TÜBİTAK
115E664
This work was partially supported by The Scientific and Technological Research Council of Turkey (TUBITAK) under Grant 115E664 and Grant BIDEB 2218. The author would like to thank the Bilkent University.
In the present study,
the silver (Ag) metal particle was used between two insulating layers to fabricated
zinc-oxide (ZnO) thin film transistor. The Ag metal was evaporated with thermal
systems. The dielectric materials such as Al2O3 and HfO2
were deposited atomic layer deposition (ALD) technique. In order to beter
understand the device operation and Ag layer on charge trapping layer, the some
electrical characteristics such as Ion/Ioff ratio,
threshold voltage (Vth) were calculated with some different current-voltage (I-V)
measurements. These values are found to be 1.1x103 and 2.1 V,
respectively. The IDS-VDS measurements were repeated 20
times to investigate the memory effect of Ag material at the interface layer. This
measurement shown that the hysterisis of memory window did not decreased. In addition
these measurements, the transistor's response was measured to light by taking IDS-VDS
measurements in the dark and under light. This device has been found to
be photosensitive. These results shown that the ZnO thin film transistor can be
used flash memory technology and photovoltaic device applications.
115E664
Primary Language | Turkish |
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Subjects | Engineering |
Journal Section | Articles |
Authors | |
Project Number | 115E664 |
Publication Date | December 31, 2019 |
Published in Issue | Year 2019 Volume: 8 Issue: 2 |
This work is licensed under the Creative Commons Attribution-Non-Commercial-Non-Derivable 4.0 International License.