Production of high-transparent MgO films by radio-frequency sputtering method
Öz
Magnesium oxide (MgO) thin films were deposited on silicon and glass substrates by the radio frequency (RF) sputtering method. The MgO films were annealed at 400 ⁰C for 4h. The effect of working pressure on the structure and optical properties of MgO films was investigated. Structural characterization of thin films was determined using the X-ray diffraction (XRD) method. XRD results showed the presence of dominant peaks corresponding to the (200) and (220) lattice planes of MgO. However, peaks corresponding to (111), (311) and (222) lattice planes of the MgO also appeared in the films deposited at low pressure. It was determined that the average crystal size decreased as the working pressure reduced, while the deposition rate increased. SEM analysis showed that the microstructure of the nano-spherical MgO film transformed into a coarse-grained nano-pyramidal shape after annealing. The optical properties of MgO films were investigated by UV-Vis spectroscopy. Accordingly, it was determined that the absorption threshold of the films was around 310 nm wavelength and the optical band gap of the films varied between 4.07 and 4.14 eV. As a result, MgO films with high transmittance reaching an average of 95% in the visible region were obtained.
Anahtar Kelimeler
High-transparent films, Magnesium oxide, Optical properties, RF sputtering
Proje Numarası
Proje Kodu: FDK-2019-7473
Kaynakça
- Ahmed, K., Rabah, M., Khaled, M., Mohamed, B. & Mokhtar, M. (2016). Optical and structural properties of Mn doped MgO powders synthesized by Sol-gel process. Optik, 127(20), 8253-8258. https://doi.org/10.1016/j.ijleo.2016.06.055
- Baba, S., Mori, I. & Nakano, T. (2000). Precise determination of the refractive index of sputtered MgO thin films in the visible light range. Vacuum, 59(2-3), 531-537. https://doi.org/10.1016/S0042-207X(00)00312-2
- Bazhan, Z., Ghodsi, F. E. & Mazloom, J. (2013). Effect of stabilizer on optical and structural properties of MgO thin films prepared by sol–gel method. Bulletin of Materials Science, 36(5), 899-905. https://doi.org/10.1023/A:1008725521769
- Boo, J. H., Lee, S. B., Yu, K. S., Koh, W. & Kim, Y. (1999). Growth of magnesium oxide thin films using single molecular precursors by metal–organic chemical vapor deposition. Thin Solid Films, 341(1-2), 63-67. https://doi.org/10.1016/S0040-6090(98)01524-7
- Caceres, D., Colera, I., Vergara, I., Gonzalez, R. & Roman, E. (2002). Characterization of MgO thin films grown by rf-sputtering. Vacuum, 67(3-4), 577-581. https://doi.org/10.1016/S0042-207X(02)00251-8
- Cho, J. M., Lee, K. H., Cheon, C. I., Cho, N. I. & Kim, J. S. (2010). Characterization of the biaxial textures of MgO thin films grown by E-beam evaporation. Journal of the European Ceramic Society, 30(2), 481-484. https://doi.org/10.1016/j.jeurceramsoc.2009.06.015
- Chowdhury, A. & Kumar, J. (2006). Morphology, surface topography and optical studies on electron beam evaporated MgO thin films. Bulletin of Materials Science, 29(5), 513-521. https://doi.org/10.1007/BF02914083
- Eun, J. H., Lee, J. H., Kim, S. G., Um, M. Y., Park, S. Y. & Kim, H. J. (2003). The protection of MgO film against hydration by using Al2O3 capping layer deposited by magnetron sputtering method. Thin Solid Films, 435(1-2), 199-204. https://doi.org/10.1016/S0040-6090(03)00362-6
- Güney, H. & İskenderoğlu, D. (2018). Synthesis of MgO thin films grown by SILAR technique. Ceramics International, 44(7), 7788-7793. https://doi.org/10.1016/j.ceramint.2018.01.210 Ho, I. C., Xu, Y. & Mackenzie, J. D. (1997). Electrical and optical properties of MgO thin film prepared by sol-gel technique. Journal of Sol-Gel Science and Technology, 9(3), 295-301. https://doi.org/10.1007/BF02437193
- Kim, E., Han, Y., Kim, W., Choi, K. C., Im, H. G. & Bae, B. S. (2013). Thin film encapsulation for organic light emitting diodes using a multi-barrier composed of MgO prepared by atomic layer deposition and hybrid materials. Organic Electronics, 14(7), 1737-1743. https://doi.org/10.1016/j.orgel.2013.04.011