SPRAY PYROLYSİS YÖNTEMİYLE ÜRETİLEN IN2O3 FİLMLERİNİN YAPISAL VE OPTİK ÖZELLİKLERİ

Öz

Geçirgen iletken oksitlerden biri olan indiyum oksit (In2O3) yarıiletken filmleri spray pyrolysis yöntemiyle 300, 350 ve 400 °C taban sıcaklıklarında cam tabanlar üzerine elde edilmiştir. X‐ışını kırınım desenleri incelendiğinde, numunelerin cisim merkezli kübik In2O3 kristal yapısına sahip olduğu ve taban sıcaklığı artışının filmlerin yapısal özelliklerini iyileştirdiği belirlenmiştir. Alan emisyon taramalı elektron mikroskobu görüntülerinden, elde edilen filmlerin yüzeye iyi tutunduğu, homojen bir dağılım sergilediği ve taneli bir yapılanmanın olduğu saptanmıştır. Geçirgenlik ölçümlerinden numunelerin direkt bant geçişine sahip olduğu ve bant aralığı değerlerinin 3,38 ‐ 3,67 eV aralığında değiştiği belirlenmiştir. Numunelerin kırılma indisi ve sönüm katsayısı spektrumundan envelope yöntemi yardımıyla incelenmiştir. In2O3filmlerinin dielektrik sabitleri (n, k, ε1 ve ε∞), plazma frekansı ωpve taşıyıcı yoğunluğu Nopt gibi optik parametreleri de belirlenmiştir

Anahtar Kelimeler

• İndiyum Oksit, Spray Pyrolysis, Envelope Yöntemi, Dielektrik Sabitler

Structural and Optical Properties of In2O3 Films Produced by SprayPyrolysis Technique

Öz

Indium oxide (In2O3) semiconducting films, as one of important transparent conducting oxides, have been produced by spray pyrolysis technique on glass substrates at 300, 350 and 400 °C substrate temperatures. X‐ray diffraction studies showed that the samples have body centered cubic In2O3 structure and the increasing of substrate temperature improves the structural properties of the films. From field emission scanning electron microscopy results, the films adhered well to the substrates and show a homogeneous distribution with layers of fine grains. The samples have exhibited direct transition with the band gap values lying in the range between 3.38 – 3.67 eV using transmittance measurements. The refractive index and extinction coefficient as a function of wavelength for the samples were investigated from reflectance spectrum by applying the envelope method in the strongly absorbing regime. The optical parameters of the In2O3

Anahtar Kelimeler

• Indium oxide, Spray pyrolysis, Envelope method, Dielectric constants

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