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Growth and Characterization of TiO2 Thin Films by PLD Technique

Year 2021, Volume: 11 Issue: 1, 221 - 226, 01.03.2021
https://doi.org/10.21597/jist.796916

Abstract

In this work, the structural, optical and electronic properties of TiO2 thin films grown on glass substrate by Pulse Laser Deposition (PLD) technique are presented. The stoichiometry and the oxidation degree of films were analyzed by considering the Ti 2p and O 1s core energy levels with high resolution X-Ray Photoelectron spectroscopy (XPS). The structural characteristics of the thin films have been investigated by X-Ray Diffraction (XRD) and Scanning Electron Microscope (SEM) technique. The optical absorption region of growth TiO2 films were analyzed by Photoluminescence spectroscopy (PL) technique. Spin-orbit coupling splitting of Ti 2p states was measured as 5.7 eV. The characterizations promote the existence of the metal and oxygen vacancies at the surface of film. These point defects enhance the hysteretic transport properties of the TiO2 metal oxide.

References

  • Sittig CE, 1998. Charakterisierung der oxidschichten auf titan und titanlegierungen sowie deren reaktionen in kontact mit biologisch relevanten modellösungen. Dissertation ETH Nr. 12657, Zürich.
  • Bally A, 1999. Electronic properties of nano-crystalline titanium dioxide thin films. Dissertation ETH Nr. 2094, Zürich.
  • Pulker HK, Paesold G and Ritter E, 1976. Refractive indices of TiO2 films produced by reactive evaporationof various titanium–oxygen phases. Applied Optics 15, 2986-2991.
  • DeVore JR, 1951. Refractive Indices of Rutile and Sphalerite. Journal of the Optical Society of America.41, 416-419.
  • Gale E, 2014. TiO2-based memristors and ReRAM: materials, mechanisms and models (a review).Semiconductor Science and Technology. 29, 104004 (10pp).
  • Ding XZ, Liu XH and He YZ, 1996. Grain size dependence of anatase-to-rutile structural
  • transformation in gel-derived nanocrystalline titania powders. Journal of Materials Science Letters. 15, 1789–1791.
  • Jamieson J, Olinger B, 1969. Pressure-temperature studies of anatase, brookite rutile, and TiO2(II): A discussion. American Mineralogist. 54 (9-10): 1477–1481.
  • Gamboa JA, Pasquevich DM, 1992. Effect of chlorine atmosphere on the anatase‐rutile transformation. Journal of the American Ceramic Society. 75, 2934.
  • Pistorius CWFT, 1976. Phase relations and structures of solids at high pressures. Progress in Solid State Chemistry 11, Part 1, 1-151.
  • Smith SJ, Stevens R, Liu S, Li G, Navrotsky A, Boerio-Goates J, Woodfield BF, 2009. Heat capacities and thermodynamic functions of TiO2 anatase and rutile: Analysis of phase stability. American Mineralogist, 94, issue 2-3, pp. 236-243.
  • Ghosh TB, Dhabal S, Datta AK, 2003. On crystallite size dependence of phase stability of nanocrystalline TiO2. Journal of Applied Physics 94, 4577.
  • Murrray JL, Wriedy HA, 1987. The O−Ti (oxygen-titanium) system. Journal of Phase Equilibria 8, 148–165.
  • Pan X, Yang MQ, Fu X, Zhang N and Xu YJ, 2013. Defective TiO2 with oxygen vacancies: synthesis, properties and photocatalytic applications. Nanoscale 5, 3601.
  • Wu J, Cao J, Han W-Q, Janotti A, Kim H-C, 2012. Functional Metal Oxide Nanostructures, Electronic ISBN: 978-1-4419-9931-3.
  • Stukov DB, Snider GS, Stewart DR, Williams RS, 2008. The missing memristor found. Nature 80,453.
  • Sanjinés R, Tang H, Berger H, Gozzo F, Margaritondo G, and. Lévy F, 1994. Electronic structure of anatase TiO2 oxide. Journal of Applied Physics. 75, 2945–2951.
  • Bertóti I, Mohai M, Sullivan JL, Saied SO, 1995. Surface characterization of plasma-nitrided titanium: an XPS study. Applied Surface Science 84, 357-371.
  • Ghamchia HS, Hassanzadehb A, Talebiana M, Chenari HM, 2007. Thickness influence on optical andelectrochemical properties of dititanium trioxide (Ti2O3) films deposited on glass substrates by electron beam gun evaporation. Physica B: Condensed Matter 389, 329–334.

Growth and Characterization of TiO2 Thin Films by PLD Technique

Year 2021, Volume: 11 Issue: 1, 221 - 226, 01.03.2021
https://doi.org/10.21597/jist.796916

Abstract

In this work, the structural, optical and electronic properties of TiO2 thin films grown on glass substrate by Pulse Laser Deposition (PLD) technique are presented. The stoichiometry and the oxidation degree of films were analyzed by considering the Ti 2p and O 1s core energy levels with high resolution X-Ray Photoelectron spectroscopy (XPS). The structural characteristics of the thin films have been investigated by X-Ray Diffraction (XRD) and Scanning Electron Microscope (SEM) technique. The optical absorption region of growth TiO2 films were analyzed by Photoluminescence spectroscopy (PL) technique. Spin-orbit coupling splitting of Ti 2p states was measured as 5.7 eV. The characterizations promote the existence of the metal and oxygen vacancies at the surface of film. These point defects enhance the hysteretic transport properties of the TiO2 metal oxide.

References

  • Sittig CE, 1998. Charakterisierung der oxidschichten auf titan und titanlegierungen sowie deren reaktionen in kontact mit biologisch relevanten modellösungen. Dissertation ETH Nr. 12657, Zürich.
  • Bally A, 1999. Electronic properties of nano-crystalline titanium dioxide thin films. Dissertation ETH Nr. 2094, Zürich.
  • Pulker HK, Paesold G and Ritter E, 1976. Refractive indices of TiO2 films produced by reactive evaporationof various titanium–oxygen phases. Applied Optics 15, 2986-2991.
  • DeVore JR, 1951. Refractive Indices of Rutile and Sphalerite. Journal of the Optical Society of America.41, 416-419.
  • Gale E, 2014. TiO2-based memristors and ReRAM: materials, mechanisms and models (a review).Semiconductor Science and Technology. 29, 104004 (10pp).
  • Ding XZ, Liu XH and He YZ, 1996. Grain size dependence of anatase-to-rutile structural
  • transformation in gel-derived nanocrystalline titania powders. Journal of Materials Science Letters. 15, 1789–1791.
  • Jamieson J, Olinger B, 1969. Pressure-temperature studies of anatase, brookite rutile, and TiO2(II): A discussion. American Mineralogist. 54 (9-10): 1477–1481.
  • Gamboa JA, Pasquevich DM, 1992. Effect of chlorine atmosphere on the anatase‐rutile transformation. Journal of the American Ceramic Society. 75, 2934.
  • Pistorius CWFT, 1976. Phase relations and structures of solids at high pressures. Progress in Solid State Chemistry 11, Part 1, 1-151.
  • Smith SJ, Stevens R, Liu S, Li G, Navrotsky A, Boerio-Goates J, Woodfield BF, 2009. Heat capacities and thermodynamic functions of TiO2 anatase and rutile: Analysis of phase stability. American Mineralogist, 94, issue 2-3, pp. 236-243.
  • Ghosh TB, Dhabal S, Datta AK, 2003. On crystallite size dependence of phase stability of nanocrystalline TiO2. Journal of Applied Physics 94, 4577.
  • Murrray JL, Wriedy HA, 1987. The O−Ti (oxygen-titanium) system. Journal of Phase Equilibria 8, 148–165.
  • Pan X, Yang MQ, Fu X, Zhang N and Xu YJ, 2013. Defective TiO2 with oxygen vacancies: synthesis, properties and photocatalytic applications. Nanoscale 5, 3601.
  • Wu J, Cao J, Han W-Q, Janotti A, Kim H-C, 2012. Functional Metal Oxide Nanostructures, Electronic ISBN: 978-1-4419-9931-3.
  • Stukov DB, Snider GS, Stewart DR, Williams RS, 2008. The missing memristor found. Nature 80,453.
  • Sanjinés R, Tang H, Berger H, Gozzo F, Margaritondo G, and. Lévy F, 1994. Electronic structure of anatase TiO2 oxide. Journal of Applied Physics. 75, 2945–2951.
  • Bertóti I, Mohai M, Sullivan JL, Saied SO, 1995. Surface characterization of plasma-nitrided titanium: an XPS study. Applied Surface Science 84, 357-371.
  • Ghamchia HS, Hassanzadehb A, Talebiana M, Chenari HM, 2007. Thickness influence on optical andelectrochemical properties of dititanium trioxide (Ti2O3) films deposited on glass substrates by electron beam gun evaporation. Physica B: Condensed Matter 389, 329–334.
There are 19 citations in total.

Details

Primary Language English
Subjects Metrology, Applied and Industrial Physics
Journal Section Fizik / Physics
Authors

Sinan Kazan 0000-0002-8183-5733

Publication Date March 1, 2021
Submission Date September 18, 2020
Acceptance Date November 9, 2020
Published in Issue Year 2021 Volume: 11 Issue: 1

Cite

APA Kazan, S. (2021). Growth and Characterization of TiO2 Thin Films by PLD Technique. Journal of the Institute of Science and Technology, 11(1), 221-226. https://doi.org/10.21597/jist.796916
AMA Kazan S. Growth and Characterization of TiO2 Thin Films by PLD Technique. J. Inst. Sci. and Tech. March 2021;11(1):221-226. doi:10.21597/jist.796916
Chicago Kazan, Sinan. “Growth and Characterization of TiO2 Thin Films by PLD Technique”. Journal of the Institute of Science and Technology 11, no. 1 (March 2021): 221-26. https://doi.org/10.21597/jist.796916.
EndNote Kazan S (March 1, 2021) Growth and Characterization of TiO2 Thin Films by PLD Technique. Journal of the Institute of Science and Technology 11 1 221–226.
IEEE S. Kazan, “Growth and Characterization of TiO2 Thin Films by PLD Technique”, J. Inst. Sci. and Tech., vol. 11, no. 1, pp. 221–226, 2021, doi: 10.21597/jist.796916.
ISNAD Kazan, Sinan. “Growth and Characterization of TiO2 Thin Films by PLD Technique”. Journal of the Institute of Science and Technology 11/1 (March 2021), 221-226. https://doi.org/10.21597/jist.796916.
JAMA Kazan S. Growth and Characterization of TiO2 Thin Films by PLD Technique. J. Inst. Sci. and Tech. 2021;11:221–226.
MLA Kazan, Sinan. “Growth and Characterization of TiO2 Thin Films by PLD Technique”. Journal of the Institute of Science and Technology, vol. 11, no. 1, 2021, pp. 221-6, doi:10.21597/jist.796916.
Vancouver Kazan S. Growth and Characterization of TiO2 Thin Films by PLD Technique. J. Inst. Sci. and Tech. 2021;11(1):221-6.