MEMS Tabanlı Elektrotermal Mikro-Aktüatörün Tasarımı ve Sonlu Elemanlar Analizi
Öz
Anahtar Kelimeler
Kaynakça
- [1] Mineta, T., Yanatori, H., Hiyoshi, K., Tsuji, K., Ono, Y., Abe, K., Tactile Display MEMS Device with SU8 Micro-pin and Spring on SMA Film Actuator Array, 19th International Conference on Solid-State Sensors, Actuators and Microsystems, 2017, 2031-2034. [2] Singh, J., Kumar, A., Chelvane, J. A., Stress Compensated MEMS Magnetic Actuator Based on Magnetostrictive Fe65Co35 Thin Films, Sensors and Actuators A: Physical, 2019, 294 (1), 54-60. [3] Çiftçi, H., ERSOY, B. Adsorption of Cr (VI) Ions on Magnetite Nano-Particles (Fe3O4): Kinetic and Thermodynamic Studies. El-Cezeri Journal of Science and Engineering, 2016, 3(3), 417-427. [4] Rodríguez, G. A. A., Suhard, S., Rossi, C., Esteve, D., Fau, P., Sabo-Etienne, S., Chaudret, B., A Microactuator Based on the Decomposition of an Energetic Material for Disposable lab-on-chip Applications: Fabrication and Test, Journal of Micromechanics and Microengineering, 2008, 19 (1), 12-25. [5] Wang, J., Zhang, W., Wang, L., Shen, R., Xu, X., Ye, J., Chao, Y., Novel Approach to the Preparation of Organic Energetic Film for Microelectromechanical Systems and Microactuator Applications. ACS applied materials & interfaces, 2014, 6 (14), 10992-10996. [6] Flick, E., Belski, A., Li, W., Steinhoff, G., & Gatzen, H. H., Magnetic Microactuator for Controlling Nanoparticles in gene Delivery Applications. IEEE Transactions on Magnetics, 2009, 45 (10), 4869-4872. [7] Biswas, P. K., Bannerjee, S., Analysis of UI and UU type rail and actuator used in electromagnetic levitation system using FEM software, International Journal of Emerging Technology and Advanced Engineering, 2012, 2 (5), 32-39. [8] Elbuken, C., Gui, L., Ren, C. L., Yavuz, M., Khamesee, M. B., Design and Analysis of a Polymeric Photo-Thermal Microactuator, Sensors and Actuators A: Physical, 2008, 147 (1), 292-299. [9] Lau, G. K., Goosen, J. F., van Keulen, F., Duc, T. C., Sarro, P. M., Polymeric Thermal Microactuator with Embedded Silicon Skeleton: Part I—Design and Analysis, Journal of Microelectromechanical systems, 2008, 17(4), 809-822. [10] Seng, A. B., Dahari, Z., Sidek, O., Miskam, M. A., Design and Analysis of Thermal Micro-Actuator, European Journal of Scientific Research, 2009, 35 (2), 281-292. [11] Karbasi, S. M., Shamshirsaz, M., Naraghi, M., Maroufi, M., Optimal Design Analysis of Electrothermally Driven Microactuators. Microsystem technologies, 2010, 16 (7), 1065-1071. [12] Dong, Y. A., Raafat, Mansour,, Design and Modeling of MEMS Bidirectional Vertical Thermal Actuator, J. Micromech. Microeng, 2004, 14 (2), 841-845. [13] Ching, L., Meng, Lin., Chang, L., Modeling and Analysis of Electro Thermalactuators, Journal of the Chinese Institute of Engineers, 2009, 32 (3), 351-360. [14] Nikolas, C., Luke, P. L., Electrothermally Activated SU-8 Microgripper for Single Manipulation in Solution”, J. Micro electro Mechanical Syst., 2005, 35 (4), 857-863. [15] Aravind, A., Naryana, R., Analyssi of Hybrid Electrothermal Mechanical Microactuators with Integrated Electrothermal and Electrostatic Actuation, J. Micro electro Mechanical Syst., 2009, 18 (3), 1126-1136. [16] Wu, L., Xie, H., A Large Vertical Displacement Electrothermal Bimorph Microactuator with very Small Lateral Shift, Sensors and Actuators A: Physical, 2008, 145 (2), 371-379. [17] Huang, H., Wang, L., Wu, Y., Design and Experimental Research of a Rotary Micro-Actuator Based on a Shearing Piezoelectric Stack, Micromachines, 2019, 10 (2), 96-110.
Ayrıntılar
Birincil Dil
Türkçe
Konular
Mühendislik
Bölüm
Araştırma Makalesi
Yazarlar
Osman Ülkir
*
0000-0002-1095-0160
Türkiye
İshak Ertugrul
0000-0001-9586-0377
Türkiye
Nihat Akkuş
0000-0002-3891-5340
Türkiye
Yayımlanma Tarihi
30 Eylül 2020
Gönderilme Tarihi
10 Nisan 2020
Kabul Tarihi
15 Haziran 2020
Yayımlandığı Sayı
Yıl 2020 Cilt: 7 Sayı: 3
