ATOMİK KATMAN BİRİKTİRME (ALD) CİHAZLARI VE ÇEŞİTLERİNDEKİ GELİŞMELER

Öz

Malzemelerin yüzey özelliklerinin değiştirilmesi ile elde edilen ürünlere kendi özelliklerinin yanında farklı işlevsellikler kazandırılabilmektedir. Yüzey teknolojilerindeki gelişmeler yeni ürünlerin eldesini ve üretim süreçlerinin gelişmesini de sağlamaktadır. ALD yöntemi çok farklı uygulama alanlarında başarı ile uygulanma potansiyeline sahiptir. Global ALD endüstrisi market araştırmaları 2017-2025 yılları arasında yıllık %12’lik büyüme öngörmektedir. Bu makalede ince film biriktirme tekniklerinden biri olan atomik katman biriktirme (ALD) yönteminde kullanılan cihazların tarihsel gelişimi ve gelişen ALD çeşitleri incelenmiştir. Çalışma genel ALD çeşitlerinin yanında doğrudan yazmalı (Direct write) ve rulodan ruloya (Roll to roll) gibi yeni ALD çeşitleri hakkında bilgi vermektedir. 

Anahtar Kelimeler

• İnce film kaplama,Atomik katman biriktirme (ALD),Reaktör,Akışkan yatak (AY)

IMPROVEMENTS OF ATOMIC LAYER DEPOSITION (ALD) DEVICES AND TYPES

Öz

The products obtained by changing the surface properties of the materials can be given different functionalities besides their own properties. Developments in surface technologies also provide the development of obtain new products and manufacturing processes. The ALD method has the potential to be successfully applied in many different application areas. The global market research on the atomic layer deposition industry estimated to annual growth of 12% from 2017 to 2025. In this paper the historical developments of devices and types used in the application of ALD method which is a types of thin film coating technique were investigated. It gives information about new ALD types like direct write and roll to roll ALD as well as general ALD approaches. 

Anahtar Kelimeler

• Thin film coating,Atomic layer deposition (ALD),Reactor,Fluidized bed (FB),Powder particles

Kaynakça

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