MEMS FABRICATION USING 2PP TECHNIQUE BASED 3D PRINTER

Yıl 2020, Cilt: 4 Sayı: 1, 12 - 17, 30.04.2020

İshak Ertugrul , Nihat Akkuş , Ebuzer Aygül , Senai Yalcinkaya

Öz

 This study aims to fabricate Electro-Thermal Micro Actuator with a support structure by using the Two-Photon Polymerization (2PP) technique based 3D printer. This study was carried out with the 3D printer which is possible to fabricate the actuator which can be fabricated by the traditional Micro Electro Mechanical System (MEMS) methods. Due to the high cost of traditional MEMS methods, difficult and excessive processing, many studies have been carried out for new fabrication methods. 2PP is the most widely used and developed method of production. With this method, direct fabrication up to nano level is possible. Also, many chemical processes used in traditional methods will not be applied using 2PP based 3D printers. The design of the bi-directional movable Electro-Thermal Micro Actuator is carried out in this study. Supporting structures with a diameter of 2 microns allow the Actuator to be fabricated without breakage. 2PP method of the 2-micron length of the very easy and low-cost production was seen in this study. Thanks to this method, traditional MEMS production methods will be replaced by 3D printers in the following years.

Anahtar Kelimeler

3dprinting, MEMS, Fabrication, 2PP

MEMS FABRICATION USING 2PP TECHNIQUE BASED 3D PRINTER

Öz

 This study aims to fabricate Electro-Thermal Micro Actuator with a support structure by using the Two-Photon Polymerization (2PP) technique based 3D printer. This study was carried out with the 3D printer which is possible to fabricate the actuator which can be fabricated by the traditional Micro Electro Mechanical System (MEMS) methods. Due to the high cost of traditional MEMS methods, difficult and excessive processing, many studies have been carried out for new fabrication methods. 2PP is the most widely used and developed method of production. With this method, direct fabrication up to nano level is possible. Also, many chemical processes used in traditional methods will not be applied using 2PP based 3D printers.
The design of the bi-directional movable Electro-Thermal Micro Actuator is carried out in this study. Supporting structures with a diameter of 2 microns allow the Actuator to be fabricated without breakage. 2PP method of the 2-micron length of the very easy and low-cost production was seen in this study. Thanks to this method, traditional MEMS production methods will be replaced by 3D printers in the following years.

Anahtar Kelimeler

3D Printing, MEMS, Fabrication, 2PP

Kaynakça

• 1. Kayacan, M. Y., Özsoy, K., Duman, B., Yilmaz, N., & Kayacan, M. C. A study on elimination of failures resulting from layering and internal stresses in Powder Bed Fusion (PBF) additive manufacturing. Materials and Manufacturing Processes, Vol 34, Issue 13, Pages 1467-1475,2019.
• 2. King, W. E., Barth, H. D., Castillo, V. M., Gallegos, G. F., Gibbs, J. W., Hahn, D. E., ... & Rubenchik, A. M. (2014). Observation of keyhole-mode laser melting in laser powder-bed fusion additive manufacturing. Journal of Materials Processing Technology, 214(12), 2915-2925.
• 3. Kayacan, M. C., Delikanlı, Y. E., Duman, B., & Özsoy, K. Ti6Al4v toz alaşımı kullanılarak SLS ile üretilen geçişli (değişken) gözenekli numunelerin mekanik özelliklerinin incelenmesi. Gazi Üniversitesi Mühendislik-Mimarlık Fakültesi Dergisi, Vol. 33, Sayı 1, Sayfa 127-143,2018.
• 4. Ibrahim, D., Broilo, T. L., Heitz, C., de Oliveira, M. G., de Oliveira, H. W., Nobre, S. M. W., ... & Silva, D. N. (2009). Dimensional error of selective laser sintering, three-dimensional printing and PolyJet™ models in the reproduction of mandibular anatomy. Journal of Cranio-Maxillofacial Surgery, 37(3), 167-173.
• 5. Özsoy K. , Kayacan M. C., Ergiyik Biriktirme Yöntemiyle Hafifletilmiş Kişiye Özel Kafatası İmplantın Hızlı Prototiplenmesi”, Uluborlu Mesleki Bilim. Derg., cilt. 1, sayı 1, ss. 1-11, Ara. 2018.
• 6. Özsoy, K. Üç Boyutlu (3B) Yazıcı Teknolojisinin Eğitimde Uygulanabilirliği: Senirkent MYO Örneği. Düzce Üniversitesi Bilim ve Teknoloji Dergisi, Volume 7, Issue 2, Pages 111-123, 2019.
• 7. Canessa, E., Fonda, C., Zennaro, M., & Deadline, N. (2013). Low-‐cost 3D printing for science, education and sustainable development. Low-Cost 3D Printing, 11.
• 8. Narayan, R. J., Doraiswamy, A., Chrisey, D. B., and Chichkov, B. N.: Medical prototyping using two photon polymerization. Materials Today, Vol. 13, Issue 12, Pages 42-48, 2010.
• 9. Photon Polymerization, https://www.toptica.com/applications/ultrafast-studies/2-photon-polymerization/, Mart 20, 2019.
• 10. Brunner, Robert, et al. "Method, apparatus and optical interconnect manufactured by 3D printing." U.S. Patent No. 9,052,481. 9 Jun. 2015.
• 11. Harnisch, E., et al. "Replicated micro structures based on two-photon lithography." Laser+ Photonics (2016): 2016.
• 12. Lissandrello, Charles A., et al. "A micro-scale printable nanoclip for electrical stimulation and recording in small nerves." Journal of neural engineering 14.3, 036006. 2017.
• 13. Qin, Xiao‐Hua, et al. "Near‐Infrared Light‐Sensitive Polyvinyl Alcohol Hydrogel Photoresist for Spatiotemporal Control of Cell‐Instructive 3D Microenvironments." Advanced Materials 30.10,1705564, 2018.
• 14. Worthington, Kristan S., et al. "Two-photon polymerization for production of human iPSC-derived retinal cell grafts." Acta biomaterialia Vol. 55, 385-395, 2017.
• 15. Lee, W. C., Y. J. Heo, and S. Takeuchi. "Wall-less liquid pathways formed with three-dimensional microring arrays." Applied Physics Letters 101.11, 114108, 2012.
• 16. Zeeshan, Muhammad A., et al. "Hybrid helical magnetic microrobots obtained by 3D template‐assisted electrodeposition." Small 10.7 (2014): 1284-1288.
• 17. Wu, Shuhui, Jesper Serbin, and Min Gu. "Two-photon polymerisation for three-dimensional micro-fabrication." Journal of Photochemistry and Photobiology A: Chemistry,Pages 1-11. 2006
• 18. Ovsianikov, Aleksandr, and Boris N. Chichkov. "Two-Photon Polymerization–High Resolution 3D Laser Technology and Its Applications." Nanoelectronics and Photonics. Springer, New York, NY,Pages 427-446, 2008.
• 19. Two Photon Polymerization, http://asdn.net/asdn/nanotools/two-photon_polymerization.php, Mart 20, 2019.
• 20. Ülkir, O , Ertugrul, İ . (2020). Mikro Kiriş Uzunluğu Değişiminin Deformasyona Etkisinin Araştırılması. Avrupa Bilim ve Teknoloji Dergisi , (18) , 136-141. DOI: 10.31590/ejosat.672464
• 21. M. Straub, M. Gu, Opt. Lett. 27 (2002) 1824.
• 22. Ertugrul, N. Akkus, H. Yuce, Fabrication of bidirectional electrothermal microactuator by two-photon polymerization. Materials and Technology. Vol. 53, Issue 5, Pages 665-670, 2019.
• 23. Ertugrul, İ , Ülkir, O . (2020). MEMS Tabanlı Mikro Rezonatörün Tasarımı ve Analizi. Avrupa Bilim ve Teknoloji Dergisi , (18) , 25-29 . DOI: 10.31590/ejosat.676368
• 24. Microlight, http://www.microlight.fr/master.html, Mart 20, 2019.