Co Katkılı ZnO İnce Filmlerinin Üretimi ve Karakterizasyonu

Öz

Son yıllarda, ZnO saydam iletken oksit ince filmlerinin Mn, Fe, Ir ve Co gibi geçiş metal oksitleri ile katkılandığında ilginç özelliklere sahip olması dikkat çekmektedir. Bu çalışmada, katkısız ve Co katkılı (% 12 ) ZnO filmleri 320 ± 5 °C taban sıcaklığındaki cam tabanlar üzerine ultrasonik kimyasal püskürtme tekniği (UKP) kullanılarak depolanmıştır. Co katkısının ZnO ince filmlerinin optik, elektrik, yapısal ve yüzeysel özellikleri üzerine etkisi araştırılmıştır

Anahtar Kelimeler

• ZnO, UKP, SE, dört-uç tekniği, AKM

Production and Characterization of Co-doped ZnO Thin Films

Öz

Recently, ZnO transparent conductive oxide films have been noticed that these films may possess interesting properties when doped by transition metal such as Mn, Fe, Ir and Co. In this study, undoped and Co-doped (at. 12 %) ZnO films have been produced on the glass substrates at 320 ± 5 °C by ultrasonic chemical spray pyrolysis (UCPS) technique. The effect of Co-doping on structural, optical, electrical and surface properties of ZnO films has been investigated

Anahtar Kelimeler

• ZnO, UCSP, SE, four probe technique, AFM

Kaynakça

1. [1] Thomas, D. G., Journal Physics Chemical Solid, 15, 86, (1960).
2. [2] Pauporte, T., Lincot, D., Electroctrochim. Acta 45:20, 3345, 2000.
3. [3] Gal, D., Hodes, G., Lincot, D., Schock, H. W., Thin Solid Films, 79, 361-362, (2000)
4. [4] Nayak, P., Yang, J., Kim, J., Chung, S., Jeong, J., Lee, C., Yong, Y., Applied Physics, 42, (2009).
5. [5] Reynolds, D.C., Look, D.C., Jogai, B., Solid State Commun., 1999, 99, 145. [6] Roy, S., Basu, S., Bull Material Science, 2002, 25 (6), 513.
6. [7] Ataev, B.N., Bagamadova, A. M., Mamedov, V. V., Omaev A. K., Rabadanov, M. R., J. Cryst. Growth, 1222, 198-199, (1999).
7. [8] D. Song, P. Widenborg, W. Chin, A.G. Aberle, Sol. Energ. Mater Sol. Cells, 73, 1, (2002).
8. [9] Krunks, M., Melikov, E., Thin Solid Films, 1995, 33, 270.

9. [10] Paraguay, F., Estrada, D. W., Acosta, L.D.R., Antrade, N.E, Yoshida, M.M., Thin Solid Films, 350, 192, (1999).
10. [11] Yoshoni, K., Oyama, S., YonetA, M., Taniyama, T., 2008, Stuructural and magnetic charactreization of Mn-doped ZnO films grown by spray pyrolysis method, Material Science and Engineering, B, 148, 1-3, 234-236.
11. [12] Singh, P., Kaushal, A., Kaur, D., 2009, Mn-doped ZnO nanocrystalline thin film prepared by ultrasonic spray pyrolysis, Journal of Alloys and Compounds, 471, 1-2, 11-15.
12. [13] Wienke, J. And Booij, A. S., 2008, ZnO:In deposition by spray pyrolysis influence of the growth conditions on the electrical and optical properties, Thin Solid Films, 516, 14, 4508-4512.
13. [14] Belghazi, Y., Aouaj, M. A., Yadari, M. El, Schmerber, G., Boullet, C. U., Leuvrey, C., Colis, S., Abd-Lefdil, M., Berrada, A., Dinia, A., 2009, Elaboration and characterization of Co doped ZnO thin films deposited by spray pyrolysis technique, Microelectronics Journal, 40, 265-267.
14. [15] Bacaksiz, E., Aksu, S., Yılmaz, S., Parlak, M., Altunbaş, M., 2010, Structural, optical na electrical properties of Al-doped ZnO microrods prepared by spray pyrolysis, Thin Solid Films, 518, 15, 4076-4080.
15. [16] Sournahoro, L., Moubah, R., Schmerber, G., Colis, S., Aouaj, M. A., Abd-Lefdil, M., Hassanain, N., Berrada, A., Dinia, A., 2010, Structural, optical and magnetic properties of Fe-doped ZnO films prepared by spray pyrolysis method, Thin Solid Films, 518, 4593-4596, 113.
16. [17] Prasada Rao, T. and Santhosh Kumar, M. C., 2010, Physical properties of Gadoped ZnO thin films by spray pyrolysis, Journal of Alloys and Compounds, 506, 788-793