Atomik Katman Biriktirme Tekniğine Genel Bakış: Zno, Tio2 Ve Al2o3 Filmlerin Üretimi

Hakan Ateş; Meryem Polat Gönüllü

doi:10.29109/gujsc.593292

Atomik Katman Biriktirme Tekniğine Genel Bakış: Zno, Tio2 Ve Al2o3 Filmlerin Üretimi

Abstract

Gelişmekte olan teknoloji ile birlikte optoelektronik, enerji çevrimi, nanomedikal uygulamaları ve katalizör malzemeler gibi pek çok alanda teknolojinin minyatürleşmesi sebebiyle nano-boyutta malzeme üretiminin gerekliliği önem kazanmıştır. Bu sebeple son zamanlarda yapılan bilimsel çalışmalar atomik-boyutta ince film kaplama ve büyütme teknolojilerine odaklanmışlardır. Tam da bu noktada, atomik-boyutta üstün kaliteli kaplamalar yapmaya imkân sağlayan atomik katman biriktirme (ALD) ince film üretim tekniği devreye girmektedir. Bu çalışmada, ALD tekniği hakkında temel bilgi verilmiş, ALD kullanılarak 200 ºC taban sıcaklığında silisyum yongalar üzerine ZnO, TiO₂ ve Al₂O₃ince filmler kaplanmıştır. Homojen yüzeyli ince film kaplamaların yapılabilmesi için öncelikle deneysel parametreler değiştirilerek farklı tekrarlarda üretimler gerçekleştirilmiştir ve en uygun deney koşulları belirlenmiştir. Detaylı karakterizasyon işlemleri en uygun üretim koşulları altında kaplama homojenliği sağlayabilmiş ZnO, TiO₂ ve Al₂O₃ince filmler için yapılmıştır. Üretilen filmlerin homojen bir yapıya sahip olup olmadığını belirlemek için spektroskopik elipsometri tekniği kullanılarak çeşitli noktalarından kalınlıkları saptanmıştır. Ayrıca kristal yapıları hakkında bilgi edinmek adına X-ışını kırınım desenleri incelenmiştir.

Keywords

ALD,ince filmler,kaplama,nano teknoloji

Thanks

Bu çalışma, 07/2015-08 ve 07/2016-11 numaralı Gazi Üniversitesi Bilimsel Araştırma Projeleri desteğine ve Okyay Technology R&D tarafından desteklendi.

References

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Details

Primary Language

Turkish

Subjects

Engineering

Journal Section

Research Article

Authors

Hakan Ateş ^*
0000-0002-5132-4107
Türkiye

Meryem Polat Gönüllü This is me
Türkiye

Publication Date

September 27, 2019

Submission Date

July 17, 2019

Acceptance Date

August 6, 2019

Published in Issue

Year 2019 Volume: 7 Number: 3

DOI

https://doi.org/10.29109/gujsc.593292

IZ

https://izlik.org/JA28SA27ZB

Cite

RIS / Bibtex

APA

Ateş, H., & Polat Gönüllü, M. (2019). Atomik Katman Biriktirme Tekniğine Genel Bakış: Zno, Tio2 Ve Al2o3 Filmlerin Üretimi. Gazi Üniversitesi Fen Bilimleri Dergisi Part C: Tasarım Ve Teknoloji, 7(3), 649-660. https://doi.org/10.29109/gujsc.593292

AMA

1.Ateş H, Polat Gönüllü M. Atomik Katman Biriktirme Tekniğine Genel Bakış: Zno, Tio2 Ve Al2o3 Filmlerin Üretimi. GUJS Part C. 2019;7(3):649-660. doi:10.29109/gujsc.593292

Chicago

Ateş, Hakan, and Meryem Polat Gönüllü. 2019. “Atomik Katman Biriktirme Tekniğine Genel Bakış: Zno, Tio2 Ve Al2o3 Filmlerin Üretimi”. Gazi Üniversitesi Fen Bilimleri Dergisi Part C: Tasarım Ve Teknoloji 7 (3): 649-60. https://doi.org/10.29109/gujsc.593292.

EndNote

Ateş H, Polat Gönüllü M (September 1, 2019) Atomik Katman Biriktirme Tekniğine Genel Bakış: Zno, Tio2 Ve Al2o3 Filmlerin Üretimi. Gazi Üniversitesi Fen Bilimleri Dergisi Part C: Tasarım ve Teknoloji 7 3 649–660.

IEEE

[1]H. Ateş and M. Polat Gönüllü, “Atomik Katman Biriktirme Tekniğine Genel Bakış: Zno, Tio2 Ve Al2o3 Filmlerin Üretimi”, GUJS Part C, vol. 7, no. 3, pp. 649–660, Sept. 2019, doi: 10.29109/gujsc.593292.

ISNAD

Ateş, Hakan - Polat Gönüllü, Meryem. “Atomik Katman Biriktirme Tekniğine Genel Bakış: Zno, Tio2 Ve Al2o3 Filmlerin Üretimi”. Gazi Üniversitesi Fen Bilimleri Dergisi Part C: Tasarım ve Teknoloji 7/3 (September 1, 2019): 649-660. https://doi.org/10.29109/gujsc.593292.

JAMA

1.Ateş H, Polat Gönüllü M. Atomik Katman Biriktirme Tekniğine Genel Bakış: Zno, Tio2 Ve Al2o3 Filmlerin Üretimi. GUJS Part C. 2019;7:649–660.

MLA

Ateş, Hakan, and Meryem Polat Gönüllü. “Atomik Katman Biriktirme Tekniğine Genel Bakış: Zno, Tio2 Ve Al2o3 Filmlerin Üretimi”. Gazi Üniversitesi Fen Bilimleri Dergisi Part C: Tasarım Ve Teknoloji, vol. 7, no. 3, Sept. 2019, pp. 649-60, doi:10.29109/gujsc.593292.

Vancouver

1.Hakan Ateş, Meryem Polat Gönüllü. Atomik Katman Biriktirme Tekniğine Genel Bakış: Zno, Tio2 Ve Al2o3 Filmlerin Üretimi. GUJS Part C. 2019 Sep. 1;7(3):649-60. doi:10.29109/gujsc.593292

Atomik Katman Biriktirme Tekniğine Genel Bakış: Zno, Tio2 Ve Al2o3 Filmlerin Üretimi

Atomik Katman Biriktirme Tekniğine Genel Bakış: Zno, Tio2 Ve Al2o3 Filmlerin Üretimi

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