Yıl 2020, Cilt 23 , Sayı 2, Sayfalar 291 - 296 2020-06-01

XRD vs Raman for InGaN/GaN Structures
XRD vs Raman for InGaN/GaN Structures

Ahmet Kürşat BİLGİLİ [1] , Ömer AKPINAR [2] , Mustafa Kemal ÖZTÜRK [3] , Süleyman ÖZÇELİK [4] , Ekmel ÖZBAY [5]


In this study, InGaN/GaN structures are grown by using Metal Organic Chemical Vapor Deposition (MOCVD) technique. Some structural, optical and morphological properties of InGaN/GaN structures are investigated in detail. For structural analysis, X-ray diffraction (XRD), for optical, Raman and morphological, Atomic Force Microscopy (AFM) measurement techniques are used. In XRD analysis both samples presented hexagonal crystal structure. XRD peaks for these two samples showed small differences dependent on growth conditions. Strain and stress values are determined from XRD and they are compared with Raman results. In Raman analysis, five different chemicals are determined in both samples. Raman analysis results are in good accordance with XRD, growth conditions and AFM images. In AFM images, there can be seen hills and holes and they are partly homogeneous. There are also some white regions in AFM images. According to Raman peak center data, these white regions are detected as white rust.

In this study, InGaN/GaN structures are grown by using Metal Organic Chemical Vapor Deposition (MOCVD) technique. Some structural, optical and morphological properties of InGaN/GaN structures are investigated in detail. For structural analysis, X-ray diffraction (XRD), for optical, Raman and morphological, Atomic Force Microscopy (AFM) measurement techniques are used. In XRD analysis both samples presented hexagonal crystal structure. XRD peaks for these two samples showed small differences dependent on growth conditions. Strain and stress values are determined from XRD and they are compared with Raman results. In Raman analysis, five different chemicals are determined in both samples. Raman analysis results are in good accordance with XRD, growth conditions and AFM images. In AFM images, there can be seen hills and holes and they are partly homogeneous. There are also some white regions in AFM images. According to Raman peak center data, these white regions are detected as white rust.

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Birincil Dil en
Konular Mühendislik
Bölüm Araştırma Makalesi
Yazarlar

Orcid: 0000-0003-3420-4936
Yazar: Ahmet Kürşat BİLGİLİ (Sorumlu Yazar)
Kurum: GAZİ ÜNİVERSİTESİ
Ülke: Turkey


Orcid: 0000-0002-5172-8283
Yazar: Ömer AKPINAR
Kurum: GAZİ ÜNİVERSİTESİ
Ülke: Turkey


Orcid: 0000-0002-8508-5714
Yazar: Mustafa Kemal ÖZTÜRK
Kurum: GAZİ ÜNİVERSİTESİ
Ülke: Turkey


Orcid: 0000-0002-3761-3711
Yazar: Süleyman ÖZÇELİK
Kurum: GAZİ ÜNİVERSİTESİ
Ülke: Turkey


Orcid: 0000-0003-2953-1828
Yazar: Ekmel ÖZBAY
Kurum: İHSAN DOĞRAMACI BİLKENT ÜNİVERSİTESİ
Ülke: Turkey


Tarihler

Yayımlanma Tarihi : 1 Haziran 2020

Bibtex @araştırma makalesi { politeknik537733, journal = {Politeknik Dergisi}, issn = {}, eissn = {2147-9429}, address = {Gazi Üniversitesi Teknoloji Fakültesi 06500 Teknikokullar - ANKARA}, publisher = {Gazi Üniversitesi}, year = {2020}, volume = {23}, pages = {291 - 296}, doi = {10.2339/politeknik.537733}, title = {XRD vs Raman for InGaN/GaN Structures}, key = {cite}, author = {BİLGİLİ, Ahmet Kürşat and AKPINAR, Ömer and ÖZTÜRK, Mustafa Kemal and ÖZÇELİK, Süleyman and ÖZBAY, Ekmel} }
APA BİLGİLİ, A , AKPINAR, Ö , ÖZTÜRK, M , ÖZÇELİK, S , ÖZBAY, E . (2020). XRD vs Raman for InGaN/GaN Structures. Politeknik Dergisi , 23 (2) , 291-296 . DOI: 10.2339/politeknik.537733
MLA BİLGİLİ, A , AKPINAR, Ö , ÖZTÜRK, M , ÖZÇELİK, S , ÖZBAY, E . "XRD vs Raman for InGaN/GaN Structures". Politeknik Dergisi 23 (2020 ): 291-296 <https://dergipark.org.tr/tr/pub/politeknik/issue/53587/537733>
Chicago BİLGİLİ, A , AKPINAR, Ö , ÖZTÜRK, M , ÖZÇELİK, S , ÖZBAY, E . "XRD vs Raman for InGaN/GaN Structures". Politeknik Dergisi 23 (2020 ): 291-296
RIS TY - JOUR T1 - XRD vs Raman for InGaN/GaN Structures AU - Ahmet Kürşat BİLGİLİ , Ömer AKPINAR , Mustafa Kemal ÖZTÜRK , Süleyman ÖZÇELİK , Ekmel ÖZBAY Y1 - 2020 PY - 2020 N1 - doi: 10.2339/politeknik.537733 DO - 10.2339/politeknik.537733 T2 - Politeknik Dergisi JF - Journal JO - JOR SP - 291 EP - 296 VL - 23 IS - 2 SN - -2147-9429 M3 - doi: 10.2339/politeknik.537733 UR - https://doi.org/10.2339/politeknik.537733 Y2 - 2019 ER -
EndNote %0 Politeknik Dergisi XRD vs Raman for InGaN/GaN Structures %A Ahmet Kürşat BİLGİLİ , Ömer AKPINAR , Mustafa Kemal ÖZTÜRK , Süleyman ÖZÇELİK , Ekmel ÖZBAY %T XRD vs Raman for InGaN/GaN Structures %D 2020 %J Politeknik Dergisi %P -2147-9429 %V 23 %N 2 %R doi: 10.2339/politeknik.537733 %U 10.2339/politeknik.537733
ISNAD BİLGİLİ, Ahmet Kürşat , AKPINAR, Ömer , ÖZTÜRK, Mustafa Kemal , ÖZÇELİK, Süleyman , ÖZBAY, Ekmel . "XRD vs Raman for InGaN/GaN Structures". Politeknik Dergisi 23 / 2 (Haziran 2020): 291-296 . https://doi.org/10.2339/politeknik.537733
AMA BİLGİLİ A , AKPINAR Ö , ÖZTÜRK M , ÖZÇELİK S , ÖZBAY E . XRD vs Raman for InGaN/GaN Structures. Politeknik Dergisi. 2020; 23(2): 291-296.
Vancouver BİLGİLİ A , AKPINAR Ö , ÖZTÜRK M , ÖZÇELİK S , ÖZBAY E . XRD vs Raman for InGaN/GaN Structures. Politeknik Dergisi. 2020; 23(2): 296-291.