Research Article
Year 2014,
Volume: 27 Issue: 3, 909 - 915, 04.04.2014
Abstract
References
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- C. R. Crowell, S. M. Sze, J. Appl. Phys. 36, 3212 (1965).
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Analysis of Barrier Height and Carrier Concentration of MOS Capacitor Using C-f and G/ω-f Measurements
Abstract
Capacitance (C) and conductance (G/ω) measurements of metal-oxide-semiconductor (MOS) capacitors with Si3N4 dielectric deposited on Si were investigated in the frequency range of 1 kHz to 1 MHz at room temperature. The values of measured C and G/ω of MOS capacitor decrease with the increasing frequency. The 1/C2-V curves are linear in the wide voltage region for each frequency. This linearity of the curves is attributed to the uniformity of the donor concentration in the depletion region. Also, the barrier height (FB) and carrier (donor) concentration (ND) were obtained from C-2-V characteristics. The values of the ΦB and ND decrease with the increasing frequency.
References
- E. H. Nicollian, J. R. Brews, MOS Physics and Technology, Wiley, New York, 1982).
- S. M. Sze, Physics of Semiconductor Devices, 2nd Ed. Wiley, New York, 1981).
- D. K. Schroder, Semiconductor Material and Device Characterization, 2nd Ed. Wiley, New York, (1998).
- M. K. Hudait, S. B. Krupanidhi, Solid State Electron. 44, 1089 (2000).
- A. Singh, K. C. Reinhardt, W. A. Anderson, J. Appl. Phys. 68, 3475 (1990).
- A. Tataroğlu, Ş. Altındal, Vacuum 82, 1203 (2008).
- O. Pakma, N. Serin, T. Serin, Ş. Altındal, J. Phys. D: Appl. Phys. 41, 215103 (2008).
- S. Kaya, R. Lok, A. Aktag, J. Seidel, E. Yilmaz, J. Alloys Compd. 583, 476 (2014).
- H. C. Card, E. H. Rhoderick, J. Phys. D Appl. Phys. 4, 1589 (1971).
- C. R. Crowell, S. M. Sze, J. Appl. Phys. 36, 3212 (1965).
- S. Kar, W. E. Dahlke, Solid State Electron. 15, 221 (1972).
- S. Jeon, S. Park, Microelectron. Eng. 88, 872 (2011).
- U. Kelberlau, R. Kassing, Solid State Electron. 22, 37 (1979). [14] P. Matheswaran, R. Saravanakumar, S. Velumani, Mater. Sci. Eng. B 174, 269 (2010). Sathyamoorthy, R.
- S. Chand, J. Kumar, J. Appl. Phys. A 63, 171 (1996).
- W. M. R. Divigalpitiya, Solar Energ. Mater. 18, 253 (1989).
- J. W. Kim, J. W. Lee, Appl. Sur. Sci. 250, 247 (2005).
- N. Kavasoğlu, C. Tozlu, O. Pakma, A. S. Kavasoğlu, S. Özden, B. Metin, Ö. Birgi, Ş. Oktik, Synthetic Met. 59, 1880 (2009).
There are 17 citations in total.
Details
| Primary Language | English |
|---|---|
| Subjects | Engineering |
| Journal Section | Research Article |
| Authors | |
| Publication Date | April 4, 2014 |
| IZ | https://izlik.org/JA96RZ39KX |
| Published in Issue | Year 2014 Volume: 27 Issue: 3 |