IN2O3 FILMS PRODUCED BY SOL-GEL SPIN COATING METHOD FOR PHOTOVOLTAIC APPLICATIONS

Yıl 2017, Cilt: 19 Sayı: 56, 447 - 467, 01.05.2017

Metin Kul Melih Şenel

Öz

In2O3 semiconductor films have been prepared by solgel spin coating method at room temperature. The determination of the processing parameters such as molar concentration of the precursor, spinning speed of the substrate, volume of the solution, number of coating cycles, spin time and annealing temperature for samples have been studied. The physical properties of these films are characterized by x-ray powder diffraction (XRD), ellipsometer, field emission scanning electron microscope (FESEM), absorption and transmittance spectroscopy measurements. X-ray diffraction patterns of the In2O samples have revealed that the samples are polycrystalline with cubic crystal structure. It was determined that optical band gap of the films has direct band transition by using optical absorption measurements. Optical band gap values of In2O3 films at different annealing temperatures were found to be around 3,49 eV. The transmittance values of the films in the visible region have varied between 65% and 80%

Anahtar Kelimeler

Indium Oxide, Sol-Gel Spin Coating Method, X-Ray Diffraction, FESEM, Optical Band Gap

FOTOVOLTAİK UYGULAMALAR İÇİN DÖNDÜREREK KAPLAMA YÖNTEMİYLE ELDE EDİLEN IN2O3 FİLMLERİ

Öz

In2O3 yarıiletken filmleri oda sıcaklığında döndürerek kaplama yöntemiyle elde edilmiştir. Bu yöntem ile numunelerin elde edilme aşamalarında çözelti konsantrasyonunun, taban dönüş hızının, çözelti miktarının, kaplama sayısının, kaplama süresinin ve tavlama sıcaklığının belirlenmesi çalışmaları yapılmıştır. Filmlerin fiziksel özellikleri x-ışını toz kırınımı (XRD), elipsometre, alan emisyonlu taramalı elektron mikroskobu (FESEM), absorpsiyon ve geçirgenlik spektroskopisi ölçümleri ile karakterize edilmiştir. Numunelerin kırınım desenleri filmlerin polikristal olduğunu ve kübik yapıda kristallendiğini göstermiştir. Optik absorpsiyon ölçümlerinden filmlerin yasak enerji aralıklarının direk bant geçişli olduğu belirlenmiştir. Farklı tavlama sıcaklıklarında InOdeğerleri 3.49 eV civarında bulunmuştur. Görünür bölgede filmlerin geçirgenliği 65% ile 80% aralığındadır. filmlerinin yasak enerji aralığı

Anahtar Kelimeler

İndiyum Oksit, Döndürerek Kaplama Yöntemi, X-ışını kırınımı, FESEM, Yasak Enerji Aralığı

Kaynakça

• [1] Liu, D., Lei, W.W., Zou, B., Yu, S., Hao, D.J., Wang, K., Liu, B.B., Cui, Q.L., Zou, G.T. 2008. High-Pressure X-Ray Diffraction and Raman Spectra Study of Indium Oxide, Journal of Applied Physics, Cilt. 104, s. 083506. DOI: 10.1063/1.2999369
• [2] Guo. L., Shen, X., Zhu, G., Chen, K. 2011. Preparation and Gas-Sensing Performance of In2O3 Porous Nanoplatelets, Sensors and Actuators B, Cilt. 155, s. 752–758. DOI: 10.1016/j.snb.2011.01.042
• [3] Jothibas, M., Manoharan, C., Ramalingam, S., Dhanapandian, S., Johnson Jeyakumar, S., Bououdina, M. 2013. Preparation, Characterization, Spectroscopic (FT-IR, FT-Raman, UV and visible) Studies, Optical Properties and Kubo Gap Analysis of In2O3 Thin Films, Journal of Molecular Structure, Cilt. 1049, s. 239–249. DOI: 10.1016/j.molstruc.2013.06.047
• [4] Zheng, J., Yang, R., Lou, Y., Li, W., Li, X. 2012. Low Temperature Growth of Nanoblade In2O3 Thin Films by Plasma Enhanced Chemical Vapor Deposition: Morphology Control and Lithium Storage Properties, Thin Solid Films, Cilt. 521, s. 137– 140. DOI: 10.1016/j.tsf.2012.02.018
• [5] Sudha, A., Sharma, S.L., Maity, T.K. 2015. Effects of Annealing Temperature on Structural and Electrical Properties of Indium Oxide Thin Films Prepared by Thermal Evaporation, Materials Letters, Cilt. 157, s. 19–22. DOI: 10.1016/j.matlet.2015.05.050
• [6] Gupta, R.K., Mamidi, N., Ghosh, K., Mishra, S.R., Kahol, P.K. 2007. Growth and Characterization of In2O3 Thin Films Prepared by Pulsed Laser Deposition, Journal of Optoelectronics and Advanced Materials, Cilt. 9, s. 2211–2216.
• [7] Cho, J.S., Yoon, K.H., Koh, S-K. 2001. Material Properties of Indium Oxide Films Prepared by Oxygen Ion Assisted Deposition, Journal of Applied Physics, Cilt. 89, s. 3223- 3228. DOI: 10.1063/1.1345865
• [8] Karthikeyan, S., Hill, A.E., Pilkington, R.D. 2014. The Deposition of Low Temperature Sputtered In2O3 Films Using Pulsed D.C Magnetron Sputtering from a Powder Target, Thin Solid Films, Cilt. 550, s. 140–144. DOI: 10.1016/j.tsf.2013.10.141
• [9] Beji, N., Souli, M., Ajili, M., Azzaza, S., Alleg, S., Turki, N.K. 2015. Effect of Iron Doping on Structural, Optical and Electrical Properties of Sprayed In2O3 Thin Films, Superlattices and Microstructures, Cilt. 81, s. 114–128. DOI: 10.1016/j.spmi.2015.01.015
• [10] Ali, M., Wang, Ch, Y., Röhlig, C-C., Cimalla, V., Stauden, Th., Ambacher, O. 2008. NOx Sensing Properties of In2O3 Thin Films Grown by MOCVD, Sensors and Actuators B, Cilt. 129, s. 467–472. DOI:10.1016/j.snb.2007.08.011
• [11] Brinzari, V., Cho, B.K., Kamei, M., Korotcenkov, G. 2015. Photoemission Surface Characterization of (0 0 1) In2O3 Thin Film through the Interactions with Oxygen, Water and Carbon Monoxide: Comparison with (1 1 1) Orientation, Applied Surface Science, Cilt. 324, s. 123–133. DOI: 10.1016/j.apsusc.2014.10.072
• [12] Rey, J.F.Q, Plivelic, T.S., Rocha, R.A., Tadokoro, S,K., Torriani, I., Muccillo, E.N.S. 2005. Synthesis of In2O3 Nanoparticles by Thermal Decomposition of a Citrate Gel Precursor, Journal of Nanoparticle Research, Cilt. 7, s. 203–208. DOI: 10.1007/s11051-004-7899-7
• [13] Sun. X., Ji, H., Li, X., Shu, C., Zheng, C. 2014. Mesoporous In2O3 with Enhanced Acetone Gas Sensing Property, Materials Letters Cilt. 120, s. 287–291. DOI: 10.1016/j.matlet.2014.01.114
• [14] Siciliano, T., Di Giulio M., Tepore, M., Genga, A., Micocci, G., Tepore, A. 2012. In2O3 films Prepared by Thermal Oxidation of Amorphous InSe Thin Films, Thin Solid Films, Cilt. 520, s. 2455–2460. DOI: 10.1016/j.tsf.2011.10.015
• [15] Wang, L., Xu, X. 2015. Semiconducting Properties of In2O3 Nanoparticle Thin Films in Air and Nitrogen, Ceramics International, Cilt. 41, s. 7687–7692. DOI: 10.1016/j.ceramint.2015.02.097
• [16] Park, S., Sun, G.J., Kheel, H., Lee, W.I., Lee, S., Choi, S.B., Lee, C. 2016. Synergistic Effects of Codecoration of Oxide Nanoparticles on the Gas Sensing Performance of In2O3 Nanorods’ Sensors and Actuators B, Cilt. 227, s. 591–599. DOI: 10.1016/j.snb.2015.12.098
• [17] Ogi, T., Modesto-Lopez, L.B., Iskandar, F., Okuyama, K. 2007. Fabrication of a Large Area Monolayer of Silica Particles on a Sapphire Substrate by a Spin Coating Method, Colloids and Surfaces A: Physicochemistry Engineering Aspects, Cilt. 297, s. 71–78. DOI: 10.1016/j.colsurfa.2006.10.027
• [18] Norrman, K., Ghanbari-Siahkali, A., Larsen, N.B. 2005. Studies of SpinCoated Polymer Films, Journal Article Annual Reports Progress of Chemistry Section C: Physical Chemistry, Cilt. 101, s. 174-201. DOI: 10.1039/b408857n