Structural and morphological properties of SnO2:Sb:F thin films produced by spray pyrolysis technique at various substrate temperatures

Yıl 2019, Cilt: 7 Sayı: 2, 673 - 682, 26.12.2019

Ahmet Battal Bahattin Düzgün

https://doi.org/10.18586/msufbd.648108

Öz

Doubly
(antimony and fluorine) doped tin oxide (SnO₂:Sb:F/AFTO) thin films
with low solution concentration and low Sb doping were deposited on the glass
by using spray pyrolysis technique at different substrate temperatures. The effect
of substrate temperature on properties of the prepared films was investigated. It
was seen from X-ray diffraction analysis that the thin films are rutile
structure with polycrystalline and orientations along (101), (200) and (210)
directions for all substrate temperature. SEM and AFM images indicated that
thin films were affected by substrate temperature and the surface of films was
homogeneous and to be made of nanocrystalline. The films have 83% average
transmittance values and E_g values are between 3.10-3.89 eV. These E_g
and transmittance values changed continuously with substrate temperatures.
Hence, it was concluded that properties of thin films were affected by the
substrate temperature and these result mostly compatible with the results
obtained from literature.

Anahtar Kelimeler

Spray Pyrolysis, Thin films, Electrical Properties, PL, Antimony and Fluorine doped tin oxide (SnO2:Sb:F)

Destekleyen Kurum

Atatürk University Scientific Research Projects

Proje Numarası

2011/218

Teşekkür

The authors thank for support to The Council of Higher Education and Atatürk University Scientific Research Projects (2011/218) Centre Turkey. Also, OEM group, Durham University, UK for some supports.

Farklı altlık sıcaklıklarında sprey piroliz yöntemiyle üretilen SnO2:Sb:F ince filmlerin yapısal ve morfolojik özellikleri

Öz

Düşük çözelti konsantrasyonlu ve düşük Sb dopingli çifte
(antimon ve flüor) katkılı kalay oksit (SnO₂:Sb:F/AFTO) ince
filmler, farklı altlık sıcaklıklarında sprey piroliz tekniği kullanılarak cam
altlık üzerinde biriktirildi. Altlık sıcaklığının hazırlanan filmlerin
özellikleri üzerindeki etkisi araştırılmıştır. X-ışını difraksiyon analizinde,
ince filmlerin, tüm substrat sıcaklığı için (101), (200) ve (210) yönleri
boyunca yönelimli ve polikristal tetragonal bir yapı olduğu görülmüştür. SEM ve
AFM görüntüleri, ince filmlerin altlık sıcaklığından etkilendiğini, film yüzeylerinin
homojen olduğunu ve nanokristallerden yapıldığını gösterdi. Filmler % 83
ortalama geçirgenlik değerlerine sahiptir ve E_g değerleri 3.10-3.89
eV arasındadır. Bu E_g ve geçirgenlik değerleri altlık sıcaklıkları
ile sürekli değişmiştir. Bu yüzden ince film özelliklerinin substrat
sıcaklığından etkilendiği ve bu sonuçların çoğunlukla literatürden elde edilen
sonuçlarla uyumlu olduğu sonucuna varıldı.

Anahtar Kelimeler

Sprey piroliz, İnce filmler, Elektriksel Özellikler, Antimon ve Flor katkılı kalay oksit (SnO2: Sb: F), PL çalışmaları

Proje Numarası

2011/218

Kaynakça

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