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Production of high-transparent MgO films by radio-frequency sputtering method

Yıl 2022, Cilt: 12 Sayı: 1, 320 - 326, 15.01.2022

Fatih Şenaslan , Ayhan Çelik , Muharrem Taşdemir

https://doi.org/10.17714/gumusfenbil.1006430

Öz

Magnesium oxide (MgO) thin films were deposited on silicon and glass substrates by the radio frequency (RF) sputtering method. The MgO films were annealed at 400 ⁰C for 4h. The effect of working pressure on the structure and optical properties of MgO films was investigated. Structural characterization of thin films was determined using the X-ray diffraction (XRD) method. XRD results showed the presence of dominant peaks corresponding to the (200) and (220) lattice planes of MgO. However, peaks corresponding to (111), (311) and (222) lattice planes of the MgO also appeared in the films deposited at low pressure. It was determined that the average crystal size decreased as the working pressure reduced, while the deposition rate increased. SEM analysis showed that the microstructure of the nano-spherical MgO film transformed into a coarse-grained nano-pyramidal shape after annealing. The optical properties of MgO films were investigated by UV-Vis spectroscopy. Accordingly, it was determined that the absorption threshold of the films was around 310 nm wavelength and the optical band gap of the films varied between 4.07 and 4.14 eV. As a result, MgO films with high transmittance reaching an average of 95% in the visible region were obtained.

Anahtar Kelimeler

High-transparent films Magnesium oxide Optical properties RF sputtering

Proje Numarası

Proje Kodu: FDK-2019-7473

Kaynakça

  • Ahmed, K., Rabah, M., Khaled, M., Mohamed, B. & Mokhtar, M. (2016). Optical and structural properties of Mn doped MgO powders synthesized by Sol-gel process. Optik, 127(20), 8253-8258. https://doi.org/10.1016/j.ijleo.2016.06.055
  • Baba, S., Mori, I. & Nakano, T. (2000). Precise determination of the refractive index of sputtered MgO thin films in the visible light range. Vacuum, 59(2-3), 531-537. https://doi.org/10.1016/S0042-207X(00)00312-2
  • Bazhan, Z., Ghodsi, F. E. & Mazloom, J. (2013). Effect of stabilizer on optical and structural properties of MgO thin films prepared by sol–gel method. Bulletin of Materials Science, 36(5), 899-905. https://doi.org/10.1023/A:1008725521769
  • Boo, J. H., Lee, S. B., Yu, K. S., Koh, W. & Kim, Y. (1999). Growth of magnesium oxide thin films using single molecular precursors by metal–organic chemical vapor deposition. Thin Solid Films, 341(1-2), 63-67. https://doi.org/10.1016/S0040-6090(98)01524-7
  • Caceres, D., Colera, I., Vergara, I., Gonzalez, R. & Roman, E. (2002). Characterization of MgO thin films grown by rf-sputtering. Vacuum, 67(3-4), 577-581. https://doi.org/10.1016/S0042-207X(02)00251-8
  • Cho, J. M., Lee, K. H., Cheon, C. I., Cho, N. I. & Kim, J. S. (2010). Characterization of the biaxial textures of MgO thin films grown by E-beam evaporation. Journal of the European Ceramic Society, 30(2), 481-484. https://doi.org/10.1016/j.jeurceramsoc.2009.06.015
  • Chowdhury, A. & Kumar, J. (2006). Morphology, surface topography and optical studies on electron beam evaporated MgO thin films. Bulletin of Materials Science, 29(5), 513-521. https://doi.org/10.1007/BF02914083
  • Eun, J. H., Lee, J. H., Kim, S. G., Um, M. Y., Park, S. Y. & Kim, H. J. (2003). The protection of MgO film against hydration by using Al2O3 capping layer deposited by magnetron sputtering method. Thin Solid Films, 435(1-2), 199-204. https://doi.org/10.1016/S0040-6090(03)00362-6
  • Güney, H. & İskenderoğlu, D. (2018). Synthesis of MgO thin films grown by SILAR technique. Ceramics International, 44(7), 7788-7793. https://doi.org/10.1016/j.ceramint.2018.01.210 Ho, I. C., Xu, Y. & Mackenzie, J. D. (1997). Electrical and optical properties of MgO thin film prepared by sol-gel technique. Journal of Sol-Gel Science and Technology, 9(3), 295-301. https://doi.org/10.1007/BF02437193
  • Kim, E., Han, Y., Kim, W., Choi, K. C., Im, H. G. & Bae, B. S. (2013). Thin film encapsulation for organic light emitting diodes using a multi-barrier composed of MgO prepared by atomic layer deposition and hybrid materials. Organic Electronics, 14(7), 1737-1743. https://doi.org/10.1016/j.orgel.2013.04.011
  • Kim, S. G., Choi, K. H., Eun, J. H., Kim, H. J. & Hwang, C. S. (2000). Effects of additives on properties of MgO thin films by electrostatic spray deposition. Thin Solid Films, 377, 694-698. https://doi.org/10.1016/S0040-6090(00)01283-9
  • Lee, J. H., Eun, J. H., Park, S. Y., Kim, S. G. & Kim, H. J. (2003). Hydration of rf magnetron sputtered MgO thin films for a protective layer in AC plasma display panel. Thin Solid Films, 435(1-2), 95-101. https://doi.org/10.1016/S0040-6090(03)00411-5
  • Nam, K. H. & Han, J. G. (2003). Microstructure and optical properties of MgO films synthesized by closed-field unbalanced magnetron sputtering with additional electron emission. Surface and Coatings Technology, 171(1-3), 51-58. https://doi.org/10.1016/S0257-8972(03)00235-4
  • Patil, S. & Puri, V. (2011). Oxidation temperature dependent properties of MgO thin film on alumina. Applied surface science, 258(4), 1535-1540. https://doi.org/10.1016/j.apsusc.2011.09.126
  • Płóciennik, P., Guichaoua, D., Zawadzka, A., Korcala, A., Strzelecki, J., Trzaska, P. & Sahraoui, B. (2016). Optical properties of MgO thin films grown by laser ablation technique. Optical and Quantum Electronics, 48(5), 277. https://doi.org/10.1007/s11082-016-0536-8
  • Şenaslan, F., Taşdemir, M. & Çelik, A. (2021). Effect of working pressure and post-annealing on structural, optical and electrical properties of p-type NiO thin films produced by RF magnetron sputtering technique. Applied Physics A, 127(10), 1-9. https://doi.org/10.1007/s00339-021-04901-2
  • Taşer, A., Güldüren, M. E. & Güney, H. (2021). Cr Dopant Effect on MgO Thin Film Structural, Optical and Morphology Properties. Erzincan Üniversitesi Fen Bilimleri Enstitüsü Dergisi, 14(1), 284-291. https://doi.org/10.18185/erzifbed.788589
  • Visweswaran, S., Venkatachalapathy, R., Haris, M. & Murugesan, R. (2020). Characterization of MgO thin film prepared by spray pyrolysis technique using perfume atomizer. Journal of Materials Science: Materials in Electronics, 31(17), 14838-14850. https://doi.org/10.1007/s10854-020-04046-7

Yüksek geçirgen MgO filmlerin radyo frekansı saçtırma yöntemiyle üretimi

Yıl 2022, Cilt: 12 Sayı: 1, 320 - 326, 15.01.2022

Fatih Şenaslan , Ayhan Çelik , Muharrem Taşdemir

https://doi.org/10.17714/gumusfenbil.1006430

Öz

Magnezyum oksit (MgO) ince filmler, radyo frekansı (RF) saçtırma yöntemiyle silikon ve cam altlıklar üzerine biriktirildi. MgO filmler 400 ⁰C'de 4 saat tavlandı. MgO filmlerin yapı ve optik özellikleri üzerine çalışma basıncının etkisi araştırıldı. İnce filmlerin yapısal karakterizasyonu, X-ışını kırınımı (XRD) yöntemi kullanılarak belirlendi. XRD sonuçları, MgO'in (200) ve (220) kafes düzlemlerine karşılık gelen baskın tepe noktalarının varlığını gösterdi. Bununla birlikte, düşük basınçta biriktirilen filmlerde MgO’in (111), (311) ve (222) kafes düzlemlerine karşılık gelen pikler de ortaya çıktı. Çalışma basıncı azaldıkça ortalama kristal boyutunun azaldığı, biriktirme hızının ise arttığı belirlendi. SEM analizi, MgO filminin nano-küresel mikroyapısının, tavlamadan sonra iri taneli bir nano-piramidal şekle dönüştüğünü gösterdi. MgO filmlerinin optik özellikleri Ultraviyole-Görünür spektroskopisi ile incelendi. Buna göre filmlerin absorpsiyon eşiğinin 310 nm dalga boyu civarında olduğu ve filmlerin optik bant aralığının 4,07 ile 4,14 eV arasında değiştiği belirlendi. Sonuç olarak görünür bölgede ortalama %95'e ulaşan yüksek geçirgenliğe sahip MgO filmler elde edilmiştir.

Anahtar Kelimeler

Yüksek-geçirgen filmler Magnezyum oksit Optik özellikler RF saçtırma

Destekleyen Kurum

Bu çalışma Atatürk Üniversitesi Bilimsel Araştırma Projeleri Koordinatörlüğü tarafından finansal olarak desteklenmiştir (Proje Kodu: FDK-2019-7473) Erzurum/Türkiye

Proje Numarası

Proje Kodu: FDK-2019-7473

Teşekkür

Bu makalenin ilk versiyonu, 05-07 Temmuz 2021 tarihlerinde Gümüşhane, TÜRKİYE'de düzenlenen Uluslararası Mühendislik ve Doğa Bilimleri Konferansları (IOCENS'21) bildirilerinde sunulmuştur. Bu çalışma Atatürk Üniversitesi Bilimsel Araştırma Projeleri Koordinatörlüğü (Proje Kodu: FDK-2019-7473) tarafından finansal olarak desteklenmiştir. Deneysel çalışmalar Doğu Anadolu Yüksek Teknoloji Uygulama ve Araştırma Merkezi (DAYTAM), Erzurum/TÜRKİYE bünyesinde gerçekleştirilmiştir.

Kaynakça

  • Ahmed, K., Rabah, M., Khaled, M., Mohamed, B. & Mokhtar, M. (2016). Optical and structural properties of Mn doped MgO powders synthesized by Sol-gel process. Optik, 127(20), 8253-8258. https://doi.org/10.1016/j.ijleo.2016.06.055
  • Baba, S., Mori, I. & Nakano, T. (2000). Precise determination of the refractive index of sputtered MgO thin films in the visible light range. Vacuum, 59(2-3), 531-537. https://doi.org/10.1016/S0042-207X(00)00312-2
  • Bazhan, Z., Ghodsi, F. E. & Mazloom, J. (2013). Effect of stabilizer on optical and structural properties of MgO thin films prepared by sol–gel method. Bulletin of Materials Science, 36(5), 899-905. https://doi.org/10.1023/A:1008725521769
  • Boo, J. H., Lee, S. B., Yu, K. S., Koh, W. & Kim, Y. (1999). Growth of magnesium oxide thin films using single molecular precursors by metal–organic chemical vapor deposition. Thin Solid Films, 341(1-2), 63-67. https://doi.org/10.1016/S0040-6090(98)01524-7
  • Caceres, D., Colera, I., Vergara, I., Gonzalez, R. & Roman, E. (2002). Characterization of MgO thin films grown by rf-sputtering. Vacuum, 67(3-4), 577-581. https://doi.org/10.1016/S0042-207X(02)00251-8
  • Cho, J. M., Lee, K. H., Cheon, C. I., Cho, N. I. & Kim, J. S. (2010). Characterization of the biaxial textures of MgO thin films grown by E-beam evaporation. Journal of the European Ceramic Society, 30(2), 481-484. https://doi.org/10.1016/j.jeurceramsoc.2009.06.015
  • Chowdhury, A. & Kumar, J. (2006). Morphology, surface topography and optical studies on electron beam evaporated MgO thin films. Bulletin of Materials Science, 29(5), 513-521. https://doi.org/10.1007/BF02914083
  • Eun, J. H., Lee, J. H., Kim, S. G., Um, M. Y., Park, S. Y. & Kim, H. J. (2003). The protection of MgO film against hydration by using Al2O3 capping layer deposited by magnetron sputtering method. Thin Solid Films, 435(1-2), 199-204. https://doi.org/10.1016/S0040-6090(03)00362-6
  • Güney, H. & İskenderoğlu, D. (2018). Synthesis of MgO thin films grown by SILAR technique. Ceramics International, 44(7), 7788-7793. https://doi.org/10.1016/j.ceramint.2018.01.210 Ho, I. C., Xu, Y. & Mackenzie, J. D. (1997). Electrical and optical properties of MgO thin film prepared by sol-gel technique. Journal of Sol-Gel Science and Technology, 9(3), 295-301. https://doi.org/10.1007/BF02437193
  • Kim, E., Han, Y., Kim, W., Choi, K. C., Im, H. G. & Bae, B. S. (2013). Thin film encapsulation for organic light emitting diodes using a multi-barrier composed of MgO prepared by atomic layer deposition and hybrid materials. Organic Electronics, 14(7), 1737-1743. https://doi.org/10.1016/j.orgel.2013.04.011
  • Kim, S. G., Choi, K. H., Eun, J. H., Kim, H. J. & Hwang, C. S. (2000). Effects of additives on properties of MgO thin films by electrostatic spray deposition. Thin Solid Films, 377, 694-698. https://doi.org/10.1016/S0040-6090(00)01283-9
  • Lee, J. H., Eun, J. H., Park, S. Y., Kim, S. G. & Kim, H. J. (2003). Hydration of rf magnetron sputtered MgO thin films for a protective layer in AC plasma display panel. Thin Solid Films, 435(1-2), 95-101. https://doi.org/10.1016/S0040-6090(03)00411-5
  • Nam, K. H. & Han, J. G. (2003). Microstructure and optical properties of MgO films synthesized by closed-field unbalanced magnetron sputtering with additional electron emission. Surface and Coatings Technology, 171(1-3), 51-58. https://doi.org/10.1016/S0257-8972(03)00235-4
  • Patil, S. & Puri, V. (2011). Oxidation temperature dependent properties of MgO thin film on alumina. Applied surface science, 258(4), 1535-1540. https://doi.org/10.1016/j.apsusc.2011.09.126
  • Płóciennik, P., Guichaoua, D., Zawadzka, A., Korcala, A., Strzelecki, J., Trzaska, P. & Sahraoui, B. (2016). Optical properties of MgO thin films grown by laser ablation technique. Optical and Quantum Electronics, 48(5), 277. https://doi.org/10.1007/s11082-016-0536-8
  • Şenaslan, F., Taşdemir, M. & Çelik, A. (2021). Effect of working pressure and post-annealing on structural, optical and electrical properties of p-type NiO thin films produced by RF magnetron sputtering technique. Applied Physics A, 127(10), 1-9. https://doi.org/10.1007/s00339-021-04901-2
  • Taşer, A., Güldüren, M. E. & Güney, H. (2021). Cr Dopant Effect on MgO Thin Film Structural, Optical and Morphology Properties. Erzincan Üniversitesi Fen Bilimleri Enstitüsü Dergisi, 14(1), 284-291. https://doi.org/10.18185/erzifbed.788589
  • Visweswaran, S., Venkatachalapathy, R., Haris, M. & Murugesan, R. (2020). Characterization of MgO thin film prepared by spray pyrolysis technique using perfume atomizer. Journal of Materials Science: Materials in Electronics, 31(17), 14838-14850. https://doi.org/10.1007/s10854-020-04046-7
Toplam 18 adet kaynakça vardır.

Ayrıntılar

Birincil Dil İngilizce
Konular Mühendislik
Bölüm Makaleler
Yazarlar

Fatih Şenaslan 0000-0003-0498-6332

Ayhan Çelik 0000-0002-8096-0794

Muharrem Taşdemir 0000-0003-3291-108X

Proje Numarası Proje Kodu: FDK-2019-7473
Yayımlanma Tarihi 15 Ocak 2022
Gönderilme Tarihi 8 Ekim 2021
Kabul Tarihi 1 Ocak 2022
Yayımlandığı Sayı Yıl 2022 Cilt: 12 Sayı: 1

Kaynak Göster

APA Şenaslan, F., Çelik, A., & Taşdemir, M. (2022). Production of high-transparent MgO films by radio-frequency sputtering method. Gümüşhane Üniversitesi Fen Bilimleri Dergisi, 12(1), 320-326. https://doi.org/10.17714/gumusfenbil.1006430
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