffraction (XRD), Scanning Electron Microscope (SEM) and Optical Absorption Measurements. It has been observed that the structural, morphological and optical properties of the ZnO thin films change as N rate increases, and bandgap energy of thin films decreases by 30 meV at room temperature.

Anahtar Kelimeler

• ZnO and ZnO:N thin films,Sol-gel spin coating,XRD,SEM,Optical properties

Kaynakça

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