Gold/palladium (Au/Pd) Bimetallic Thin Film Deposition by Radio Frequency Magnetron Sputtering Technique

Öz

In this study, two gold/palladium (Au/Pd) thin films having 20 nm and 80 nm thickness values were simultaneously deposited on glass substrates by adjusting target-substrate distance via radio frequency (RF) magnetron sputtering technique. The optical and surface properties of the produced thin films were investigated by using UV-VIS spectrophotometer, interferometer, tensiometer and atomic force microscope. The effects of film thickness on the investigated properties of the thin films were reported.

Anahtar Kelimeler

• Bimetallic thin films,optical properties,surface properties,low surface free energy

Radyo Frekans Magnetron Sıçratma Tekniği ile Altın/Paladyum (Au/Pd) Bimetalik İnce Film Biriktirme

Öz

Bu çalışmada, 20 nm ve 80 nm kalınlığa sahip iki adet altın/paladyum (Au/Pd) ince film, eş zamanlı olarak radyo frekans (RF) magnetron sıçratma tekniği ile hedef-alttaş mesafesinin ayarlanmasıyla cam alttaşlar üzerinde biriktirilmiştir. Üretilen ince filmlerin optik ve yüzey özellikleri UV-VIS spektrofotometre, interferometre, tansiyometre ve atomik kuvvet mikroskobu kullanılarak incelenmiştir. Film kalınlığının, ince filmlerin incelenen özellikleri üzerindeki etkileri rapor edilmektedir.

Anahtar Kelimeler

• Bimetalik ince filmler,optik özellikler,yüzey özellikleri,düşük serbest yüzey enerjisi

Kaynakça

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