MEMS FABRICATION USING PµSL TECHNIQUE BASED 3D PRINTER

Yıl 2020, Cilt: 4 Sayı: 1, 38 - 43, 30.04.2020

İshak Ertugrul , Nihat Akkuş , Ebuzer Aygül , Senai Yalcinkaya , Hüseyin Metin Ertunç

Öz

This study aims to fabricate Electro-Thermal Micro Actuator based on Micro Electro Mechanical System (MEMS) with a 3D printer using Projection Micro Stereo Lithography (PµSL) technique. The production of the actuator produced by traditional MEMS fabrication methods with a 3D printer has been carried out in this study. The cost of traditional MEMS fabrication methods is high and there are many techniques to achieve the process. On the other hand, some methods have been developed to obtain better quality and low-cost production as a parallel to the development of technology. One of these methods is to use 3D printers employing the PµSL technique. By means of these printers, it is possible to reduce both the cost and workload of the production process the MEMS systems. In this study, it is investigated and stated that Nano level fabrication would be possible with 3D printers in the following years. It can also be predicted that traditional MEMS production methods will be replaced by 3D printers soon.

Anahtar Kelimeler

3dprinting, MEMS, Fabrication, PmSL

Kaynakça

• 1. Özsoy, K. Üç Boyutlu (3B) Yazıcı Teknolojisinin Eğitimde Uygulanabilirliği: Senirkent MYO Örneği. Düzce Üniversitesi Bilim ve Teknoloji Dergisi, Volume 7, Issue 2, Pages 111-123, 2019.
• 2. Lapeyre, M., Rouanet, P., Grizou, J., Nguyen, S., Depraetre, F., Le Falher, A., & Oudeyer, P. Y. (2014, September). Poppy project: open-source fabrication of 3D printed humanoid robot for science, education and art.
• 3. Özsoy K. , Kayacan M. C., Ergiyik Biriktirme Yöntemiyle Hafifletilmiş Kişiye Özel Kafatası İmplantın Hızlı Prototiplenmesi”, Uluborlu Mesleki Bilim. Derg., cilt. 1, sayı 1, ss. 1-11, Ara. 2018.
• 4. Kayacan, M. C., Delikanlı, Y. E., Duman, B., & Özsoy, K. Ti6Al4v toz alaşımı kullanılarak SLS ile üretilen geçişli (değişken) gözenekli numunelerin mekanik özelliklerinin incelenmesi. Gazi Üniversitesi Mühendislik-Mimarlık Fakültesi Dergisi, Vol. 33, Sayı 1, Sayfa 127-143,2018.
• 5. Kayacan, M. Y., Özsoy, K., Duman, B., Yilmaz, N., & Kayacan, M. C. A study on elimination of failures resulting from layering and internal stresses in Powder Bed Fusion (PBF) additive manufacturing. Materials and Manufacturing Processes, Vol 34, Issue 13, Pages 1467-1475,2019.
• 6. Fox, J. C., Moylan, S. P., & Lane, B. M. (2016). Effect of process parameters on the surface roughness of overhanging structures in laser powder bed fusion additive manufacturing. Procedia Cirp, 45, 131-134.
• 7. Hossain, M. S., Gonzalez, J. A., Hernandez, R. M., Shuvo, M. A. I., Mireles, J., Choudhuri, A., ... & Wicker, R. B. (2016). Fabrication of smart parts using powder bed fusion additive manufacturing technology. Additive Manufacturing, 10, 58-66.
• 8. Fang, Nicholas. "Projection Microstereolithography". Department of Mechanical Science & Engineering, University of Illinois. April 2015
• 9. Sun, C., et al. "Projection micro-stereolithography using digital micro-mirror dynamic mask." Sensors and Actuators A: Physical121.1 Pages 113-120, 2005.
• 10. Limaye, A. S., and David W. Rosen. "Process planning method for mask projection micro-stereolithography." Rapid Prototyping Journal Vol.13 Issue 2 , Pages 76-84,2007.
• 11. Zheng, Xiaoyu, et al. "Design and optimization of a light-emitting diode projection micro-stereolithography three-dimensional manufacturing system." Review of Scientific Instruments Vol. 83, Issue 12, 125001, 2012.
• 12. Skoog, Shelby A., Peter L. Goering, and Roger J. Narayan. "Stereolithography in tissue engineering." Journal of Materials Science: Materials in Medicine Vol. 25, Issue 3, Pages 845-856, 2014.
• 13. Han, Li-Hsin, et al. "Projection microfabrication of three-dimensional scaffolds for tissue engineering." Journal of Manufacturing Science and Engineering 130.2 (2008): 021005.
• 14. Choi, Jae-Won, et al. "Cure depth control for complex 3D microstructure fabrication in dynamic mask projection micro stereolithography." Rapid Prototyping Journal Vol. 15. Issue 1 (2009): 59-70.
• 15. Ülkir, O , Ertugrul, İ . (2020). Mikro Kiriş Uzunluğu Değişiminin Deformasyona Etkisinin Araştırılması. Avrupa Bilim ve Teknoloji Dergisi , (18) , 136-141. DOI: 10.31590/ejosat.672464
• 16. Ertugrul, İ , Ülkir, O . (2020). MEMS Tabanlı Mikro Rezonatörün Tasarımı ve Analizi. Avrupa Bilim ve Teknoloji Dergisi , (18) , 25-29 . DOI: 10.31590/ejosat.676368
• 17. Rogers, Chad I., et al. "3D printed microfluidic devices with integrated valves." Biomicrofluidics Vol. 9. Issue 1 016501. 2015.
• 18. Lee, Michael P., et al. "Development of a 3D printer using scanning projection stereolithography." Scientific Reports 5, 9875, 2015.
• 19. Ertugrul, N. Akkus, H. Yuce, Fabrication of bidirectional electrothermal microactuator by two-photon polymerization. Materials and Technology. Vol. 53 Issue 5, Pages 665-670,2019.
• 20. Fang, Nicholas. "Projection Microstereolithography". Department of Mechanical Science & Engineering, University of Illinois. April 2015
• 21. Nanophotonics, http://web.mit.edu/nanophotonics/projects/pusl.htm , 29 Aralık, 2019
• 22. Baker, Evan, et al. "Microstereolithography of three-dimensional polymeric springs for vibration energy harvesting." Smart Materials Research , 2012 (2012).
• 23. BMFTEC, http://bmftec.com/, 29 Aralık, 2019