VACUUM PUMPS

Öz

Vacuum systems find technologically use fields in drying, cleaning, deposition, melting, packaging, casting and some microscopic systems. Vacuum pumps are the most important vacuum systems operating in accordance with the desired purpose. The vacuum pumps used in our country are usually the systems imported from abroad and have been addressed in terms of applications rather than modification and production. In this regard, it is almost no Turkish literature on the vacuum systems. In this study, a work is repaired on vacuum pumps and types, and applications to provide general information both to the students at the undergraduate level, to researchers working at both the graduate level and other scientists.

Anahtar Kelimeler

• Vacuum,vacuum pump,deposition

VAKUM POMPALARI

Öz

Vakum sistemleri, kurutma, temizleme, kaplama, eritme, paketleme, dökümde ve mikroskobik bazı sistemlerde teknolojik olarak önemli kullanım alanları bulmaktadır. Vakum pompaları, istenen amaca bağlı olarak çalışan en önemli vakumlama sistemleridir. Ülkemizde de kullanılan vakum pompaları, genellikle yurt dışından ithal edilen sistemler olup, geliştirme ve üretimden ziyade daha çok uygulama yönüyle muhatap alınmıştır. Bu bakımdan vakum sistemleri ile ilgili Türkçe literatür yok denecek kadar azdır. Bu çalışmada, hem lisans düzeyindeki öğrencilere, hem de lisansüstü düzeyde çalışma yapan araştırmacılara ve diğer bilim insanlarına genel bir bilgi sunmak üzere, vakum pompaları, türleri ve uygulama alanları ile ilgili bir çalışma hazırlanmıştır.

Anahtar Kelimeler

• Vakum, vakum pompası, kaplama

Kaynakça

1. Kurt J. Lesker Company, Vacum Pruducts Catalog, 24, Vacum Definitions, Technical Tables. http://www.fanclup.info/bilgiler/1510-vakum-nedir
2. Vacuum Technology, Know How, Pfeiffer Vacuum Company Catalog, Page 8. Oleg B. Malyshev, Introduction to Vacuum Systems for Particle Accelarators, ASTeC Vacuum Science Group, STFC Daresbury Laboratory, UK, 2013
3. Carlos Calvet, “Evidence for the Existence of 5 Real Spatial Dimensions in Quantum Vacuum - Scale of Quantum Temperatures Below Zero Kelvin”, Journal of Theoretics, Vol.3, No.1, Feb. 2001.
4. Oerlikon Leybold Vacuum, Fundamentals of Vacuum Technology, 00.200.02, Kat.-Nr. 199 , 2007.
5. Philip D. Rack, Vacuum Technology, Pumpdown and Vacuum Pumps, Department of Materials Science and Engineering, University of Tennessee, Lecturer Notes. KNF Lab Data Sheet E278, Vacuum Pumps for moist Gases. GAST Company Catalog, Rotary Vane Compressors and Vacuum Pumps. Tuthill Vacuum Systems, Kınney® Sıngle-Stage Rotary Pıston Vacuum Pumps, Instruction Manual 1817-1, 2001.
6. Elmorihetschle, Gardner Denver Product Catalog, R-Series Rotary Lobe. GD Storbilt, Positive Displacement Lobe Blowers/Vacuum Pumps. Product Catalog. Handbook of Vacuum Technology. Karl Jousten. John Wiley & Sons, Nov 24, 2008.
7. Varian Vacuum Products, VHS-10 & VHS-400 Diffusion Pumps, Data Sheet. Adixen, Alcatel Vacuum Technology, Molecular Drag Pumps, Product Sheet. Andrew D. Chew, Mechanical Pumps “Vacuum in Accelerators” CERN Accelerator School May 2006.
8. C. Day, Basics and applications of cryopumps, Forschungszentrum Karlsruhe, Institute of Technical Physics, 76344 Eggenstein-Leopoldshafen, Germany

9. Lou Bertolini, The US Particle Accelerator School Titanium Sublimation Pumps, Lawrence Livermore National Laboratory, June 10-14, 2002.
10. C. Benvenuti, Getter Pumps, R&B energy, C/O Cern-CH 1211, Geneve 23.
11. F. Le Pimpec, SLAC/NLC, Getters: From Light Bulbs to Accelerators, Jefferson Lab, June Phil Danielson, A Journal of From Practical and Useful Vacuum Technology, Vacuum Lab. Oerlikon Leybold Vacuum, Cryopumps, Cryogenics, 182.01.02, Excerpt from the Oerlikon Leybold Vacuum Full Line Catalog, Product Section C12.