A comprehensive study was carried out starting from powder synthesis to sintering procedure in order to produce a phase-pure SrCe0.95Yb0.05O3-δ sputter target. In the powder synthesis, the effect of chelating and polymerization agents on the formation of single-phase SrCe0.95Yb0.05O3-δ was investigated in detail. In this regard, citric acid, EDTA, and their combinations in different ratios were evaluated as chelating agents. The calcination temperature, ranging from 1000 °C to 1300 °C, was also investigated to reveal its effect on the formation of possible secondary phases. Following the powder synthesis, SrCe0.95Yb0.05O3-δ sputter target with dimensions of ~50 mm diameter and ~3 mm thickness was produced by powder pressing with deformable compaction die and the subsequent sintering at 1300 °C for 10 hours. A relative density of 0.95 was achieved in SrCe0.95Yb0.05O3-δ targets as a result of the procedure in question without the use of a sintering aid.
Yb-doped SrCeO3 Deformable compaction die Sintering Sputter deposition Thin film
Scientific and Technical Research Council of Turkey
119M065
119M065
Birincil Dil | İngilizce |
---|---|
Konular | Mühendislik |
Bölüm | Makaleler |
Yazarlar | |
Proje Numarası | 119M065 |
Erken Görünüm Tarihi | 16 Mayıs 2022 |
Yayımlanma Tarihi | 28 Haziran 2022 |
Yayımlandığı Sayı | Yıl 2022 Cilt: 8 Sayı: 1 |