Semi-Quantitative Texture Analysis and Investigation of Pole Figures of Bi-Layer Mo Thin Films Produced by DC Sputtering Method

Öz

Molybdenum (Mo) material is used in many different fields thanks to its unique properties. The compatibility of interface states between layers is investigated using texture analysis of thin films. The textures of the films may change according to the production parameters and subsequent processes. For this reason, it is necessary to determine the ideal production parameters in order to produce Mo thin films with the most suitable texture depending on the usage area. In this study, Mo thin films in BCC structure and (110) plane, which are often desired in CIGS solar cell applications, could be produced. The fabrication was carried out using a bi-layer fabrication strategy to improve the adhesion and electrical conductivity of the Mo film to the substrate surface. Surface, topography and structure analyzes of the produced films were performed with SEM, AFM and XRD systems, and polar figures were obtained by semi-quantitative texture analysis. When the topographic and detailed structural analysis results are compared with each other and with other studies in the literature, the usability of the production parameters revealed in this study has been demonstrated.

Anahtar Kelimeler

• Thin film
• Molybdenum
• Texture
• Pole figüre
• XRD

DC Saçtırma Metoduyla Üretilmiş Çift Katmanlı Mo İnce Filmlerin Yarı Kantitatif Doku Analizinin Yapılması ve Kutup Figürlerinin Araştırılması

Öz

Molibden (Mo) malzemesi benzersiz özellikleri sayesinde birçok farklı alanda kullanılmaktadır. İnce filmlerin doku analizleri sayesinde katmanlar arası arayüz durumlarının uyumluluğu araştırılmaktadır. Üretim parametrelerine ve sonrasında yapılan işlemlere göre filmlerin dokuları değişebilmektedir. Bu sebeple kullanım alanına bağlı olarak en uygun dokuya sahip Mo ince filmlerin üretilmesi için ideal üretim parametrelerinin belirlenmesi gerekmektedir. Bu çalışmada, CIGS güneş gözesi uygulamalarında sıklıkla istenen BCC yapısında ve (110) düzlemindeki Mo ince filmler üretilebilmiştir. Üretim, Mo filmin alttaş yüzeyine tutunumunu ve elektriksel iletkenliğini iyileştirmek için çift katmanlı üretim stratejisi kullanılarak gerçekleştirilmiştir. Üretilen filmlerin SEM, AFM ve XRD sistemleri ile yüzey, topoğrafya ve yapı analizleri gerçekleştirilmiş ayrıca yarı kantitatif doku analizleri yapılarak kutup figürleri elde edilmiştir. Topoğrafik ve detaylı yapısal analiz sonuçları birbirleri ile ve literatürde var olan diğer çalışmalar ile kıyaslandığında bu çalışmada ortaya koyulan üretim parametrelerinin kullanılabilirliği gösterilmiştir.

Anahtar Kelimeler

• İnce film
• molibden
• doku analizi
• kutup figürleri
• xrd

Kaynakça

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