RF Magnetron Sıçratma ile Sentezlenen Nano Yapılı ZnO Yarıiletken İnce Filmlerin Optik ve Yüzey Özellikleri

Volkan Şenay

doi:10.17714/gumusfenbil.538545

EN TR

RF Magnetron Sıçratma ile Sentezlenen Nano Yapılı ZnO Yarıiletken İnce Filmlerin Optik ve Yüzey Özellikleri

Abstract

Bu araştırmada, RF magnetron sıçratma tekniği ile 50 W, 100 W ve 125 W RF güçleri ile üç ayrı deneyde ZnO ince filmler cam mikroskop lamlarının üzerine biriktirilmiştir. Her biriktirme işlemi 30 dakika sürdürülmüştür. Spektroskopik reflektometre, UV-VIS spektrofotometre ve atomik kuvvet mikroskobu (AFM), üretilen ince filmlerin optik ve yüzey özellikleri üzerine sıçratma gücünün etkisini incelemek için kullanılmıştır. Yansıtma ve geçirgenlik düzeyi, kırılma indisi ve yasak enerji aralığı değerleri ile yüzey homojenliği ve pürüzlülüğün RF gücüne bağlı olduğu bulunmuştur. Yasak enerji aralığı yaklaşık 3.83-3.87 eV civarındadır. Üretilen son derece şeffaf ZnO ince filmler, çeşitli optoelektronik cihazlar ve gelecekteki şeffaf iletken elektrot uygulamalarında kullanılabilir.

Keywords

Optical properties,RF magnetron sıçratma,Yüzey özellikleri,ZnO ince filmler

Kaynakça

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Ayrıntılar

Birincil Dil

İngilizce

Konular

Mühendislik

Bölüm

Araştırma Makalesi

Yazarlar

Volkan Şenay ^*
0000-0002-6579-2737
Türkiye

Yayımlanma Tarihi

15 Ekim 2019

Gönderilme Tarihi

12 Mart 2019

Kabul Tarihi

23 Ağustos 2019

Yayımlandığı Sayı

Yıl 2019 Cilt: 9 Sayı: 4

DOI

https://doi.org/10.17714/gumusfenbil.538545

IZ

https://izlik.org/JA28JX85YK

APA

Şenay, V. (2019). RF Magnetron Sıçratma ile Sentezlenen Nano Yapılı ZnO Yarıiletken İnce Filmlerin Optik ve Yüzey Özellikleri. Gümüşhane Üniversitesi Fen Bilimleri Dergisi, 9(4), 759-767. https://doi.org/10.17714/gumusfenbil.538545

Cited By

Compatibility and performance study of electrohydrodynamic printing using zinc oxide inkjet ink

Scientific Reports

https://doi.org/10.1038/s41598-024-67858-1

e-ISSN: 2146-538X Yayın Modeli: Sürekli Yayın Atıf Dizinleri: TR Dizin , SCOPUS

RF Magnetron Sıçratma ile Sentezlenen Nano Yapılı ZnO Yarıiletken İnce Filmlerin Optik ve Yüzey Özellikleri

RF Magnetron Sıçratma ile Sentezlenen Nano Yapılı ZnO Yarıiletken İnce Filmlerin Optik ve Yüzey Özellikleri

Abstract

Keywords

Optical and Surface Properties of Nanostructured ZnO Semiconductor Thin Films Synthesized by RF Magnetron Sputtering

Öz

Anahtar Kelimeler

Kaynakça

Ayrıntılar

Birincil Dil

Konular

Bölüm

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Yayımlanma Tarihi

Gönderilme Tarihi

Kabul Tarihi

Yayımlandığı Sayı

DOI

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Cited By

Compatibility and performance study of electrohydrodynamic printing using zinc oxide inkjet ink