Investigation of Mechanical and Tribological Properties of TiNbN and TiVN Films Deposited by Magnetron Sputtering Method

Yıl 2017, Cilt: 7 Sayı: 2, 181 - 191, 31.07.2017

Özlem Baran

Öz

Nickel
alloys, especially Inconel, show good mechanical properties in a wide
temperature range. But, the wear resistance of this alloys are fairly low. Due
to high hardness, low friction coefficient and good wear resistance, transition
metal nitride films are commonly used in industry. In this study; for the purpose of increasing the wear resistance of Inconel 600
substrate, TiNbN and TiVN films were coated on these substrates
using Closed Field Unbalanced Magnetron Sputtering method. The structural
properties of the films were analyzed using XRD, SEM and EDS, the mechanical
properties were determined by nanohardness and scratch tests. The friction and wear properties were determined using the wear test
method. The TiNbN and TiVN films exhibit a dense and columnar microstructure. According
to XRD analyze results; TiVN (111) and TiNbN (111) were dominant phases for the
TiVN and TiNbN films, respectively. Compared with the TiVN films, due to the higher
film thickness and %N content, the dominant (111) orientation and the smaller grain
size, the TiNbN films exhibited the higher hardness and better adhesion. The TiVN
and TiNbN films considerably increased the wear resistance of Inconel 600
substrate. When compared with the TiVN films, the TiNbN films with the higher hardness
and better adhesion significantly improved the tribological properties of the
substrate with lower friction coefficient and lower wear rate.

Anahtar Kelimeler

Adhesion, Wear, Inconel 600, TiNbN, TiVN

Manetron Sıçratma Yöntemiyle Kaplanmış TiNbN ve TiVN Filmlerin Mekanik ve Tribolojik Özelliklerinin İncelenmesi

Öz

Nikel
alaşımları, özellikle de Inconel, geniş bir sıcaklık aralığında iyi mekanik özellikler
göstermektedir. Ancak, bu alaşımların aşınma direnci oldukça düşüktür. Geçiş
metal nitrür filmler yüksek sertlikleri, düşük sürtünme katsayısı ve iyi aşınma
direnci sebebiyle endüstrinin pek çok alanında yaygın bir şekilde
kullanılmaktadır. Bu çalışmada; Inconel 600 taban malzemenin aşınma direncini
artırabilmek amacıyla, TiNbN ve TiVN filmler bu taban malzemeler üzerine kapalı
alan dengesiz magnetron sıçratma yöntemi kullanılarak kaplanmıştır. Filmlerin
yapısal özellikleri XRD, SEM ve EDS kullanılarak analiz edilmiş, mekanik
özellikleri nanosertlik ve çizik testleri ile belirlenmiştir. Sürtünme ve aşınma
özellikleri aşınma deney düzeneği kullanılarak belirlenmiştir. TiVN ve TiNbN
filmler yoğun ve kolonsal bir mikroyapı sergilemiştir. XRD analiz sonuçlarına
göre; TiVN filmler için TiVN (111) ve TiNbN filmler için TiNbN (111) en baskın
fazlardır. TiVN filmler ile karşılaştırıldığında, daha yüksek film kalınlığına ve
%N içeriğine, daha baskın (111) oryantasyonuna ve daha düşük tane boyutuna sahip
TiNbN filmler daha yüksek sertlik ve daha iyi adezyon sergilemiştir. TiVN ve
TiNbN filmler Inconel 600 taban malzemenin aşınma direncini önemli ölçüde
artırmıştır. TiVN filmlerle kıyaslandığında, daha yüksek sertlik ve daha iyi adezyona
sahip TiNbN filmler daha düşük sürtünme katsayısı ve daha düşük aşınma oranı
ile taban malzemenin tribolojik özelliklerini önemli ölçüde iyileştirmiştir.

Anahtar Kelimeler

Adezyon, Aşınma, Inconel 600, TiNbN, TiVN

Kaynakça

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