Mehmet Yilmaz profile image
Mehmet Yilmaz Dr. Bilkent University
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1 Publication
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Research Fields

Solid Mechanics Machine Design and Machine Equipment Microelectromechanical Systems (Mems)

Institution

Bilkent University

Publications

Novel and Low-Cost Techniques for Extending the Etch Capabilities of an Inductively Coupled Plasma Etch Tool That Has Clamp Fingers for Clamping 4-Inch Diameter Wafers
Authors: Mehmet Yilmaz
Published: 2024 , Black Sea Journal of Engineering and Science
DOI: 10.34248/bsengineering.1515784
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101

Articles published in
Black Sea Journal of Engineering and Science
Black Sea Journal of Engineering and Science
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