Yıl 2008,
Cilt: 8 Sayı: 2, 733 - 738, 02.01.2012
Öz
Kaynakça
- Oana Y, Kotake H, Mukai N, and Ide K: Eectrical properties of polycrystalline silicon Mosfet’s on glass. J Appl Phys, 22, 493, (1983)
- T.I.Kamins: Hall mobility in chemically deposited polycrystalline silicon, J.Appl Phys.42, 4357, (1971)
- N.C.C.Lu, L.Gerzberg, J.D.Meindl, The effect of film thickness on the electrical properties of LPCVD polysilicon films. J Electrochem Soc. 131, 897, (1984)
- L.Mei, M.River, Y.K.Wark, R.W.Dutton, Grain growth mechanisms in polysilicon, J Electrochem Soc. 129, 1791, (1982)
- Y.Bourezig, H.Sehil, B.Zebentout, Z.Benamara, F.Raoult, O.Bonnaud, Solid State Phenomena 80-81 (2001)
- T.I.Kamins,Solid State Electronics ,789(1972)
- Warner J, Peisl M: exponential band tails in polycrystalline semiconductor films. Phys Rev. 31 6881, (1985)
- Sze SM: Physics of semiconductor Devices. Wiley edition New York 1981
- Selberherr S: Analysis and Simulation of Semiconductor Devices. Springer Verlag- Wien 1984
- Levinson J, Shepherd FR, Scanlon PJ, Westwood WD, Este G, Rider M: Conductivity behavior in polycrystalline semiconductor thin film transistor. J Appl Phys. 53, 1193, (1982)
Yıl 2008,
Cilt: 8 Sayı: 2, 733 - 738, 02.01.2012
Öz
ANALYSIS OF THE RESISTIVITY IN POLYSILICON THIN FILM TRANSISTORS Study of film thickness effect
Anahtar Kelimeler
Thin–Film Transistor chemical vapour deposition electrostatic coupling modelling
Kaynakça
- Oana Y, Kotake H, Mukai N, and Ide K: Eectrical properties of polycrystalline silicon Mosfet’s on glass. J Appl Phys, 22, 493, (1983)
- T.I.Kamins: Hall mobility in chemically deposited polycrystalline silicon, J.Appl Phys.42, 4357, (1971)
- N.C.C.Lu, L.Gerzberg, J.D.Meindl, The effect of film thickness on the electrical properties of LPCVD polysilicon films. J Electrochem Soc. 131, 897, (1984)
- L.Mei, M.River, Y.K.Wark, R.W.Dutton, Grain growth mechanisms in polysilicon, J Electrochem Soc. 129, 1791, (1982)
- Y.Bourezig, H.Sehil, B.Zebentout, Z.Benamara, F.Raoult, O.Bonnaud, Solid State Phenomena 80-81 (2001)
- T.I.Kamins,Solid State Electronics ,789(1972)
- Warner J, Peisl M: exponential band tails in polycrystalline semiconductor films. Phys Rev. 31 6881, (1985)
- Sze SM: Physics of semiconductor Devices. Wiley edition New York 1981
- Selberherr S: Analysis and Simulation of Semiconductor Devices. Springer Verlag- Wien 1984
- Levinson J, Shepherd FR, Scanlon PJ, Westwood WD, Este G, Rider M: Conductivity behavior in polycrystalline semiconductor thin film transistor. J Appl Phys. 53, 1193, (1982)
Toplam 10 adet kaynakça vardır.
Ayrıntılar
| Birincil Dil | İngilizce |
|---|---|
| Bölüm | Makaleler |
| Yazarlar | |
| Yayımlanma Tarihi | 2 Ocak 2012 |
| Yayımlandığı Sayı | Yıl 2008 Cilt: 8 Sayı: 2 |
