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T.yaşar Katırcıoğlu
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Argon ICP Plasma Simulations Related to the Effect of the Gas Flow Rate and the Location of the Coils to the System Working Parameters
Authors:
T.Yaşar Katırcıoğlu
, Ahmet Tuğhan Balkan, Erdal Bozkurt
Published: 2017 ,
Academic Platform - Journal of Engineering and Science
DOI: 10.21541/apjes.292612
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Academic Platform - Journal of Engineering and Science
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