Farklı altlık sıcaklıklarında sprey piroliz yöntemiyle üretilen SnO2:Sb:F ince filmlerin yapısal ve morfolojik özellikleri

Öz

Düşük çözelti konsantrasyonlu ve düşük Sb dopingli çifte (antimon ve flüor) katkılı kalay oksit (SnO₂:Sb:F/AFTO) ince filmler, farklı altlık sıcaklıklarında sprey piroliz tekniği kullanılarak cam altlık üzerinde biriktirildi. Altlık sıcaklığının hazırlanan filmlerin özellikleri üzerindeki etkisi araştırılmıştır. X-ışını difraksiyon analizinde, ince filmlerin, tüm substrat sıcaklığı için (101), (200) ve (210) yönleri boyunca yönelimli ve polikristal tetragonal bir yapı olduğu görülmüştür. SEM ve AFM görüntüleri, ince filmlerin altlık sıcaklığından etkilendiğini, film yüzeylerinin homojen olduğunu ve nanokristallerden yapıldığını gösterdi. Filmler % 83 ortalama geçirgenlik değerlerine sahiptir ve E_g değerleri 3.10-3.89 eV arasındadır. Bu E_g ve geçirgenlik değerleri altlık sıcaklıkları ile sürekli değişmiştir. Bu yüzden ince film özelliklerinin substrat sıcaklığından etkilendiği ve bu sonuçların çoğunlukla literatürden elde edilen sonuçlarla uyumlu olduğu sonucuna varıldı.

Anahtar Kelimeler

• Sprey piroliz,İnce filmler,Elektriksel Özellikler,Antimon ve Flor katkılı kalay oksit (SnO2: Sb: F),PL çalışmaları

Structural and morphological properties of SnO2:Sb:F thin films produced by spray pyrolysis technique at various substrate temperatures

Öz

Doubly (antimony and fluorine) doped tin oxide (SnO₂:Sb:F/AFTO) thin films with low solution concentration and low Sb doping were deposited on the glass by using spray pyrolysis technique at different substrate temperatures. The effect of substrate temperature on properties of the prepared films was investigated. It was seen from X-ray diffraction analysis that the thin films are rutile structure with polycrystalline and orientations along (101), (200) and (210) directions for all substrate temperature. SEM and AFM images indicated that thin films were affected by substrate temperature and the surface of films was homogeneous and to be made of nanocrystalline. The films have 83% average transmittance values and E_g values are between 3.10-3.89 eV. These E_g and transmittance values changed continuously with substrate temperatures. Hence, it was concluded that properties of thin films were affected by the substrate temperature and these result mostly compatible with the results obtained from literature.

Anahtar Kelimeler

• Spray Pyrolysis,Thin films,Electrical Properties,PL,Antimony and Fluorine doped tin oxide (SnO2:Sb:F)

Kaynakça

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