SOL-JEL SPİN KAPLAMA YÖNTEMİYLE HAZIRLANMIŞ ZnO İNCE FİLMLERİN OPTİK ÖZELLİKLERİNİN İNCELENMESİ

Yıl 2015, Sayı: 2015 Özel Sayısı, 147 - 156, 15.01.2016

Tacettin Yıldırım Aliye Çankaya İlker Öcalan

Öz

Sol-jel spin kaplama yöntemi kullanılarak ZnO ve
ZnO:N ince filmler kuartz altlık üzerine hazırlandı. ZnO ince filmlere hava
ortamında 400 ^oC’de ZnO:N ince filmlere ise N ortamında 700 ^oC
sıcaklıkta 2 saat tavlama işlemi yapıldı. Hazırlanan ZnO ve ZnO:N ince
filmlerin başlangıç çözeltisindeki N oranına göre yapısal, yüzeysel ve optik
özellikleri x-ışını kırınımı (XRD), taramalı elektron mikroskobu (SEM) ve optik
soğurma ölçümleriyle incelendi. N oranı arttıkça örneklerin yapısal, yüzeysel
ve optik özelliklerinde değişimler olduğu ve bant aralığı değerinin oda
sıcaklığında 30 meV azaldığı görüldü.

Anahtar Kelimeler

ZnO ve ZnO:N ince filmler, Döndürerek kaplama, XRD, SEM, Optik özellikler

AN INVESTIGATION OF OPTICAL PROPERTIES OF ZnO THIN FILMS PREPARED USING SOL GEL SPIN COATING METHOD

Öz

ZnO and ZnO:N thin films were prepared on quartz
glass using the sol gel spin coating methods. ZnO thin films at 400 ^oC
in air atmospher and ZnO:N thin films in Nitrogen Atmosphere at temperature of
700 ^oC were annealed for 2 h. The effect
of nitrogen rate in precursor on structural, morphological
and optical properties of the ZnO thin films was investigated by X-ray diffraction (XRD),
Scanning Electron Microscope (SEM) and Optical Absorption Measurements. It has
been observed that the structural, morphological
and optical properties of the ZnO thin films change as N
rate increases, and bandgap energy of thin films decreases by 30 meV at room
temperature.

Anahtar Kelimeler

ZnO and ZnO:N thin films, Sol-gel spin coating, XRD, SEM, Optical properties

Kaynakça

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