THE EFFECT OF PRETREATMENT OF COPPER SUBSTRATE TO THE QUALITY OF SINGLE LAYER GRAPHENE

Öz

Among the various methods suggested to synthesize uniform and wide graphene sheets, growing graphene on copper or nickel substrate via Chemical Vapor Deposition (CVD) is the most preferred. Recent works have been demonstrated that defect free formation of large mono-layer graphene critically depends on the copper's crystalline structure. Moreover the substrate surface state is another important parameter involving an appropriate pretreatment. In this study, 25 μm thick copper substrate has been prepared with three different process; standart cleaning, electro-polishing and annealing. Then graphene growth has been performed using methane (CH4) and hydrogen (H2) gases. Structure and purity of copper foil have been determined using XRD and XRF techniques. In order to determine the graphene properties, the upper surface and the lower surface of copper substrate have been examined using Confocal Raman. At the end of the work, large single layer graphene has been observed on the copper substrate pretreated by electro-polishing, while multilayer graphene has been observed on substrates pretreated by the other methods

Anahtar Kelimeler

• Single layer graphene, CVD, Copper substrate, Electropolishing

BAKIR ALTTAŞA YAPILAN ÖN İŞLEMİN TEK TABAKA GRAFEN FİLM KALİTESİNE ETKİSİ

Öz

Tekdüze büyük ölçekli grafen tabakaları sentezlemek için çeşitli metotlar önerilmiştir. Bunlardan en çok tercih edileni bakır veya nikel alttaş üzerine kimyasal buhar biriktirme (CVD) yöntemiyle grafen büyütmektir. Son çalışmalarda, kusursuz formasyona sahip tek tabaka grafenin, bakırın kristal yapısına kritik bir şekilde bağlı olduğu bilinmektedir. Bu etkinin yanı sıra, bakır alttaşa yapılan ön işlemin de grafen oluşumunu etkilediği düşünülmüştür. Çalışmada alttaş olarak 25 μm kalınlıklı bakır folyolar standart temizleme, elektroliz ile parlatma ve tavlama gibi üç farklı ön işlemden geçirilmiştir. Daha sonra metan (CH4) ve hidrojen (H2) proses gazları kullanılarak grafen sentezlenmiştir. Bakır folyonun yapısı ve kalitesi XRD ve XRF ile belirlenmiştir. Büyütme işleminden sonra bakır alttaşların üst yüzeyleri ve alt yüzeyleri Konfokal Raman kullanılarak incelenmiş, oluşan grafenin özellikleri tespit edilmiştir. Sonuç olarak elektroliz ile parlatma ön işleminden geçirilmiş bakır alttaş üzerinde, tek tabaka grafen oluşumu gözlenirken diğer ön işlemlerden geçirilmiş bakır alttaşlar üzerinde çok tabakalı grafenler gözlenmiştir

Anahtar Kelimeler

• Tek tabaka grafen, CVD, Bakır alttaş, Elektroliz ile parlatma

Kaynakça

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