ITO gas sensors for CO2 and H2 detection

Öz

Thin films with extensive characteristics and surface morphology are very important in designing high performance and reliable gas sensors. Therefore comprehensive study carried out on ITO transparent conductive oxide resistive based H2 and CO2 gas sensors. As a result bottom up prototype gas sensor device fabricated and tested in order to understand those properties and behaviours that effects on sensitivity. All the thin film deposited employing RF magnetron sputtering technique investigated by SEM, XRD, EDAX and Absorption methods. Different oxygen partial pressure introduced as a variable to optimize the surface thin film. Those synthesized material properties showed reasonable correlation with the sensitivities and response of ITO devices for reducing H2 and CO2 gases.

Anahtar Kelimeler

• gaz sensör
• H2 sensör
• ITO

Kaynakça

1. [1] Ying-Ting Wang, Wha-Tzong Whang, and Chun-Hua Chen Hollow V2O5 Nanoassemblies for High-Performance Room-Temperature Hydrogen Sensors DOI: 10.1021/am509182s ACS Appl. Mater. Interfaces 2015, 7, 8480−8487
2. [2] Gary W. Hunter, Philip G. Neudeck, G.D. Jefferson, and G.C. Madzsar the development of hydrogen sensor technology at nasa lewis research center Fourth An_nual Space System Health Management Technology Conference sponsored by the American Institute of Aeronautics an dA=stronautic Cincinnati, Ohio, November 17-18, 1992
3. [3] Kenji Obata, Shizuko Kumazawa, Shigenori Matsushima, Kengo Shimano, Noboru Yamazo NASICON-based potentiometric CO2 sensor combined with new materials operative at room temperature, Sensors and Actuators B 108 (2005) 352–358
4. [4] H.S. Uhm, B.H. Hong, P.Y. Oh, E.H. Choi, Properties of excited xenon atoms in a plasma display panel, Thin Solid Films 517 (2009) 4023–4026.
5. [5] S. Gunes, N.S. Sariciftci, Hybrid solar cells, Inorg. Chim. Acta 361 (2008) 581–588.
6. [6] Y.J. Lee, J.H. Kim, J.N. Jang, I.H. Yang, S.N. Kwon, M.P. Hong, D.C. Kim, K.S. Oh, S.J. Yoo, B.J. Lee, W.G. Jang, Development of inverted OLED with top ITO anode by plasma damage-free sputtering, Thin Solid Films 517 (2009) 4019– 4022.
7. [7] Z. Jiao, M.H. Wu, J.Z. Gu, X.L. Sun, The gas sensing characteristics of ITO thin film prepared by sol–gel method, Sens. Actuators B 94 (2003) 216–221.
8. [8] T. Wagner, T. Sauerwald, C.-D. Kohl, T. Waitz, C. Weidmann, M. Tiemann, Gas sensor based on ordered mesoporous In2O3, Thin Solid Films 517 (2009)6170–6175.

9. [9] H.S. Al-Salman, M.J. Abdullah Hydrogen gas sensing based on ZnO nanostructure prepared by RF-sputtering on quartz and PET substrates Sensors and Actuators B 181 (2013) 259– 266
10. [10] Three electrodes gas sensor based on ITO thin film Sang-Mun Leea, Yun-Su Leea, Chang-Hyun Shima, Nak-Jin Choia, Byung-Su Jooa,Kap-Duk Songa, Jeung-Soo Huhb, Duk-Dong Leea,* Sensors and Actuators B 93 (2003) 31–35
11. [11] The gas sensing characteristics of ITO thin film prepared by sol–gel method Zheng Jiao∗, Minghong Wu, Jianzhong Gu, Xilian Sun Sensors and Actuators B 94 (2003) 216–221
12. [12] Low temperature high sensor response nano gas sensor using ITO nanofibers Shiyou Xu, Yong Shi∗ Sensors and Actuators B 143 (2009) 71–75
13. [13] Electrical, optical and structural characteristics of indium-tin-oxide thin films deposited on glass and polymer substrates A.K. Kulkarnia,*, K.H. Schulzb, T.-S. Lima, M. Khanb Thin Solid Films 308–309 (1997) 1–7
14. [14] Flower-like Palladium Nanoclusters Decorated Graphene Electrodes for Ultrasensitive and Flexible Hydrogen Gas Sensing Dong Hoon Shin, Jun Seop Lee, Jaemoon Jun, Ji Hyun An, Sung Gun Kim, Kyung