BibTex RIS Kaynak Göster

Effects of Annealing on Reflectance of ZnO Grown by PFCVAD

Yıl 2013, Cilt: 25 Sayı: 2, 41 - 50, 04.07.2013

Öz

ZnO thin film was prepared onto microscope glass slide substrate by using pulsed filtered cathodic vacuum arc deposition system. ZnO thin film was thermally annealed for one hour at three different temperatures in air. The film structure was investigated as a function of annealing temperature by x-ray diffraction (XRD). As-deposited film shows amorphous property. The grain size increases with the increase of annealing temperature. The dependence of optical properties on annealing was investigated using UV–Vis-NIR spectrophotometer. When the annealing temperature increased, the diffuse reflection was reduced. When the angle of incidence specular reflectance increased from angle of 30 degrees to angle of 60 degrees, specular reflectance was increased. When annealing temperature increased, specular reflectance was also increased for angle of 30 and 60 degrees. In addition the optical band gap of ZnO film was observed and found to be varying from 3.22 eV to 3.25 eV with the annealing temperature.

Kaynakça

  • Brown, H. E. (1976). Zinc Oxide Properties and Applications. Pergamon, New York.
  • Zhong, J., Tan, A., Huang, H., Chen, S., Wang, M. ve Xu, S. (2011). Thickness effect on the evolution of morphology and optical properties of ZnO films. Applied Surface Science, 257, 4051-4055.
  • Klein, A., Körber, C., Wachau, A., Säuberlich, F., Gassenbauer, Y., Harvey, S.P., Proffit, D.E. ve Mason, T. O. (2010). Transparent Conducting Oxides for Photovoltaics: Manipulation of Fermi Level,Work Function and Energy Band Alignment. Materials, 3, 4892-4914.
  • Lupan, O., Pauporté, T., Chow, L., Viana, B., Pellé, F., Ono, L. K., Cuenya, B, R. ve Heinrich, H. (2010).
  • Effects of annealing on properties of ZnO thin films prepared by electrochemical deposition in chloride medium. Applied Surface Science, 256, 1895–1907.
  • Wang, Q., Wang, G., Jie, J., Han, X., Xu, B. ve Hou, J. G. (2005). Annealing effect on optical properties of
  • ZnO films fabricated by cathodic electrodeposition. Thin Solid Films, 492, 61-65. Bouderbala, M., Hamzaoui, S., Adnane, M., Sahraoui, T. ve Zerdali, M. (2009). Annealing effect on properties of transparent and conducting ZnO thin films. Thin Solid Films, 517(5), 1572-1576.
  • Stamataki, M., Fasaki, I., Tsonos, G., Tsamakis, D. ve Kompitsas, M. (2009). Annealing effects on the structural, electrical and H2 sensing properties of transparent ZnO thin films, grown by pulsed laser deposition. Thin Solid Films, 518, 1326-1331.
  • Lemlikchi, S., Abdelli-Messaci, S., Lafane, S., Kerdja, T., Guittoum, A. ve Saad, M. (2010). Study of structural and optical properties of ZnO films grown by pulsed laser deposition. Applied Surface Science, 256, 5650-5655.
  • Daniel, G.P., Justinvictor, V. B., Nair, P. B., Joy, K., Koshy,P. ve Thomas, P.V. (2010). Effect of annealing temperature on the structural and optical properties of ZnO thin films prepared by RF magnetron sputtering. Physica B, 405, 1782-1786.
  • Wang, L., Pu, Y., Fang, W., Dai, J., Zheng, C., Mo, C., Xiong, C. ve Jiang, F. (2003). Effect of high- temperature annealing on the structural and optical properties of ZnO films. Thin Solid Films, 491, 323-327.
  • Kim, C. R., Lee, J. Y., Shin, C. M., Leem, J. Y., Ryu, H., Chang, J. H., Lee, H. C., Son, C. S., Lee, W. J., Jung, W. G., Tan, S. T., Zhao, J. L. ve Sun, X. W. (2008). Effects of annealing temperature of buffer layer on structural and optical properties of ZnO thin film grown by atomic layer deposition. Solid State Communications, 148, 395-398.
  • Zhong, A., Tan, J., Huang, H., Chen, S., Wang, M. ve Xu, S. (2011). Thickness effect on the evolution of morphology and optical properties of ZnO films. Applied Surface Science, 257, 4051-4055.
  • Goldsmith, S. (2006). Filtered vacuum arc deposition of un-doped and doped ZnO thin films:Electrical, optical, and structural properties. Surface & Coatings Technology, 201, 3993-3999.
  • Xu, X. L., Lau, S. P. ve Tay, B. K. (2001). Structural and optical properties of ZnO thin films produced by filtered cathodic vacuum arc. Thin Solid Films, 398–399, 244-249.
  • Wang, Y. G., Lau, S.P., Lee, H. W., Yu, S.F., Tay, B. K., Zhang, X. H., Tse, K. Y. ve Hng, H. H. (2003).
  • Comprehensive study of ZnO films prepared by filtered cathodic vacuum arc at room temperature. J Appl Phys., 94 (3), 1597-1604.
  • Takikawa, H., Kimura, K., Miyano, R. ve Sakakibara, T. (2002). Cathodic arc deposition with activated anode (CADAA) for preparation of in situ doped thin solid films. Vacuum, 65, 433-438.
  • David, T., Goldsmith, S. ve Boxman, R. L. (2004). Electro-optical and structural properties of thin ZnO films, prepared by filtered vacuum arc deposition. Thin Solid Films, 447–448, 61-67.
  • Anders, S., Anders, A., Rubin, M., Wang, Z., Raoux, S., Kong, F. ve Brown, I. G. (1995). Formation of
  • Metal Oxides by Cathodic Arc Deposition. Surf. Coat. Technol., 76/77, 167-172. Şenadim Tüzemen, E., Kavak, H. ve Esen, R. (2007). Influence of oxygen pressure of ZnO/glass substrate produced by pulsed filtered cathodic vacuum arc deposition. Physica B: Condensed Matter, 390(1-2), 366-372.
  • Caglar, M., Caglar, Y. ve Ilican, S. (2006). The determination of the thickness and optical constants of the ZnO crystalline thin film by using envelope method. Journal of Optoelectronics and Advanced Materials, 8(4), 1410-1413.
  • Haitjema, H. (1989). Spectrally selective tinoxide and indiumoxide coatings. DoktoraTezi, Delft University of Technology, Delft, the Netherlands.
  • Liu, Y. X., Liu, Y. C., Shao, C. L. ve Mu, R. (2004). Excitonic properties of ZnO nanocrystalline films prepared by oxidation of zinc-implanted silica. J. Phys. D: Appl. Phys., 37, 3025-3029.
  • Xiang, X., Zu, X. T., Zhu, S., Wei, Q. M., Zhang, C. F., Sun, K. ve Wang, L. M. (2006). ZnO nanoparticles embedded in sapphire fabricated by ion implantation and annealing. Nanotechnology, 17, 2636- 26
  • Yan, Z., Song, Z. T., Liu, W. L., Wan, Q., Zhang, F. M. ve Feng, S. L. (2005). Optical and electrical properties of p-type zinc oxide thin films synthesized by ion beam assisted deposition. Thin Solid Films, 492, 203-20
  • Miao, Y., Ye, Z., Xu, W., Chen, F., Zhou, X., Zhao, B., Zhu, L. ve Lu, J. (2006). p-Type conduction in phosphorus-doped ZnO thin films by MOCVD and thermal activation of the dopant. Appl. Surf. Sci., 252, 7953-7956.
  • Wang, X. C., Mi, W. B., Dong, S., Chen, X. M. ve Yang, B. H. (2009). Microstructure and optical properties of N-incorporated polycrystalline ZnO films. J. Alloys Compd., 478, 507-512.
  • Bouhssira, N., Abed, S., Tomasella, E., Cellier, J., Mosbah, A., Aida, M. S. ve Jacquet, M. (2006). Influence of annealing temperature on the properties of ZnO thin films deposited by thermal evaporation. Applied Surface Science, 252, 5594-5597.
  • Moustaghfir, A., Tomasella, E., Amor, S. B., Jacquet, M., Cellier, J. ve Sauvage, T. (2003). Structural and optical studies of ZnO thin films deposited by r.f. magnetron sputtering: influence of annealing. Surface and Coatings Technology, 174 –175, 193-196.
  • Kim, C. E., Moon, P., Kim, S., Myoung, J. M., Jang, H. W., Bang, J. ve Yun, I. (2010). Effect of carrier concentration on optical bandgap shift in ZnO:Ga thin films. Thin Solid Films, 518, 6304-9307.
  • Sheu, J.K., Shu, K.W., Lee, M. L., Tun, C. J. ve Chi, G. C. (2007). Effect of Thermal Annealing on Ga
  • Doped ZnO Films Prepared by Magnetron Sputtering. Journal of The Electrochemical Society, 154(6), H521- H5 Ali, A. I., Kim, C. H., Cho, J. H. ve Kim, B. G. (2006). Growth and Characterization of ZnO:Al Thin Film
  • Using RF Sputtering for Transparent Conducting Oxide. Journal of the Korean Physical Society, 49, S652- S6

Effects of Annealing on Reflectance of ZnO Grown by PFCVAD

Yıl 2013, Cilt: 25 Sayı: 2, 41 - 50, 04.07.2013

Öz

ZnO thin film was prepared onto microscope glass slide substrate by using pulsed filtered cathodic vacuum arc deposition system. ZnO thin film was thermally annealed for one hour at three different temperatures in air. The film structure was investigated as a function of annealing temperature by x-ray diffraction (XRD). As-deposited film shows amorphous property. The grain size increases with the increase of annealing temperature. The dependence of optical properties on annealing was investigated using UV–Vis-NIR spectrophotometer. When the annealing temperature increased, the diffuse reflection was reduced. When the angle of incidence specular reflectance increased from angle of 30 degrees to angle of 60 degrees, specular reflectance was increased. When annealing temperature increased, specular reflectance was also increased for angle of 30 and 60 degrees. In addition the optical band gap of ZnO film was observed and found to be varying from 3.22 eV to 3.25 eV with the annealing temperature.

Kaynakça

  • Brown, H. E. (1976). Zinc Oxide Properties and Applications. Pergamon, New York.
  • Zhong, J., Tan, A., Huang, H., Chen, S., Wang, M. ve Xu, S. (2011). Thickness effect on the evolution of morphology and optical properties of ZnO films. Applied Surface Science, 257, 4051-4055.
  • Klein, A., Körber, C., Wachau, A., Säuberlich, F., Gassenbauer, Y., Harvey, S.P., Proffit, D.E. ve Mason, T. O. (2010). Transparent Conducting Oxides for Photovoltaics: Manipulation of Fermi Level,Work Function and Energy Band Alignment. Materials, 3, 4892-4914.
  • Lupan, O., Pauporté, T., Chow, L., Viana, B., Pellé, F., Ono, L. K., Cuenya, B, R. ve Heinrich, H. (2010).
  • Effects of annealing on properties of ZnO thin films prepared by electrochemical deposition in chloride medium. Applied Surface Science, 256, 1895–1907.
  • Wang, Q., Wang, G., Jie, J., Han, X., Xu, B. ve Hou, J. G. (2005). Annealing effect on optical properties of
  • ZnO films fabricated by cathodic electrodeposition. Thin Solid Films, 492, 61-65. Bouderbala, M., Hamzaoui, S., Adnane, M., Sahraoui, T. ve Zerdali, M. (2009). Annealing effect on properties of transparent and conducting ZnO thin films. Thin Solid Films, 517(5), 1572-1576.
  • Stamataki, M., Fasaki, I., Tsonos, G., Tsamakis, D. ve Kompitsas, M. (2009). Annealing effects on the structural, electrical and H2 sensing properties of transparent ZnO thin films, grown by pulsed laser deposition. Thin Solid Films, 518, 1326-1331.
  • Lemlikchi, S., Abdelli-Messaci, S., Lafane, S., Kerdja, T., Guittoum, A. ve Saad, M. (2010). Study of structural and optical properties of ZnO films grown by pulsed laser deposition. Applied Surface Science, 256, 5650-5655.
  • Daniel, G.P., Justinvictor, V. B., Nair, P. B., Joy, K., Koshy,P. ve Thomas, P.V. (2010). Effect of annealing temperature on the structural and optical properties of ZnO thin films prepared by RF magnetron sputtering. Physica B, 405, 1782-1786.
  • Wang, L., Pu, Y., Fang, W., Dai, J., Zheng, C., Mo, C., Xiong, C. ve Jiang, F. (2003). Effect of high- temperature annealing on the structural and optical properties of ZnO films. Thin Solid Films, 491, 323-327.
  • Kim, C. R., Lee, J. Y., Shin, C. M., Leem, J. Y., Ryu, H., Chang, J. H., Lee, H. C., Son, C. S., Lee, W. J., Jung, W. G., Tan, S. T., Zhao, J. L. ve Sun, X. W. (2008). Effects of annealing temperature of buffer layer on structural and optical properties of ZnO thin film grown by atomic layer deposition. Solid State Communications, 148, 395-398.
  • Zhong, A., Tan, J., Huang, H., Chen, S., Wang, M. ve Xu, S. (2011). Thickness effect on the evolution of morphology and optical properties of ZnO films. Applied Surface Science, 257, 4051-4055.
  • Goldsmith, S. (2006). Filtered vacuum arc deposition of un-doped and doped ZnO thin films:Electrical, optical, and structural properties. Surface & Coatings Technology, 201, 3993-3999.
  • Xu, X. L., Lau, S. P. ve Tay, B. K. (2001). Structural and optical properties of ZnO thin films produced by filtered cathodic vacuum arc. Thin Solid Films, 398–399, 244-249.
  • Wang, Y. G., Lau, S.P., Lee, H. W., Yu, S.F., Tay, B. K., Zhang, X. H., Tse, K. Y. ve Hng, H. H. (2003).
  • Comprehensive study of ZnO films prepared by filtered cathodic vacuum arc at room temperature. J Appl Phys., 94 (3), 1597-1604.
  • Takikawa, H., Kimura, K., Miyano, R. ve Sakakibara, T. (2002). Cathodic arc deposition with activated anode (CADAA) for preparation of in situ doped thin solid films. Vacuum, 65, 433-438.
  • David, T., Goldsmith, S. ve Boxman, R. L. (2004). Electro-optical and structural properties of thin ZnO films, prepared by filtered vacuum arc deposition. Thin Solid Films, 447–448, 61-67.
  • Anders, S., Anders, A., Rubin, M., Wang, Z., Raoux, S., Kong, F. ve Brown, I. G. (1995). Formation of
  • Metal Oxides by Cathodic Arc Deposition. Surf. Coat. Technol., 76/77, 167-172. Şenadim Tüzemen, E., Kavak, H. ve Esen, R. (2007). Influence of oxygen pressure of ZnO/glass substrate produced by pulsed filtered cathodic vacuum arc deposition. Physica B: Condensed Matter, 390(1-2), 366-372.
  • Caglar, M., Caglar, Y. ve Ilican, S. (2006). The determination of the thickness and optical constants of the ZnO crystalline thin film by using envelope method. Journal of Optoelectronics and Advanced Materials, 8(4), 1410-1413.
  • Haitjema, H. (1989). Spectrally selective tinoxide and indiumoxide coatings. DoktoraTezi, Delft University of Technology, Delft, the Netherlands.
  • Liu, Y. X., Liu, Y. C., Shao, C. L. ve Mu, R. (2004). Excitonic properties of ZnO nanocrystalline films prepared by oxidation of zinc-implanted silica. J. Phys. D: Appl. Phys., 37, 3025-3029.
  • Xiang, X., Zu, X. T., Zhu, S., Wei, Q. M., Zhang, C. F., Sun, K. ve Wang, L. M. (2006). ZnO nanoparticles embedded in sapphire fabricated by ion implantation and annealing. Nanotechnology, 17, 2636- 26
  • Yan, Z., Song, Z. T., Liu, W. L., Wan, Q., Zhang, F. M. ve Feng, S. L. (2005). Optical and electrical properties of p-type zinc oxide thin films synthesized by ion beam assisted deposition. Thin Solid Films, 492, 203-20
  • Miao, Y., Ye, Z., Xu, W., Chen, F., Zhou, X., Zhao, B., Zhu, L. ve Lu, J. (2006). p-Type conduction in phosphorus-doped ZnO thin films by MOCVD and thermal activation of the dopant. Appl. Surf. Sci., 252, 7953-7956.
  • Wang, X. C., Mi, W. B., Dong, S., Chen, X. M. ve Yang, B. H. (2009). Microstructure and optical properties of N-incorporated polycrystalline ZnO films. J. Alloys Compd., 478, 507-512.
  • Bouhssira, N., Abed, S., Tomasella, E., Cellier, J., Mosbah, A., Aida, M. S. ve Jacquet, M. (2006). Influence of annealing temperature on the properties of ZnO thin films deposited by thermal evaporation. Applied Surface Science, 252, 5594-5597.
  • Moustaghfir, A., Tomasella, E., Amor, S. B., Jacquet, M., Cellier, J. ve Sauvage, T. (2003). Structural and optical studies of ZnO thin films deposited by r.f. magnetron sputtering: influence of annealing. Surface and Coatings Technology, 174 –175, 193-196.
  • Kim, C. E., Moon, P., Kim, S., Myoung, J. M., Jang, H. W., Bang, J. ve Yun, I. (2010). Effect of carrier concentration on optical bandgap shift in ZnO:Ga thin films. Thin Solid Films, 518, 6304-9307.
  • Sheu, J.K., Shu, K.W., Lee, M. L., Tun, C. J. ve Chi, G. C. (2007). Effect of Thermal Annealing on Ga
  • Doped ZnO Films Prepared by Magnetron Sputtering. Journal of The Electrochemical Society, 154(6), H521- H5 Ali, A. I., Kim, C. H., Cho, J. H. ve Kim, B. G. (2006). Growth and Characterization of ZnO:Al Thin Film
  • Using RF Sputtering for Transparent Conducting Oxide. Journal of the Korean Physical Society, 49, S652- S6
Toplam 34 adet kaynakça vardır.

Ayrıntılar

Birincil Dil İngilizce
Bölüm Araştırma Makaleleri
Yazarlar

Ebru Senadim Tuzemen

Sezai Elagoz

Hulya Sahin Bu kişi benim

Kamuran Kara Bu kişi benim

Ramazan Esen Bu kişi benim

Ahmet Bulut Bu kişi benim

Yayımlanma Tarihi 4 Temmuz 2013
Yayımlandığı Sayı Yıl 2013 Cilt: 25 Sayı: 2

Kaynak Göster

APA Tuzemen, E. S., Elagoz, S., Sahin, H., Kara, K., vd. (2013). Effects of Annealing on Reflectance of ZnO Grown by PFCVAD. Marmara Fen Bilimleri Dergisi, 25(2), 41-50. https://doi.org/10.7240/mufbed.v25i2.041
AMA Tuzemen ES, Elagoz S, Sahin H, Kara K, Esen R, Bulut A. Effects of Annealing on Reflectance of ZnO Grown by PFCVAD. MFBD. Temmuz 2013;25(2):41-50. doi:10.7240/mufbed.v25i2.041
Chicago Tuzemen, Ebru Senadim, Sezai Elagoz, Hulya Sahin, Kamuran Kara, Ramazan Esen, ve Ahmet Bulut. “Effects of Annealing on Reflectance of ZnO Grown by PFCVAD”. Marmara Fen Bilimleri Dergisi 25, sy. 2 (Temmuz 2013): 41-50. https://doi.org/10.7240/mufbed.v25i2.041.
EndNote Tuzemen ES, Elagoz S, Sahin H, Kara K, Esen R, Bulut A (01 Temmuz 2013) Effects of Annealing on Reflectance of ZnO Grown by PFCVAD. Marmara Fen Bilimleri Dergisi 25 2 41–50.
IEEE E. S. Tuzemen, S. Elagoz, H. Sahin, K. Kara, R. Esen, ve A. Bulut, “Effects of Annealing on Reflectance of ZnO Grown by PFCVAD”, MFBD, c. 25, sy. 2, ss. 41–50, 2013, doi: 10.7240/mufbed.v25i2.041.
ISNAD Tuzemen, Ebru Senadim vd. “Effects of Annealing on Reflectance of ZnO Grown by PFCVAD”. Marmara Fen Bilimleri Dergisi 25/2 (Temmuz 2013), 41-50. https://doi.org/10.7240/mufbed.v25i2.041.
JAMA Tuzemen ES, Elagoz S, Sahin H, Kara K, Esen R, Bulut A. Effects of Annealing on Reflectance of ZnO Grown by PFCVAD. MFBD. 2013;25:41–50.
MLA Tuzemen, Ebru Senadim vd. “Effects of Annealing on Reflectance of ZnO Grown by PFCVAD”. Marmara Fen Bilimleri Dergisi, c. 25, sy. 2, 2013, ss. 41-50, doi:10.7240/mufbed.v25i2.041.
Vancouver Tuzemen ES, Elagoz S, Sahin H, Kara K, Esen R, Bulut A. Effects of Annealing on Reflectance of ZnO Grown by PFCVAD. MFBD. 2013;25(2):41-50.

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