ULTRA YÜKSEK VAKUM UYGULAMALARI İÇİN GÖMÜLÜ SİSTEM TABANLI SOĞUK KATOT VAKUM ÖLÇÜM SİSTEMİNİN GELİŞTİRİLMESİ

Öz

Vakum ölçümleri, savunma sanayisi, uzay teknolojileri, kompozit malzeme üretimi ve endüstriyel uygulamalar gibi birçok kritik alanda yaygın olarak kullanılmaktadır. Vakum sistemlerinde performansı belirleyen temel parametreler arasında ölçüm aralığının genişliği, ölçüm hassasiyeti ve sensör kullanım ömrü yer almaktadır. Bu çalışmada, sıcak katot sistemlere kıyasla daha geniş ölçüm aralığı, uzun kullanım ömrü ve kullanım kolaylığı sunan Inverted Magnetron (IMT) soğuk katot vakum ölçüm sensörü detaylı bir şekilde incelenmiştir. IMT katot yapısı, düşük basınçlarda (10⁻³ Torr altı) manyetik alan etkisiyle elektron hareketini optimize ederek yüksek iyonizasyon verimliliği sağlamasıyla öne çıkmaktadır. Sensörün performansını optimize etmek amacıyla, dijital okuma yapabilen yüksek kararlılığa sahip bir elektronik sistem tasarlanmış ve turbo moleküler vakum pompası ile deneysel karakterizasyon çalışmaları gerçekleştirilmiştir. Yapılan deneysel çalışmalar sonucunda, IMT katot soğuk katot sensör ile 9,9 ×10⁻⁸ Torr seviyesine kadar olan vakum değerleri başarıyla ölçülmüştür. Bu sonuçlar, IMT katot tasarımının düşük basınç uygulamalarında sunduğu stabilite ve geniş dinamik aralığın bir göstergesidir. Tasarlanan esnek elektronik sistem sayesinde, vakum sistemlerinde yüksek hassasiyetle dijital ölçüm ve kontrol imkânı sağlanmıştır. Bu çalışma, IMT katot teknolojisini temel alan ekonomik, uzun ömürlü ve düşük basınç seviyelerinde kararlı ölçüm yapabilen bir vakum ölçüm sisteminin geliştirilmesine katkı sunmaktadır.

Anahtar Kelimeler

• Vakum ölçümü
• soğuk katot iyonizasyon sensörü
• elektronik tasarım
• düşük basınç ölçümü

DEVELOPMENT OF AN EMBEDDED SYSTEM-BASED COLD CATHODE VACUUM MEASUREMENT SYSTEM FOR (ULTRA HIGH VACUUM) UHV APPLICATIONS

Öz

Vacuum measurements are widely utilized in numerous critical applications including defense industries, aerospace technologies, composite material manufacturing, and various industrial processes. The key performance parameters in vacuum systems include measurement range, accuracy, and operational lifetime of the sensing elements. This study presents a comprehensive investigation of an Inverted Magnetron (IMT) cold cathode vacuum measurement sensor, which offers distinct advantages over conventional hot cathode systems, including an extended measurement range, prolonged operational lifetime, and user-friendly operation. The IMT cathode configuration demonstrates superior performance in low-pressure regimes (below 10⁻³ Torr) by optimizing electron trajectories through magnetic field confinement, thereby achieving high ionization efficiency. To optimize sensor performance, a high-stability digital electronic readout system was designed and implemented. Experimental characterization was conducted using a turbo-molecular vacuum pump, with measurement results successfully demonstrating the system's capability to accurately measure vacuum levels down to 9,9 ×10⁻⁸ Torr. These findings validate the IMT cathode design's exceptional stability and wide dynamic range in ultra-high vacuum applications. The developed flexible electronic system enables high-precision digital measurement and control of vacuum systems. This research contributes to the development of an economical, long-lifetime vacuum measurement system capable of stable operation at low-pressure regimes, based on IMT cathode technology.

Anahtar Kelimeler

• Vacuum measurement
• cold cathode ionization sensor
• electronic design
• low pressure measurement

Kaynakça

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