The present paper reports the influence of working pressure and nitrogen flow rate on the mechanical and wear properties of TiN thin films deposited by DC reactive magnetron sputtering with RF bias voltage. The process of PVD coating is conducted in a nitrogen-argon gaseous mixture at a temperature of 150°C and a DC power of 200W for 90 min. The micro hardness and the wear resistance of the TiN are determined prior to and after the PVD coating. The wear volumes of samples were evaluated using optical profilometre. Worn surfaces were
observed using scanning electron microscopy. It was observed that coated samples showed considerable higher mechanical properties and wear resistance compare to uncoated samples. Abrasive wear mechanism was observed on the surface of worn surfaces.
The present paper reports
the influence of working pressure and nitrogen flow rate on the mechanical and
wear properties of TiN thin films deposited by DC reactive magnetron sputtering
with RF bias voltage. The process of PVD coating is conducted in a nitrogen-argon
gaseous mixture at a temperature of 150°C and a DC power of 200W for 90 min.
The micro hardness and the wear resistance of the TiN are determined prior to
and after the PVD coating. The wear volumes of samples were evaluated using
optical profilometre. Worn surfaces were observed using scanning electron
microscopy. It was observed that coated samples showed considerable higher
mechanical properties and wear resistance compare to uncoated samples. Abrasive
wear mechanism was observed on the surface of worn surfaces.
Birincil Dil | İngilizce |
---|---|
Konular | Mühendislik |
Bölüm | Makaleler |
Yazarlar | |
Yayımlanma Tarihi | 13 Ekim 2018 |
Yayımlandığı Sayı | Yıl 2018 Cilt: 13 Sayı: 4 |