Gold/palladium (Au/Pd) Bimetallic Thin Film Deposition by Radio Frequency Magnetron Sputtering Technique

Yıl 2019, Cilt: 9 Sayı: 3, 1377 - 1384, 01.09.2019

Volkan Şenay

https://doi.org/10.21597/jist.513363

Öz

In this study, two gold/palladium (Au/Pd) thin films having 20 nm and 80 nm thickness values were simultaneously deposited on glass substrates by adjusting target-substrate distance via radio frequency (RF) magnetron sputtering technique. The optical and surface properties of the produced thin films were investigated by using UV-VIS spectrophotometer, interferometer, tensiometer and atomic force microscope. The effects of film thickness on the investigated properties of the thin films were reported.

Anahtar Kelimeler

Bimetallic thin films, optical properties, surface properties, low surface free energy

Radyo Frekans Magnetron Sıçratma Tekniği ile Altın/Paladyum (Au/Pd) Bimetalik İnce Film Biriktirme

Öz

Bu çalışmada, 20 nm ve 80 nm kalınlığa sahip iki adet altın/paladyum (Au/Pd) ince film, eş zamanlı olarak radyo frekans (RF) magnetron sıçratma tekniği ile hedef-alttaş mesafesinin ayarlanmasıyla cam alttaşlar üzerinde biriktirilmiştir. Üretilen ince filmlerin optik ve yüzey özellikleri UV-VIS spektrofotometre, interferometre, tansiyometre ve atomik kuvvet mikroskobu kullanılarak incelenmiştir. Film kalınlığının, ince filmlerin incelenen özellikleri üzerindeki etkileri rapor edilmektedir.

Anahtar Kelimeler

Bimetalik ince filmler, optik özellikler, yüzey özellikleri, düşük serbest yüzey enerjisi

Kaynakça

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