Borophene Production and Characterization by Chemical Vapor Deposition Method

Yıl 2023, Cilt: 13 Sayı: 2, 120 - 130, 31.12.2023

Erhan Özkan

https://doi.org/10.54370/ordubtd.1271515

Öz

After the synthesis of graphene, studies on two-dimensional (2D) materials continued, and resulting that borophene is a magic 2D superfine material. While most of the study on borophene is still theoretical, and few experimental studies have been observed. In this study, the parameters of the copper coating surfaces, which are widely used in electronic applications, with borophene synthesized by chemical vapor deposition (CVD) method and the coatings’ characterization were investigated. Thin copper films were chosen as the substrate material and borophene synthesis was carried out by CVD method with a 1/1 gravimetric ratio of metallic boron and boroxide powder mixture, 50 milliTor pressure and 100 sccm hydrogen gas at a temperature range of 950-1035 °C. Characteristic borophene bands at 181 cm-1, and 1148 cm-1 were observed by Raman Spectrometry. The nanostructure was confirmed by using Scanning Electron Microscopy (SEM). The electrical conductivity was tested with the four-point probe technique, and it was observed that the electrical resistance increased with increasing temperature, the conductivity completely disappeared at 1035 °C. As a result of the study, the parameters required for the production and characterization studies of borophene film layers were defined and recorded.

Anahtar Kelimeler

Borophene, CVD, Raman, SEM

Kimyasal Buhar Biriktirme Yöntemi ile Borofen Üretimi ve Karakterizasyonu

Öz

Grafenin sentezlenmesinin ardından iki boyutlu (2D) malzemeler hakkında çalışmalar devam etmiş ve bu çalışmalar neticesinde borofenin 2D sihirli bir süper ince malzeme olduğu keşfedilmiştir. Borofen üzerindeki çalışmaların çoğu halen teorik olarak devam etmekle birlikte çok az deneysel çalışma gözlenmiştir. Üstün özellikleri sebebiyle gelecekte bu malzemenin farklı teknolojilerde çokça karşımıza çıkacağı ön görülmektedir. Bu çalışmada elektronik uygulamalarda yaygın olarak kullanılan bakır yüzeylerin kimyasal buhar biriktirme (CVD) yöntemi ile sentezlenmiş borofen ile kaplanmasına ait parametreler ve kaplamaların karakterizasyonuna etkileri araştırılmıştır. İnce bakır filmler altlık malzemesi olarak seçilmiş ve 950-1035 °C sıcaklık aralıklarında CVD yöntemi ile 1/1 gravimetrik oranda metalik bor ve boroksit toz karışımı, 50 mili Tor basınç ve 100 sccm hidrojen gazı altında borofen sentezi gerçekleştirilmiştir. Üretilen borofen ince filmlerin karakterizasyon çalışmasında Raman Spektrometresi’nden faydalanılmış ve 181 cm-1 ile 1148 cm-1’deki karakteristik bantları gözlenmiştir. Sentezlenen ince film tabakaların yapı kontrollerinde Taramalı Elektron Mikroskobu (SEM) kullanılarak nano yapı doğrulanmıştır. Kaplamaların elektriksel iletkenlikleri dört nokta prob tekniği ile test edilmiş, artan sıcaklık ile elektriksel direncin arttığı gözlenmiş ve 1035 °C’den sonra iletkenliğin tamamen ortadan kalktığı tespit edilmiştir. Çalışmanın sonucunda borofen film tabakalarının üretilmesi ve karakterizasyon çalışmaları için gerekli olan parametreler tanımlanarak kayıt altına alınmıştır.

Anahtar Kelimeler

CVD, Raman, SEM, borofen

Kaynakça

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