n-Si ve PET alttaşlar üzerine RF-kaplanan GZO ince filmlere tavlama sıcaklığının etkileri

Yıl 2019, Cilt: 34 Sayı: 4, 1757 - 1764, 25.06.2019

Nihan Akın Sönmez Meltem Dönmez Buse Cömert Tarık Asar Barış Kınacı Süleyman Özçelik

https://doi.org/10.17341/gazimmfd.571538

Öz

Mikro
takımların uç nokta Frekans Tepki Fonksiyonları (FTF) darbe testi ve modal
(biçim) analizi vasıtası ile belirlenememektedir. Ayrıca, mikro işlemler yüksek
hızlarda gerçekleştirilmekte ve jiroskopik momentler ve merkezkaç kuvvetleri
nedeniyle takım uç nokta FTF’sinde değişimler meydana gelmektedir. Bu
çalışmada, mikro takımlar kesici uç geometrisini ve operasyon etkilerini
içerecek şekilde analitik olarak modellenmiştir. Ayrıca, iş mili geometrisinin
bilinmediği durumlar için deneysel olarak elde edilen durağan iş mili dinamiği
ve analitik olarak hesaplanan dönen takım ve tutucu dinamiğinin
birleştirilmesini mümkün kılan yeni bir yöntem geliştirilmiştir.

Anahtar Kelimeler

Galyum katkılı çinko oksit, tavlama, UV sensör

Kaynakça

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