INVESTIGATION OF ELECTRICAL PROPERTIES OF Al/PAN/p-Si MPS DEVICES FABRICATED BY SPIN COATING AND SCREEN-PRINTING TECHNIQUES

Öz

In this work, the polyacrylonitrile polymer was coated on top of p-Si by two different techniques, and the electrical characterization of the fabricated devices was held. Screen-printing and spin coating techniques were used to fabricate the metal/polymer/semiconductor devices, and the devices were finished with Ohmic contact of aluminum on the Si side, and with silver on the polymer side by using evaporation via chemical vapor deposition. The dark current - voltage and frequency dependent capacitance - voltage measurements of the fabricated Metal Polymer Semiconductor structure have been performed. Current and voltage measurements were carried out in the dark and in the voltage range of -2.0 V to +2.0 V. Capacitance voltage measurements were carried out in the dark, in the voltage range of -4.0 V to +4.0 V, and in the frequency range of 20 kHz to 1 MHz. The results of electrical characterization have been discussed in view of rectification of devices, interface states, interface dipoles, conduction of carriers, polarization mechanism, and relaxation process.

Anahtar Kelimeler

• Polymer
• Polyacrylonitrile
• MPS
• Interface
• Polarization mechanism
• Relaxation

DÖNDÜREREK KAPLAMA VE SERİGRAFİ BASKI YÖNTEMLERİ İLE ÜRETİLEN Al/PAN/p-Si MPY AYGITININ ELEKTRİKSEL ÖZELLİKLERİNİN ARAŞTIRILMASI

Öz

Bu çalışmada poliakrilonitril polimeri p-Si üzerine iki farklı teknikle kaplanmış ve üretilen aygıtların elektriksel karakterizasyonu akım voltaj, frekans bağımlı kapasitans – voltaj ölçümleri aracılığı ile yapılmıştır. Metal/Polimer/Yarı iletken aygıtları üretmek için serigrafi baskı ve döndürerek kaplama teknikleri kullanıldı ve her iki aygıt da kimyasal buhar biriktirme tekniği kullanılarak buharlaştırma yoluyla p-Si katmanından alüminyum ile polimer katmanından gümüş ile Ohmik kontak yapısıyla tamamlandı. Üretilen Metal Polimer Yarı iletken aygıtların karanlık akım - gerilim ve frekansa bağlı kapasitans - gerilim ölçümleri yapılmıştır. Akım - Gerilim ölçümleri karanlık ortamda ve -2,0 V - +2,0 V aralığında yapılmıştır. Kapasitans - Voltaj ölçümleri de yine karanlık ortamda -4,0 V - +4,0 V voltaj aralığında ve 20 kHz - 1 MHz frekans aralığında gerçekleştirilmiştir. Ölçümlerin sonuçları analiz edilerek aygıtların elektriksel karakterizasyonu yapılmıştır. Akım - voltaj ölçümlerinin analizi ile aygıtların doğrultma faktörleri; frekans bağımlı kapasitans - voltaj ölçümlerinin analizleri ile ise arayüz durumları, arayüz dipolleri, taşıyıcıların iletimi, kutuplanma mekanizması ve durulma süreci açısından tartışılmıştır.

Anahtar Kelimeler

• Polimer
• Poliakrilonitril
• MPS
• Arayüz
• Polarizasyon mekanizması
• Durulma

Kaynakça

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