Mikro Elektro Mekanik Sistemler, Genel Bir Tanıtım

Yıl 2002, Cilt: 4 Sayı: 3, 173 - 185, 01.05.2002

Melik Dölen Halit Kaplan

Öz

Bu
makale yeni bir araştırma dalı olan mikro-elektro-mekanik sistem
teknolojilerini tanıtmayı hedeflemektedir. Makalede, yüzey/gövde mikro-işleme, elektro-erozyon,
lazerle işleme ve yüksek derinlik oranlarına sahip mikro yapıların üretiminde
kullanılan LIGA teknikleri gibi başlıca mikro-üretim yöntemleri kısaca ele
alınıp, karşılaştırmalı olarak tanıtılacaktır. Bu üretim teknikleriyle yapılmış
silisyum tabanlı mikro-duyucu ("micro-sensors") ve mikro eyleyicilere
("micro-actuators") çeşitli örnekler verilecektir. Bu makalede ayrıca
mikro-mekanik sistemlerin (dizgelerin) tasarlanmasında kullanılan ölçeklendirme
kanunları ele alınacaktır.

Anahtar Kelimeler

mikro-elektro-mekanik sistemler, mikro-işleme, elektro-erozyon

Kaynakça

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