Investigation of Adhesion and Multi-pass Scratch Test Behaviour of Magnetron Sputtered Diamond-Like Carbon Films

Öz

Diamond-like carbon (DLC) thin films are now widely spread over a wide variety of base materials

due to their low coefficient of friction, high hardness, high abrasion resistance and chemical inactivity. An

important aspect of such coatings is the adhesion of the coating to the substrate. In this study, The DLC films were

coated on the inconel substrates with magnetron sputtering method using TiN and TiCN interlayers to increase the

adhesion and to obtain higher strength. Structural, mechanical, adhesion and fatigue-like behaviors of the films

were characterized. X-ray diffractometer (XRD) and scanning electron microscope (SEM) were used for structural

and chemical analysis of the films. To intevtigate mechanical properties, adhesion and fatigue-like properties of the

films, micro-hardness test, increasingly loaded scratch test and 100,250 and 500 cycles of multi-scratch tests were

applied to the films. The microhardness of the film dtermined as 39.8 GPa. According to the adhesion tests, the first

critical load value of the DLC film was determined as 22 N and the film maintained its strength on the substrate

until the load of 25N. According to the results of the multi-scratch test, it was observed that the DLC films grown

by the TiN-TiCN interlayer could be held on the substrate even at the end of 250 cycles.

Anahtar Kelimeler

• Adhesion,DLC,magnetron sputtering

Magnetron Sıçratma Yöntemi ile Büyütülen Elmas Benzeri Karbon Filmlerin Adezyon ve Çoklu-Çizik Test Davranışlarının Araştırılması

Öz

Elmas benzeri karbon (DLC) ince filmler sahip oldukları düşük sürtünme katsayısı, yüksek sertlik, yüksek

aşınma dayanımı ve kimyasal inaktiflik özelliklerinden dolayı günümüzde çok yaygın olarak çok çeşitli taban

malzemeler üzerine kaplanmaktadır. Bu tür kaplamalarda önemli olan bir husus ise kaplamanın taban malzemeye

olan adezyonu/yapışkanlığıdır. Bu çalışmada DLC filmler inconel taban malzeme üzerine adezyonu artırmak ve

daha yüksek dayanım elde etmek için TiN ve TiCN aratabakalar kullanılarak magnetron sıçratma yöntemi ile

kaplanmıştır. Fimlerin yapısal, mekanik, adezyon ve yorulma benzeri davranışları karakterize edildi. Bu çalışmada

filmlerin yapısal ve kimyasal analizleri için X-ray difraktometre (XRD) ve taramalı elektron mikroskopu (SEM)

kullanıldı. Mekanik özellikler için mikro-sertlik, adezyon ve yorulma benzeri özellikleri için ise artan yüklü çizik

test ve 100, 250 ve 500 çevrimlik çoklu-çizik testleri filmlere uygulandı. Filmin mikrosertlik değeri 39.8 GPa

olarak tespit edildi. Adezyon testlerine göre DLC filmde kritik yük değeri 22 N olarak belirlendi ve 25N yüke

kadar film taban malzeme üzerinde dayanımını sürdürdü. Çoklu çizik test sonuçlarına göre TiN/TiCN aratabaka ile

büyütülen DLC filmlerin 250 çevrim sonuna kadar çok iyi dayanım gösterdiği gözlenmiştir.

Anahtar Kelimeler

• Adezyon,DLC,magnetron sıçratma

Kaynakça

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