Design of Vibrating Thin Film Coating System and Testing of Coated Surface

Öz

Surface thin film coating systems are used in many areas such as electronic sensors, semiconductor device production, spectacle lenses, observation telescopes. Many coating methods have been developed according to the thin film thickness quality and the type of surface applied. In the spin coating method, which has the lowest cost of the most used devices, the volatile organic solvent and the chemical compound solution to be coated are dripped onto the rotating surface to be coated at approximately (2000-3000 rpm) rotation at rpm. With the effect of evaporation and centrifugal force on the surface, a thin film layer forms on the surface. This method is low cost and is a known coating method that does not include vacuum systems and evaporation systems. When the speed of the motor under the rotating flat surface is adjusted, it also allows thin films of different thicknesses to be formed depending on the evaporation rate of the volatile organic component. In this research study, a vibratory surface coating system designed at an affordable price this device could be an alternative to the frequently used spin coating systems. Obtained thin film quality over the coated samples by the vibration evaporated coating system was compared to the spin-coated surfaces. The efficiency of this coating method was also evaluated by examining the coated surface with SEM and UV-Vis methods. It was also seen that the coated surface with the vibration system was homogeneous and uniform when examined with the data obtained.

Anahtar Kelimeler

• Vibration coating
• Spin coating
• Thin film
• Uv-Vis
• SEM

Titreşimli İnce Film Kaplama Sistemi Tasarımı ve Yüzey Kaplamasının Test Edilmesi

Öz

Yüzey ince filim kaplama sistemleri elektronik sensörler, yarıiletken cihazlar, gözlük camları, gözlem teleskoplarına kadar birçok alanda kullanılmaktadır. İnce film kalınlığı kalitesi ve uygulama yapılan yüzey çeşidine göre birçok kaplama yöntemi geliştirilmiştir. En fazla kullanılan cihaz maliyeti düşük olan spin kaplama yönteminde yaklaşık olarak(2000-3000 rpm) devirde dönen kaplanacak yüzey üzerine, uçucu organik çözücü ve kaplanacak olan kimyasal bileşik çözeltisi kaplanacak dönen yüzeyin üzerine damlatılır. Yüzeyde oluşan buharlaşma ve merkezkaç kuvvetin etkisi ile yüzeyde ince bir filim tabakası oluşmaktadır. Bu yöntem düşük maliyetlidir ve vakum sistemi ve buharlaştırma sistemleri içermeyen bir kaplama yöntemidir. Dönen düz yüzeyin altında bulunan motorun devir sayısı ayarlandığında uçucu organik bileşenin buharlaşma hızına bağlı olarak farklı kalınlıklarda ince filimlerin yüzeyde oluşturulabilmesine de olanak sağlamaktadır.Bu çalışmada sık kullanılan spin kaplama yöntemine alternatif olabilecek uygun fiyata tasarlanabilecek titreşimli yüzey kaplama sistemi üretilmiştir. Çözücü buharlaşması ile kaplanan örnekler üzerinden oluşan ince filim kalitesi spin kaplama ile karşılaştırılmıştır. Bu kaplama yöntemin verimliliği de kaplanan yüzey SEM ve UV-Vis yöntemleri ile incelenerek değerlendirilmiştir. Titreşim ile kaplamada kaplanan yüzeyin homojen ve düzgün yapıda olduğu da elde edilen veriler ile incelendiğinde görülmüştür.

Anahtar Kelimeler

• Titreşim kaplama
• Spin kaplama
• İnce filim
• Uv-Vis
• SEM

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